Imprint apparatus, imprint method, and article manufacturing method
An imprint apparatus in which contamination in an apparatus due to an uncured material or the like can be minimized is provided. The imprint apparatus includes: a first irradiation unit configured to irradiate an imprint material on a substrate with light for performing curing in a state in which the imprint material is brought into contact with a pattern portion having a concave and convex pattern formed in a mold; and a second irradiation unit configured to irradiate a peripheral region of the pattern portion of the mold after the irradiation of the light using the first irradiation unit.
1 . An imprint method, comprising:
a first irradiation step of irradiating, using a first irradiation unit, an imprint material on a substrate with light for performing curing in a state in which the imprint material is brought into contact with a pattern portion having a concave and convex pattern and being formed in a first surface of a mold that faces the imprint material in the state in which the imprint material is brought into contact with the pattern portion; and
a second irradiation step of irradiating a peripheral region of the pattern portion of the mold with light after the irradiation of the light using the first irradiation unit, the peripheral region of the pattern portion of the mold being formed in a second surface of the mold different from the first surface of the mold that faces the imprint material in the state in which the imprint material is brought into contact with the pattern portion.
2 . The imprint method according to claim 1 , wherein, in the second irradiation step, a second irradiation unit included in a holder configured to hold the mold irradiates the peripheral region of the pattern portion of the mold formed in the second surface with the light.
3 . The imprint method according to claim 1 , wherein, in the second irradiation step, a second irradiation unit included in a substrate moving portion configured to hold and move the substrate irradiates the peripheral region of the pattern portion of the mold formed in the second surface with the light.
4 . The imprint method according to claim 3 , wherein, in the second irradiation step, irradiation of the peripheral region of the pattern portion of the mold formed in the second surface is performed while the substrate moving portion is moving.
5 . The imprint method according to claim 1 , wherein irradiation of the light in the first irradiation step and irradiation of the light in the second irradiation step are performed in conjunction with each other.
6 . The imprint method according to claim 1 , wherein, in the first irradiation step, a limitation is provided so that the peripheral region of the pattern portion of the mold formed in the second surface is not irradiated with the light.
7 . The imprint method according to claim 1 , wherein, in the second irradiation step, the peripheral region of the pattern portion of the mold formed in the second surface is irradiated with reflected light.
8 . The imprint method according to claim 1 , wherein, in the second irradiation step, a region that was irradiated with the light in the first irradiation step is not irradiated.
9 . An article manufacturing method performed, at least in part, using an imprint apparatus which includes: a first irradiation unit configured to irradiate an imprint material on a substrate with light for performing curing in a state in which the imprint material is brought into contact with a pattern portion having a concave and convex pattern and being formed in a first surface of a mold that faces the imprint material in the state in which the imprint material is brought into contact with the pattern portion; and a second irradiation unit configured to irradiate a peripheral region of the pattern portion of the mold with light after the irradiation of the light using the first irradiation unit is utilized, the peripheral region of the pattern portion of the mold being formed in a second surface of the mold different from the first surface of the mold that faces the imprint material in the state in which the imprint material is brought into contact with the pattern portion, the method comprising:
a pattern forming step of forming a pattern on the substrate;
a processing step of processing the substrate after forming the pattern in the pattern forming step; and
a step of manufacturing an article from the substrate processed in the processing step.