Field effect transistor with merged epitaxy backside cut and method
A device includes a substrate, a first semiconductor channel over the substrate, and a second semiconductor channel over the substrate and laterally separated from the first semiconductor channel. A gate structure covers and wraps around the first semiconductor channel and the second semiconductor channel. A first source/drain region abuts the first semiconductor channel on a first side of the gate structure, and a second source/drain region abuts the second semiconductor channel on the first side of the gate structure. An isolation structure is under and between the first source/drain region and the second source/drain region, and includes a first isolation region in contact with bottom surfaces of the first and second source/drain regions, and a second isolation region in contact with sidewalls of the first and second source/drain regions, and extending from a bottom surface of the first isolation region to upper surfaces of the first and second source/drain regions.
1 . A device, comprising:
a substrate;
a first semiconductor channel over the substrate; and
a second semiconductor channel over the substrate and laterally separated from the first semiconductor channel;
at least one gate structure covering and wrapping around the first semiconductor channel and the second semiconductor channel;
a first source/drain region abutting the first semiconductor channel on a first side of the gate structure;
a second source/drain region abutting the second semiconductor channel on the first side of the gate structure;
an isolation structure under and between the first source/drain region and the second source/drain region, including:
a first isolation region in contact with bottom surfaces of the first source/drain region and the second source/drain region; and
a second isolation region in contact with sidewalls of the first source/drain region and the second source/drain region, and extending from a bottom surface of the first isolation region to upper surfaces of the first source/drain region and the second source/drain region; and
a source/drain contact over the first source/drain region and the second source/drain region, wherein the source/drain contact includes a glue layer in contact with the second isolation region.
2 . The device of claim 1 , wherein the sidewall of the first source/drain region contacting the second isolation region and a sidewall of the first isolation region contacting the second isolation region are substantially coplanar.
3 . The device of claim 1 , wherein the second isolation region is in contact with a bottom surface of the at least one gate structure.
4 . The device of claim 3 , wherein the second isolation region is in contact with sidewalls of a gate spacer layer abutting the at least one gate structure.
5 . The device of claim 1 , wherein the glue layer is formed of a metal nitride.
6 . The device of claim 1 , further comprising a silicide layer in contact with the source/drain contact and the second isolation region.
7 . The device of claim 1 , wherein the silicide layer is formed of cobalt silicide or tin silicide.
8 . The device of claim 1 , further comprising:
a first replacement fin abutting the first isolation region and the first source/drain region; and
a second replacement fin abutting the first isolation region and the second source/drain region.
9 . A device, comprising:
a substrate;
a first semiconductor channel over the substrate; and
a second semiconductor channel over the substrate and laterally separated from the first semiconductor channel;
at least one gate structure covering and wrapping around the first semiconductor channel and the second semiconductor channel;
a first source/drain region abutting the first semiconductor channel on a first side of the gate structure;
a second source/drain region abutting the second semiconductor channel on the first side of the gate structure;
an isolation structure under and between the first source/drain region and the second source/drain region, including:
a first isolation region in contact with bottom surfaces of the first source/drain region and the second source/drain region; and
a second isolation region in contact with sidewalls of the first source/drain region and the second source/drain region, and extending from a bottom surface of the first isolation region to upper surfaces of the first source/drain region and the second source/drain region;
a source/drain contact over the first source/drain region and the second source/drain region, the source/drain contact including a glue layer in contact with the second isolation region;
a silicide layer in contact with the source/drain contact and the second isolation region;
a first replacement fin abutting the first isolation region and the first source/drain region; and
a second replacement fin abutting the first isolation region and the second source/drain region.
10 . The device of claim 9 , wherein the sidewall of the first source/drain region contacting the second isolation region and a sidewall of the first isolation region contacting the second isolation region are substantially coplanar.
11 . The device of claim 9 , wherein the second isolation region is in contact with a bottom surface of the at least one gate structure.
12 . The device of claim 11 , wherein the second isolation region is in contact with sidewalls of a gate spacer layer abutting the at least one gate structure.
13 . The device of claim 9 , wherein the source/drain contact includes a glue layer in contact with the second isolation region.
14 . A device, comprising:
a first stack of semiconductor channels and a second stack of semiconductor channels laterally separated from each other;
at least one gate structure wrapping around the first stack of semiconductor channels and the second stack of semiconductor channels;
a first source/drain region abutting the first stack of semiconductor channels on a first side of the gate structure;
a second source/drain region abutting the second stack of semiconductor channels on the first side of the gate structure; and
an isolation structure between the first source/drain region and the second source/drain region, including:
a first isolation region in contact with bottom surfaces of the first source/drain region and the second source/drain region; and
a second isolation region in contact with sidewalls of the first source/drain region and the second source/drain region, and extending from a bottom surface of the first isolation region to upper surfaces of the first source/drain region and the second source/drain region.
15 . The device of claim 14 , wherein the sidewall of the first source/drain region contacting the second isolation region and a sidewall of the first isolation region contacting the second isolation region are substantially coplanar.
16 . The device of claim 14 , wherein the second isolation region is in contact with a bottom surface of the at least one gate structure.
17 . The device of claim 16 , wherein the second isolation region is in contact with sidewalls of a gate spacer layer abutting the at least one gate structure.
18 . The device of claim 14 , further comprising a source/drain contact over the first source/drain region and the second source/drain region.
19 . The device of claim 18 , further comprising a silicide layer in contact with the source/drain contact and the second isolation region.
20 . The device of claim 18 , wherein the source/drain contact includes a glue layer in contact with the second isolation region.