Granted Patent B2

US 12,538,855 · App. 18/078,416 · Granted Jan 27, 2026

Inventors: Niranjan Pingle (Milpitas, CA); Jitendra Ratilal Bhimjiyani (Santa Clara, CA); Shreshtha Kumar Jaiswal (Kalispell, MT)

Assignee: Applied Materials Inc.

H01L24/80H01L24/08H01L2224/08245H01L2224/80895H01L2224/80896H01L2224/80908H01L2224/80986H01L2924/37001H01L2924/3701

Abstract

Claims (70)

1 . A method for sequencing a hybrid bonding process, comprising:

selecting at least one source of dies for bonding;

selecting a target on which dies will be bonded;

linking the at least one source of dies to the target;

linking the target to the at least one source of dies;

forming an integrated bonding product sequence that includes at least one first linked bonding sequence for the at least one source of dies and a second linked bonding sequence for the target;

determining bonding process chamber allocations and process timing for the at least one source of dies and the target based on the integrated bonding product sequence; and

bonding at least one die from the at least one source of dies to the target using the integrated bonding product sequence.

2 . The method of claim 1 , wherein determining bonding process chamber allocations and process timing includes accounting for activation queue time of the at least one source of dies and activation queue time of the target.

3 . The method of claim 1 , wherein determining bonding process chamber allocations and process timing includes accounting for maximum utilization of at least one hybrid bonding process chamber.

4 . The method of claim 3 , wherein determining bonding process chamber allocations and process timing includes accounting for just-in-time consumption for maximum utilization of the at least one hybrid bonding process chamber.

5 . The method of claim 1 , wherein determining bonding process chamber allocations and process timing includes accounting for process chamber recipes and motion control durations.

6 . The method of claim 1 , wherein determining bonding process chamber allocations and process timing includes accounting for robot transfer speeds.

7 . The method of claim 1 , wherein determining bonding process chamber allocations and process timing includes accounting for die level constitution of materials of the at least one source of dies.

8 . The method of claim 1 , wherein determining bonding process chamber allocations and process timing includes accounting for die maps for locating dies on the target.

9 . The method of claim 1 , further comprising:

comparing the integrated bonding product sequence with a user supplied bonding sequence;

determining differences between the integrated bonding product sequence and the user supplied bonding sequence; and

notifying the user of the differences and compatibility with a hybrid bonding tool.

10 . The method of claim 9 , further comprising:

notifying a user of throughput level or bonder utilization level compared to the integrated bonding product sequence.

11 . The method of claim 1 , further comprising:

accepting at least one recipe input for at least one process chamber;

accepting at least one die map input for the target;

accepting at least one process sequence input for bonding; and

determining bonding process chamber allocations and process timing based on the at least one recipe input, the at least one die map input, or the at least one process sequence input.

12 . A method for sequencing a hybrid bonding process, comprising:

selecting at least one source of dies for bonding;

selecting a target on which dies will be bonded;

linking the at least one source of dies to the target;

linking the target to the at least one source of dies;

forming an integrated bonding product sequence that includes at least one first linked bonding sequence for the at least one source of dies and a second linked bonding sequence for the target;

determining bonding process chamber allocations and process timing for the at least one source of dies and the target based on the integrated bonding product sequence;

comparing the integrated bonding product sequence with a user supplied bonding sequence;

determining differences between the integrated bonding product sequence and the user supplied bonding sequence; and

notifying the user of the differences and compatibility with a hybrid bonding tool.

13 . The method of claim 12 , further comprising:

notifying a user of throughput level or bonder utilization level compared to the integrated bonding product sequence.

14 . The method of claim 12 , further comprising:

accepting at least one recipe input for at least one process chamber;

accepting at least one die map input for the target;

accepting at least one process sequence input for bonding; and

determining bonding process chamber allocations and process timing based on the at least one recipe input, the at least one die map input, or the at least one process sequence input.

15 . The method of claim 12 , wherein determining bonding process chamber allocations and process timing includes accounting for activation queue time of the at least one source of dies and activation queue time of the target.

16 . The method of claim 12 , wherein determining bonding process chamber allocations and process timing includes accounting for maximum utilization of at least one hybrid bonding process chamber.

17 . The method of claim 12 , wherein determining bonding process chamber allocations and process timing includes at least one of a, b, c, or d:

(a) accounting for process chamber recipes and motion control durations;

(b) accounting for robot transfer speeds;

(c) accounting for die level constitution of materials of the at least one source; or

(d) accounting for die maps for locating dies on the target.

18 . A non-transitory, computer readable medium having instructions stored thereon that, when executed, cause a method for sequencing a hybrid bonding process to be performed, the method comprising:

selecting at least one source of dies for bonding;

selecting a target on which dies will be bonded;

linking the at least one source of dies to the target;

linking the target to the at least one source of dies;

forming an integrated bonding product sequence that includes at least one first linked bonding sequence for the at least one source of dies and a second linked bonding sequence for the target;

determining bonding process chamber allocations and process timing for the at least one source of dies and the target based on the integrated bonding product sequence; and

bonding at least one die from the at least one source of dies to the target using the integrated bonding product sequence.

19 . The non-transitory, computer readable medium of claim 18 , wherein determining bonding process chamber allocations and process timing includes at least one of a, b, c, d, e, f, and g:

(a) accounting for activation queue time of the at least one source of dies and activation queue time of the target;

(b) accounting for maximum utilization of at least one hybrid bonding process chamber;

(c) accounting for just-in-time consumption for maximum utilization of the at least one hybrid bonding process chamber;

(d) accounting for process chamber recipes and motion control durations;

(e) accounting for robot transfer speeds;

(f) accounting for die level constitution of materials of the at least one source of dies; or

(g) accounting for die maps for locating dies on the target.

20 . The non-transitory, computer readable medium of claim 18 , the method further comprising:

comparing the integrated bonding product sequence with a user supplied bonding sequence;

determining differences between the integrated bonding product sequence and the user supplied bonding sequence; and

notifying the user of the differences and compatibility with a hybrid bonding tool.

Assignments (1)

Continuity (1)

References Cited (9)