Sensor device and method for forming the same
View Patent ↗Various embodiments of the present disclosure are directed towards a sensor device comprising a photodetector with a simplified manufacturing process. A semiconductor substrate comprises an avalanche region at which a p-type region and an n-type region form a PN junction. An inner absorption layer is recessed into the semiconductor substrate, wherein the inner absorption layer has a bottom protrusion protruding towards the avalanche region. A peripheral absorption layer is on a sidewall of the inner absorption layer and a bottom of the inner absorption layer and further extends from the sidewall to the bottom protrusion. The inner absorption layer and the peripheral absorption layer share a common semiconductor material and have a smaller bandgap than the semiconductor substrate. Further, the peripheral absorption layer has a doping concentration that is elevated relative to a doping concentration of the inner absorption layer.
1 . A method for forming a photodetector, the method comprising:
forming a first well buried in a semiconductor substrate and having a first doping type;
performing a first etch into the semiconductor substrate to form a trench overlying and spaced from the first well;
doping the semiconductor substrate through the trench to form a second well on the first well, wherein the second well has a second doping type opposite the first doping type;
epitaxially growing a peripheral absorption layer on exposed surfaces of the semiconductor substrate in the trench and having the second doping type; and
epitaxially growing an inner absorption layer filling a remainder of the trench over the peripheral absorption layer;
wherein the peripheral absorption layer and the inner absorption layer are semiconductive and have smaller bandgaps than the semiconductor substrate.
2 . The method according to claim 1 , wherein the epitaxial growing of the peripheral absorption layer is performed while the second well is masked.
3 . The method according to claim 1 , further comprising:
depositing a sacrificial layer lining the trench, wherein the doping is performed through the sacrificial layer; and
performing a second etch into the sacrificial layer to clear the sacrificial layer from a sidewall of the semiconductor substrate in the trench, wherein a remainder of the sacrificial layer covers the second well upon completion of the second etch;
wherein the epitaxial growing of the peripheral absorption layer is performed with the remainder of the sacrificial layer in place.
4 . The method according to claim 1 , wherein the epitaxial growing of the peripheral absorption layer is performed while the second well is exposed in the trench, and wherein the method further comprises:
performing a second etch into the peripheral absorption layer to form an opening exposing the second well before the epitaxial growing of the inner absorption layer.
5 . The method according to claim 1 , further comprising:
epitaxially growing a cap layer atop the peripheral absorption layer and the inner absorption layer, wherein the cap layer is semiconductive and has a same bandgap as the semiconductor substrate.
6 . The method according to claim 1 , wherein the epitaxial growing of the peripheral absorption layer persists long enough for the peripheral absorption layer to grow outside the trench, and wherein the method further comprises:
performing a planarization into the peripheral absorption layer and the inner absorption layer.
7 . The method according to claim 1 , wherein the inner absorption layer has a bottom protrusion protruding through the peripheral absorption layer to the second well, which extends to the first well.
8 . A method for forming a photodetector, the method comprising:
performing a first etch into a semiconductor substrate to form a trench;
forming a mask partially filling the trench at a width-wise center of the trench;
epitaxially growing a peripheral absorption layer lining surfaces of the semiconductor substrate in the trench with the mask in place;
removing the mask; and
epitaxially growing an inner absorption layer filling a remainder of the trench over the peripheral absorption layer after the mask is removed;
wherein the peripheral absorption layer and the inner absorption layer share a semiconductor material different than a semiconductor material of the semiconductor substrate.
9 . The method according to claim 8 , wherein the semiconductor material of the peripheral absorption layer and the inner absorption layer comprises germanium, and wherein the peripheral absorption layer and the inner absorption layer have different doping concentrations.
10 . The method according to claim 8 , further comprising:
doping the semiconductor substrate through the trench to form a well extending into the semiconductor substrate from the trench and having a width less than a width of the trench, wherein the mask is formed atop the well.
11 . The method according to claim 8 , further comprising:
depositing a sacrificial layer overlying the semiconductor substrate and lining the trench, wherein the mask is formed overlying the sacrificial layer; and
performing a second etch into the sacrificial layer with the mask in place to expose the surfaces of the semiconductor substrate before epitaxially growing the peripheral absorption layer.
12 . The method according to claim 11 , further comprising:
performing a third etch to remove a remaining portion of the sacrificial layer in the trench between epitaxially growing the peripheral absorption layer and epitaxially growing the inner absorption layer.
13 . The method according to claim 8 , further comprising:
forming a first additional well buried in the semiconductor substrate, wherein the first additional well has a width less than a width of the semiconductor substrate and a doping type opposite to a doping type of the peripheral absorption layer, and wherein the trench is formed overlying and spaced from the first additional well.
14 . The method according to claim 13 , further comprising:
forming a second additional well extending from a top of the semiconductor substrate to the first additional well and further extending in a closed path around a portion of the semiconductor substrate, wherein the second additional well has a same doping type as the first additional well, and wherein the trench is formed in the portion of the semiconductor substrate spaced from and surrounded by the second additional well.
15 . A method for forming a photodetector, the method comprising:
performing a first etch into a semiconductor substrate to form a trench;
doping the semiconductor substrate through the trench to form a well extending into the semiconductor substrate and having a width less than a width of the trench;
epitaxially growing a peripheral absorption layer lining surfaces of the semiconductor substrate in the trench;
performing a second etch into the peripheral absorption layer to form an opening exposing the well in the trench;
epitaxially growing an inner absorption layer filling a remainder of the trench over the peripheral absorption layer and extending to the well through the opening;
wherein the peripheral absorption layer and the inner absorption layer are semiconductive and have individual bandgaps less than a bandgap of the semiconductor substrate.
16 . The method according to claim 15 , wherein the peripheral absorption layer has a U-shaped profile.
17 . The method according to claim 15 , wherein the peripheral absorption layer only partially fills the trench, lines sidewalls of the semiconductor substrate in the trench, and lines a surface of the semiconductor substrate at a bottom of the trench.
18 . The method according to claim 15 , wherein a top surface of the peripheral absorption layer extends outside of the trench with a downward slant towards a width-wise center of the trench.
19 . The method according to claim 15 , wherein the well and the peripheral absorption layer share a common doping type.
20 . The method according to claim 15 , wherein a doping concentration of the peripheral absorption layer decreases from the semiconductor substrate to the inner absorption layer.