Composition for semiconductor process, method for preparing the same and method for preparing semiconductor device using the same
The present disclosure is a composition for a semiconductor process applied to a polishing process of a semiconductor wafer and, more specifically, to a semiconductor process involving a polishing process of a semiconductor wafer, wherein the composition includes abrasive particles, and the zeta potential of the abrasive particles is −50 mV to −10 mV at a pH of 6, and the zeta potential change rate represented by Equation 1 below is 6 mV to 30 mV: [Equation 1] Zeta potential change rate (mV/pH)=|(Z6−Z5)/(p6−p5)| where p6 denotes pH 6, p5 denotes pH 5, Z6 denotes a zeta potential at the pH 6, and Z5 denotes a zeta potential at the pH 5.
1 . A composition for a semiconductor process comprising:
abrasive particles,
wherein the abrasive particles have a zeta potential of-50 mV to-10 mV at pH 6, a zeta potential change rate represented by Equation 1 below of 6 mV/pH to 30 mV/pH, a zeta potential change rate represented by Equation 3 below of 8 mV/pH to 20 m V/pH, and a zeta potential change rate represented by Equation 4 below of 9.5 mV/pH to 20 mV/pH:
Zeta potential change rate (mV/pH)=|( Z 6− Z 5)/( p 6− p 5)| [Equation 1]
Zeta potential change rate=|( Z 6− Z 1)/( p 6− p 1)| [Equation 3]
Zeta potential change rate=|( Z 6− Z 2)/( p 6− p 2)| [Equation 4]
where p6 denotes pH 6, p5 denotes pH 5, p2 denotes pH 2, pl denotes pH 1,
Z6 denotes a zeta potential at the pH 6, and Z5 denotes a zeta potential at the pH 5, Z2 denotes a zeta potential at the pH 2, and Z1 denotes a zeta potential at the pH 1.
2 . The composition for a semiconductor process of claim 1 , wherein the abrasive particles are surface-treated to have a positive (+) zeta potential value when a pH is from pH2 to pH4.
3 . The composition for a semiconductor process of claim 2 , wherein the abrasive particles have a zeta potential of 10 mV to 50 mV.
4 . The composition for a semiconductor process of claim 1 , wherein the abrasive particles include one selected from the group consisting of silica (SiO 2 ), ceria (CeO 2 ), alumina (Al 2 O 3 ), zirconia (ZrO 2 ), and combinations thereof.
5 . The composition for a semiconductor process of claim 1 , wherein the composition for a semiconductor process further comprises at least one kind of additive selected from the group consisting of organic acid, polyol, surfactant, and combinations thereof.
6 . The composition for a semiconductor process of claim 5 , wherein the surfactant is fluorine-based surfactant.
7 . The composition for a semiconductor process of claim 5 , wherein the organic acid is selected from the group consisting of nitric acid, acetic acid, formic acid, benzoic acid, nicotinic acid, picolinic acid, alanine, phenylalanine valine, leucine, isoleucine, arginine, aspartic acid, citric acid, adipic acid, succinic acid, oxalic acid, glycine, glutamic acid, glutaric acid, phthalic acid, histidine, threonine, serine, cysteine, methionine, asparagine, tyrosine, diiodotyrosine, tryptophan, proline, oxyproline, ethylenediaminetetraacetic acid (EDTA), nitrotriacetic acid (NTA), iminodiacetic acid (IDA), and combinations thereof.
8 . The composition for a semiconductor process of claim 5 , wherein the polyol is selected from the group consisting of polyvinyl alcohol, cellulose, sorbitol, ethylene glycol monomethyl ether, ethylene glycol monoethylether, ethylene glycol diethylether, ethylene glycol monobutylether, diethylene glycol monomethylether, diethylene glycol diethylether, diethylene glycol monobutylether, propylene glycol monomethylether, propylene glycol monomethylether acetate, glycerin monomethylether, glycerin dimethylether, grissendi ethylether, glycerin triethylether, and combinations thereof.
9 . The composition for a semiconductor process of claim 1 , wherein the abrasive particles have a zeta potential change rate represented by Equation 2 below of 14 mV/pH to 40 mV/pH:
Zeta potential change rate=|( Z 6− Z 4)/( p 6− p 4)| [Equation 2]
where p6 denotes pH 6, p4 denotes pH 4,
Z6 denotes a zeta potential at the pH 6, and Z4 denotes a zeta potential at the pH 4.
10 . The composition for a semiconductor process of claim 1 , where the abrasive particles have an average particle diameter (D50) of 5 nm to 150 nm.
11 . The composition for a semiconductor process of claim 1 , wherein the abrasive particles have a 10% cumulative mass particle size distribution diameter (D10) of 5 nm to 50 nm.
12 . The composition for a semiconductor process of claim 1 , wherein the abrasive particles have a 90% cumulative mass particle size distribution diameter (D90) of 40 nm to 150 nm.
13 . The composition for a semiconductor process of claim 1 , wherein the composition for a semiconductor process has 100 to 700 particles greater than 5 μm as a result of LPC measurement, and
wherein the LPC measurement conditions are that the composition for a semiconductor process is diluted such that an initial concentration is 4,000 pieces/ml, the minimum size is 0.56 μm, a maximum size is 20 μm, and that an injection rate of the diluted composition for a semiconductor process is 15 ml/min.