IP Library › Granted Patent US 12,476,204
Granted Patent B2
US 12,476,204 · App. 18/488,981 · Granted Nov 18, 2025

Semiconductor package substrate with groove on die pad

Inventors: ChienHao Wang (Taipei, TW); Bob Lee (New Taipei, TW); YuhHarng Chien (Taipei, TW)
Assignee: TEXAS INSTRUMENTS INCORPORATED
H01L23/562G06T7/0004G06T7/70H01L21/4825H01L21/4842H01L21/565H01L21/681H01L23/3114H01L23/49513H01L23/4952H01L23/49541H01L23/49582G06T2207/30148
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Quick Facts
Patent No.
US 12,476,204
App. No.
18/488,981
Granted
Nov 18, 2025
Kind
B2
Abstract

A semiconductor package includes a metallic pad and leads spaced from the metallic pad by a gap, the metallic pad including a roughened surface. The semiconductor package further includes a semiconductor die including bond pads, and an adhesive between the roughened surface of the metallic pad and the semiconductor die, therein bonding the semiconductor die to the metallic pad, wherein the adhesive includes a resin. The metallic pad further includes a groove surrounding the semiconductor die on the roughened surface, the groove having a surface roughness less than a surface roughness of the roughened surface of the metallic pad.

Claims (24)

1 . A semiconductor package, comprising:

a metallic pad and a lead spaced from the metallic pad by a gap;

a semiconductor die; and

an adhesive between the metallic pad and the semiconductor die, wherein the metallic pad includes a groove around the semiconductor die, wherein the metallic pad has a first surface roughness outside the groove and a second surface roughness inside the groove, and wherein the first surface roughness is greater than the second surface roughness.

2 . The semiconductor package of claim 1 , wherein the first surface roughness is at least 1.0 micrometer (μm).

3 . The semiconductor package of claim 1 , wherein the second surface roughness is less than 0.5 μm.

4 . The semiconductor package of claim 1 , wherein the groove comprises a rectangular cross-section area.

5 . The semiconductor package of claim 1 , wherein the metallic pad comprises at least one of a metal oxide layer and a metal layer.

6 . The semiconductor package of claim 5 , wherein the metal layer comprises nickel.

7 . The semiconductor package of claim 1 , further comprising mold compound covering the semiconductor die, the adhesive, the metallic pad, and a portion of the lead.

8 . The semiconductor package of claim 1 , wherein the adhesive is spaced from the groove.

9 . The semiconductor package of claim 1 , wherein the adhesive is in contact with the groove.

10 . A method for fabricating a semiconductor package, comprising:

applying an adhesive to a surface of a metallic pad inside of a perimeter formed by a groove on the surface of the metallic pad, wherein the semiconductor package further includes a lead spaced from the metallic pad by a gap;

positioning a semiconductor die on the metallic pad in contact with the adhesive such that the groove is around the semiconductor die; and

curing the adhesive, wherein the metallic pad has a first surface roughness outside the groove and a second surface roughness inside the groove, and wherein the first surface roughness is greater than the second surface roughness.

11 . The method of claim 10 , further comprising stamping the surface of the metallic pad to form the groove.

12 . The method of claim 10 , further comprising laser milling the surface of the metallic pad to form the groove.

13 . The method of claim 10 , further comprising covering the semiconductor die, the adhesive, the metallic pad, and a portion of the lead with mold compound.

14 . The method of claim 10 , wherein the groove comprises a rectangular cross-section area.

15 . The method of claim 10 , wherein the metallic pad comprises at least one of a metal oxide layer and a metal layer.

16 . The method of claim 15 , wherein the metal layer comprises nickel.

17 . The method of claim 10 , wherein the adhesive is spaced from the groove.

18 . The method of claim 10 , wherein the adhesive is in contact with the groove.

Continuity (3)
Continuation 17719235 · Apr 12, 2022
Continuation 16724179 · Dec 20, 2019
Related Publication 20240047381A1 · Feb 8, 2024
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