IP Library › Granted Patent US 12,532,726
Granted Patent B2
US 12,532,726 · App. 17/548,006 · Granted Jan 20, 2026

Jumper gate for advanced integrated circuit structures

Inventors: Sukru Yemeniciouglu (Portland, OR); Leonard P. Guler (Hillsboro, OR); Gilbert Dewey (Beaverton, OR); Tahir Ghani (Portland, OR)
Assignee: Intel Corporation
H01L23/535H01L21/02532H01L21/02603H10D30/014H10D30/031H10D30/43H10D30/6713H10D30/6735H10D30/6757H10D30/797H10D62/121H10D62/822H10D64/017H10D64/021
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Quick Facts
Patent No.
US 12,532,726
App. No.
17/548,006
Granted
Jan 20, 2026
Kind
B2
Abstract

Jumper gates for advanced integrated circuit structures are described. For example, an integrated circuit structure includes a first vertical stack of horizontal nanowire segments. A second vertical stack of horizontal nanowire segments is spaced apart from the first vertical stack of horizontal nanowire segments. A conductive structure is laterally between and in direct electrical contact with the first vertical stack of horizontal nanowire segments and with the second vertical stack of horizontal nanowire segments. A first source or drain structure is coupled to the first vertical stack of horizontal nanowire segments at a side opposite the conductive structure. A second source or drain structure is coupled to the second vertical stack of horizontal nanowire segments at a side opposite the conductive structure.

Claims (48)

1 . An integrated circuit structure, comprising:

a first vertical stack of horizontal nanowire segments;

a second vertical stack of horizontal nanowire segments spaced apart from the first vertical stack of horizontal nanowire segments;

a conductive structure laterally between and in direct electrical contact with the first vertical stack of horizontal nanowire segments and with the second vertical stack of horizontal nanowire segments;

a first source or drain structure coupled to the first vertical stack of horizontal nanowire segments at a side opposite the conductive structure; and

a second source or drain structure coupled to the second vertical stack of horizontal nanowire segments at a side opposite the conductive structure.

2 . The integrated circuit structure of claim 1 , wherein the conductive structure is vertically over a sub-fin structure.

3 . The integrated circuit structure of claim 1 , wherein the conductive structure has an uppermost surface above an uppermost surface of the first and second source or drain structures.

4 . The integrated circuit structure of claim 1 , wherein the first and second source or drain structures have a semiconductor material composition different than a semiconductor material composition of the first and second vertical stacks of horizontal nanowire segments.

5 . The integrated circuit structure of claim 4 , wherein the first and second source or drain structures comprise silicon and germanium, and the first and second vertical stacks of horizontal nanowire segments comprise silicon.

6 . A method of fabricating an integrated circuit structure, the method comprising:

forming vertical stack of horizontal nanowires;

cutting the vertical stack of horizontal nanowires to form a first vertical stack of horizontal nanowire segments, and a second vertical stack of horizontal nanowire segments spaced apart from the first vertical stack of horizontal nanowire segments;

forming a conductive structure laterally between and in direct electrical contact with the first vertical stack of horizontal nanowire segments and with the second vertical stack of horizontal nanowire segments;

forming a first source or drain structure coupled to the first vertical stack of horizontal nanowire segments at a side opposite the conductive structure; and

forming a second source or drain structure coupled to the second vertical stack of horizontal nanowire segments at a side opposite the conductive structure.

7 . The method of claim 6 , wherein the conductive structure is vertically over a sub-fin structure.

8 . The method of claim 6 , wherein the conductive structure has an uppermost surface above an uppermost surface of the first and second source or drain structures.

9 . The method of claim 6 , wherein the first and second source or drain structures have a semiconductor material composition different than a semiconductor material composition of the first and second vertical stacks of horizontal nanowire segments.

10 . The method of claim 9 , wherein the first and second source or drain structures comprise silicon and germanium, and the first and second vertical stacks of horizontal nanowire segments comprise silicon.

11 . A computing device, comprising:

a board; and

a component coupled to the board, the component including an integrated circuit structure, the integrated circuit structure comprising:

a first vertical stack of horizontal nanowire segments;

a second vertical stack of horizontal nanowire segments spaced apart from the first vertical stack of horizontal nanowire segments;

a conductive structure laterally between and in direct electrical contact with the first vertical stack of horizontal nanowire segments and with the second vertical stack of horizontal nanowire segments;

a first source or drain structure coupled to the first vertical stack of horizontal nanowire segments at a side opposite the conductive structure; and

a second source or drain structure coupled to the second vertical stack of horizontal nanowire segments at a side opposite the conductive structure.

12 . The computing device of claim 11 , further comprising:

a memory coupled to the board.

13 . The computing device of claim 11 , further comprising:

a communication chip coupled to the board.

14 . The computing device of claim 11 , wherein the component is a packaged integrated circuit die.

15 . The computing device of claim 11 , wherein the component is selected from the group consisting of a processor, a communications chip, and a digital signal processor.

16 . A computing device, comprising:

a board; and

a component coupled to the board, the component including an integrated circuit structure, the integrated circuit structure fabricated according to a method comprising:

forming vertical stack of horizontal nanowires;

cutting the vertical stack of horizontal nanowires to form a first vertical stack of horizontal nanowire segments, and a second vertical stack of horizontal nanowire segments spaced apart from the first vertical stack of horizontal nanowire segments;

forming a conductive structure laterally between and in direct electrical contact with the first vertical stack of horizontal nanowire segments and with the second vertical stack of horizontal nanowire segments;

forming a first source or drain structure coupled to the first vertical stack of horizontal nanowire segments at a side opposite the conductive structure; and

forming a second source or drain structure coupled to the second vertical stack of horizontal nanowire segments at a side opposite the conductive structure.

17 . The computing device of claim 16 , further comprising:

a memory coupled to the board.

18 . The computing device of claim 16 , further comprising:

a communication chip coupled to the board.

19 . The computing device of claim 16 , wherein the component is a packaged integrated circuit die.

20 . The computing device of claim 16 , wherein the component is selected from the group consisting of a processor, a communications chip, and a digital signal processor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 7, 2022
From: YEMENICIOGLU, SUKRU; GULER, LEONARD P.; DEWEY, GILBERT; GHANI, TAHIR
To: INTEL CORPORATION
Reel/Frame 061013/0927 →
Continuity (1)
Related Publication 20230187356A1 · Jun 15, 2023
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