Advanced barrier nickel oxide (BNiO) coating development for process chamber components via ozone treatment
Described herein is a chamber component including a metal layer comprising nickel and a barrier layer of nickel oxide over the metal layer. The barrier layer of nickel oxide may be formed by ozone treating the chamber component with air, nitrogen or argon O 2 , O 3 at a temperature from about 25° C. to about 350° C.
1 . A method of protecting a chamber component, consisting of:
forming a metal plating directly on a surface of a body of the chamber component by performing electroless metal plating, wherein the metal plating comprises nickel, and
subsequently forming a barrier layer directly on the metal plating using a one-step process consisting of performing an ozone treatment on the chamber component by contacting the body of the chamber component with an ozone gas, wherein the barrier layer comprises nickel oxide and mitigates formation of a black film.
2 . The method of claim 1 , wherein the performing the ozone treatment occurs at a temperature of from about 25° C. to about 350° C.
3 . The method of claim 1 , wherein the performing the ozone treatment occurs at atmospheric pressure.
4 . The method of claim 1 , wherein the performing the ozone treatment occurs for about 1 hour to about 50 hours.
5 . The method of claim 1 , wherein the barrier layer has a thickness from about 10 nm to about 50 nm.
6 . The method of claim 1 , wherein the metal plating further comprises phosphorus.
7 . The method of claim 1 , wherein the body comprises an aluminum alloy, aluminum nitride, alumina, or combinations thereof.
8 . A method of protecting a chamber component, consisting of:
forming a metal plating directly on a surface of a body of the chamber component by performing electroless metal plating, wherein the metal plating comprises nickel, and
subsequently forming a barrier layer directly on the metal plating using a one-step process consisting of performing an ozone treatment on the chamber component by contacting the body of the chamber component with an ozone gas and at least of air, nitrogen, argon, or O 2 , wherein the barrier layer comprises nickel oxide and mitigates formation of a black film.