Semiconductor device including a lead connector having a plurality of protruding portions
A device includes a first conductive-member which connects to a first electrode on a first face of a chip. A second conductive-member is spaced from the chip and the first conductive-member. A third conductive-member is spaced from the first and second conductive-members. A first connector connects between the second electrode and the second conductive-member. A second connector is opposed to a third electrode on the second face and connects the third electrode and the third conductive-member. A first connecting-member connects the first connector and the second face. A second connecting-member connects the first connector and the second conductive-member. The first connector includes first protruded portions protruded in a first direction from the first conductive-member to the second conductive-member. The second connecting-member is provided to correspond to each of places between the first protruded portions and the second conductive-member.
1 . A semiconductor device comprising:
a semiconductor chip comprising a first face, and a second face on an opposite side of the semiconductor chip to the first face;
a first conductive member opposed to a first electrode on the first face of the semiconductor chip and electrically connected thereto;
a second conductive member spaced from the semiconductor chip and the first conductive member;
a third conductive member spaced from the semiconductor chip and the first and second conductive members;
a first connector opposed to a second electrode on the second face of the semiconductor chip and electrically connecting the second electrode and the second conductive member to each other;
a second connector opposed to a third electrode on the second face of the semiconductor chip and electrically connecting the third electrode and the third conductive member to each other;
a first connecting member connecting the first connector and the second face of the semiconductor chip to each other; and
a second connecting member connecting the first connector and the second conductive member to each other, wherein
the first connector comprises a plurality of first protruded portions protruded in a first direction from the first conductive member toward the second conductive member, the first protruded portions being arranged in a third direction perpendicular to the first direction, the third direction being in a plane parallel to the first face,
portions of the second connecting member are provided respectively corresponding to the first protruded portions, and are respectively placed between the first protruded portions and the second conductive member, and
the portions of the second connecting member, which are respectively corresponding to the first protruded portions, are separated from each other.
2 . The device of claim 1 , further comprising:
a third connecting member connecting the second connector and the second face of the semiconductor chip to each other; and
a fourth connecting member connecting the second connector and the third conductive member to each other, wherein
the second connector comprises a plurality of second protruded portions protruded in a second direction from the first conductive member toward the third conductive member, and
the fourth connecting member is provided to correspond to each of places between the second protruded portions and the third conductive member.
3 . The device of claim 2 , wherein portions of the fourth connecting member, which are respectively corresponding to the second protruded portions, are separated from each other.
4 . The device of claim 2 , wherein
the third conductive member comprises a plurality of fourth protruded portions protruded in an opposite direction to the second direction and respectively corresponding to the second protruded portions, and
the fourth connecting member is provided between the second protruded portions and the fourth protruded portions.
5 . The device of claim 4 , wherein a third width of a face of each of the second protruded portions opposed to an associated one of the fourth protruded portions is smaller than a fourth width of a face of the fourth protruded portion opposed to the second protruded portion in a cross section perpendicular to the second direction.
6 . The device of claim 2 , wherein
the third conductive member comprises second trenches between a plurality of second regions, the plurality of second regions corresponding to the second protruded portions, respectively, and
the fourth connecting member is provided between the second protruded portions and the second regions and is not provided in the second trenches.
7 . The device of claim 2 , wherein the fourth connecting member coats lower portions of side faces of the second protruded portions, starting from bottom edges of the second protruded portions.
8 . The device of claim 1 , wherein
the second conductive member comprises a plurality of third protruded portions protruded in an opposite direction to the first direction and respectively corresponding to the first protruded portions, and
the second connecting member is provided between the first protruded portions and the third protruded portions.
9 . The device of claim 8 , wherein a first width of a face of each of the first protruded portions opposed to an associated one of the third protruded portions is smaller than a second width of a face of the third protruded portion opposed to the first protruded portion in a cross section perpendicular to the first direction.
10 . The device of claim 8 , wherein
each of the first protruded portions comprises a first width in the third direction,
each of the third protruded portions comprises a second width in the third direction, and
the first width is smaller than the second width.
11 . The device of claim 10 , wherein
the second connector comprises a plurality of second protruded portions protruded in a second direction from the first conductive member toward the third conductive member,
each of the second protruded portions comprises a third width in a fourth direction perpendicular to the second direction,
each of the third protruded portions comprises a fourth width in the fourth direction, and
the third width is smaller than the fourth width.
12 . The device of claim 10 , wherein the first connector and the second connector are arranged in the third direction.
13 . The device of claim 1 , wherein
the second conductive member comprises first trenches between a plurality of first regions, the plurality of first regions corresponding to the first protruded portions, respectively, and
the second connecting member is provided between the first protruded portions and the first regions and is not provided in the first trenches.
14 . The device of claim 1 , wherein the second connecting member coats lower portions of side faces of the first protruded portions, starting from bottom edges of the first protruded portions.
15 . The device of claim 1 , wherein the first electrode is a source, the second electrode is a drain, and the third electrode is a gate.
16 . The device of claim 1 , wherein the first connector and the second connector are arranged in the third direction.