Alpha gallium oxide thin-film structure having high conductivity obtained using selective area growth in HVPE growth manner and method for manufacturing the same
Disclosed are an alpha gallium oxide thin-film structure having high conductivity obtained using selective area growth in a HVPE growth manner, and a method for manufacturing the same, in which a nitride-based nitride film pattern is formed on an alpha gallium oxide thin-film so as to expose only a selected area thereof, and re-growth is performed only on the partially exposed area thereof, thereby forming a high-quality patterned alpha gallium oxide re-growth pattern.
1 . A method for manufacturing an alpha gallium oxide thin-film structure having high conductivity using selective area growth in a HVPE (halide vapor phase epitaxy) growth manner, the method comprising:
providing a substrate;
forming an alpha gallium oxide thin-film on an upper surface of the substrate in a HVPE growth manner;
forming a nitride film pattern on the substrate and the alpha gallium oxide thin-film so as to expose only a selected area of the alpha gallium oxide thin-film; and
performing re-growth in a HVPE growth manner using a portion of the alpha gallium oxide thin-film located in the exposed selected area as a seed, thereby forming an alpha gallium oxide re-growth pattern,
wherein
the alpha gallium oxide thin-film is re-heated while the exposed selected area thereof is exposed to an inert gas atmosphere; and
the re-growth in the HVPE growth manner is carried out using the re-heated alpha gallium oxide thin-film as the seed to form the alpha gallium oxide re-growth pattern.
2 . The method of claim 1 , wherein the formation of the alpha gallium oxide thin-film is carried out under a source temperature in a range of 450 to 650° C. and a growth temperature in a range of 400 to 600° C. and under an inert gas atmosphere.
3 . The method of claim 2 , wherein the formation of the alpha gallium oxide thin-film is carried out using a deposition gas containing HCl and O 2 , wherein a supply flow rate of HCl is in a range of 5 to 50 sccm, and a supply flow rate of O 2 is in a range of 100 to 1,000 sccm.
4 . The method of claim 1 , wherein the nitride film pattern is made of Si 3 N 4 .
5 . The method of claim 4 , wherein the nitride film pattern has an opening defined therein so as to expose the selected area, wherein the alpha gallium oxide re-growth pattern is formed in the opening.
6 . The method of claim 1 , wherein the alpha gallium oxide thin-film is re-heated for 3 to 6 minutes.
7 . The method of claim 1 , wherein the re-growth in the HVPE growth manner is carried out under a source temperature in a range of 450 to 650° C. and a growth temperature in a range of 400 to 600° C. and under the inert gas atmosphere.
8 . The method of claim 7 , wherein the re-growth in the HVPE growth manner is carried out for 1 to 7 minutes.
9 . The method of claim 1 , wherein during performing the re-growth in the HVPE growth manner, the alpha gallium oxide re-growth pattern is deposited on the selected area of the alpha gallium oxide thin-film and is electrically directly connected to the alpha gallium oxide thin-film.
10 . The method of claim 1 , wherein the method further comprises removing the nitride film pattern from the substrate on which the alpha gallium oxide thin-film and the alpha gallium oxide re-growth pattern have been formed in a lift-off process.
11 . An alpha gallium oxide thin-film structure having high conductivity obtained using selective area growth in a HVPE growth manner, the alpha gallium oxide thin-film structure comprising:
a substrate;
an alpha gallium oxide thin-film formed on an upper surface of the substrate; and
an alpha gallium oxide re-growth pattern deposited only on a selected area of the alpha gallium oxide thin-film,
wherein the alpha gallium oxide thin-film structure is free of a nitride film pattern used as a mask.
12 . The alpha gallium oxide thin-film structure of claim 11 , wherein the alpha gallium oxide re-growth pattern is electrically directly connected to the alpha gallium oxide thin-film.
13 . The alpha gallium oxide thin-film structure of claim 11 , wherein the alpha gallium oxide re-growth pattern has a thickness of 200 nm to 300 nm.