Display device with improved reliability
Provided is a display device. The display device comprises a first active layer disposed on a substrate and made of a first material, a second active layer disposed on the first active layer and made of a second material different from the first material, a first gate layer disposed on the second active layer, and an inorganic pattern disposed below the second active layer and overlapping a portion of the first gate layer. The second active layer includes a conductor portion disposed between a portion of the first gate layer and the inorganic pattern.
1 . A display device having a pixel, the display device comprising:
a substrate;
a first semiconductor layer on the substrate;
a first insulating layer on the first semiconductor layer;
a first conductive layer on the first insulating layer;
wherein the pixel comprises a first transistor and a capacitor on the substrate,
the first semiconductor layer comprises a first active pattern of the first transistor and a first electrode of the capacitor, and
the first conductive layer comprises a first gate of the first transistor and a second electrode of the capacitor; and
an inorganic pattern covered by the first semiconductor layer and directly contacting the first semiconductor layer.
2 . The display device of claim 1 , wherein an upper surface and a side surface of the inorganic pattern are in contact with the first active pattern.
3 . The display device of claim 1 , wherein a hydrogen content of the inorganic pattern is higher than a hydrogen content of the first insulating layer.
4 . The display device of claim 1 , wherein the first active pattern comprises a conductor portion disposed between the first gate of the first transistor and the inorganic pattern.
5 . The display device of claim 1 , wherein a conductivity of the conductor portion in the first active layer is higher than a conductivity of a portion other than the conductor portion in the first active layer.
6 . The display device of claim 1 , wherein the first gate of the first transistor and the second electrode of the capacitor are spaced apart from each other.
7 . The display device of claim 1 , wherein the first active pattern of the first transistor and the first electrode of the capacitor are physically connected to each other.
8 . The display device of claim 1 , wherein the first semiconductor layer comprises an oxide semiconductor material.
9 . A display device having a pixel, the display device comprising:
a substrate;
a first semiconductor layer on the substrate;
a first insulating layer on the first semiconductor layer;
a first conductive layer on the first insulating layer;
wherein the pixel comprises a first transistor and a capacitor on the substrate,
the first semiconductor layer comprises a first active pattern of the first transistor and a first electrode of the capacitor, and
the first conductive layer comprises a first gate of the first transistor and a second electrode of the capacitor; and
wherein a distance between the first active pattern and the first gate of the first transistor is smaller than a distance between the first electrode and the second electrode of the capacitor.
10 . The display device of claim 9 , wherein the first gate of the first transistor and the second electrode of the capacitor are spaced apart from each other.
11 . The display device of claim 9 , wherein the first active pattern of the first transistor and the first electrode of the capacitor are physically connected to each other.
12 . The display device of claim 9 , wherein the first semiconductor layer comprises an oxide semiconductor material.
13 . A display device having a pixel, the display device comprising:
a substrate;
a first semiconductor layer on the substrate;
a first insulating layer on the first semiconductor layer;
a first conductive layer on the first insulating layer;
wherein the pixel comprises a first transistor, a capacitor on the substrate, a second transistor and a light emitting element, wherein the second transistor is a driving transistor configured to control a current flowing in the light emitting element, and
wherein the first transistor is a switching transistor configured to transmit a drain voltage of the second transistor to the second gate of the second transistor;
wherein the first semiconductor layer comprises a first active pattern of the first transistor and a first electrode of the capacitor, and
the first conductive layer comprises a first gate of the first transistor and a second electrode of the capacitor;
a second semiconductor layer on the substrate wherein the second semiconductor layer comprises a second active layer of the second transistor;
a second insulating layer on the second semiconductor layer;
a second conductive layer on the second insulating layer, wherein the second conductive layer comprises a second gate of the second transistor; and
a first interlayer insulating layer between the second conductive layer and the first semiconductor layer.
14 . The display device of claim 13 , wherein the second semiconductor layer is made of a different material from the first semiconductor layer.
15 . The display device of claim 14 , wherein the second semiconductor layer comprises a polysilicon material.
16 . The display device of claim 13 , wherein the first gate of the first transistor and the second electrode of the capacitor are spaced apart from each other.
17 . The display device of claim 13 , wherein the first active pattern of the first transistor and the first electrode of the capacitor are physically connected to each other.
18 . The display device of claim 13 , wherein the first semiconductor layer comprises an oxide semiconductor material.