Process for removing tin oxide deposits
Specific organometallic compounds of Formula I: Q x -Sn-(A 1 R 1 ′ z ) 4-x or Formula II: Sn(NR 2 (CH 2 ) n A 2 ) 2 useful for the deposition of high purity tin oxide, as well as methods of using such compounds are disclosed. Also disclosed are compositions of organometallic compounds useful for the deposition of high purity tin oxide that in combination improve stability. Also disclosed are processes for dry etching tin oxide with a particular etchant gas and/or a process for dry etching a substrate using a particular etchant gas with a specific additive.
1 . A process for removing deposits from interior surfaces of a reactor chamber or from a substrate within said reactor chamber, comprising:
introducing an etchant gas and additive into said reactor chamber, said etchant gas being of the general formula A 3 O m X n , wherein:
A 3 is selected from the group consisting of N and S,
O is oxygen,
each X is independently selected from a group consisting of halogens,
the subscripts m and n are integers from 1 and 2, and
said additive is CO or CO 2 ;
activating said etchant gas either before or after said introduction;
allowing an etching reaction to proceed between said activated etchant gas and said deposits; and
evacuating the etchant gas together with gaseous products of the etching reaction.
2 . The process according to claim 1 , wherein X represents a combination of two different halogens.
3 . The process according to claim 1 , further comprising bubbling a carrier gas through a liquid chemical constituent to volatilize said liquid chemical constituent into said etchant, prior to said introduction of said etchant gas into said chamber.
4 . The process according to claim 1 , wherein said etchant gas is activated by exposing it to an activation mechanism in a gas activation chamber prior to introduction into said reactor chamber; said gas activation mechanism being selected from the group consisting of heat, ultraviolet light and plasma discharge.
5 . The process according to claim 1 , wherein said etchant gas is activated by exposing it to a thermal activation mechanism after introduction into said gas activation chamber; said thermal activation mechanism being selected from the group consisting of: the overall temperature within said chamber and a local heat source within said chamber.
6 . The process according to claim 1 , wherein said etchant gas is thionyl chloride (SOCl 2 ).
7 . The process according to claim 1 , wherein a halogen containing additive is added to a gaseous mixture with said etchant gas.
8 . The process according to claim 7 , wherein the halogen containing additive is a halogen or a compound of the general formula RY, wherein R is selected from the group consisting of H and Me; and Y is a halogen selected from the group consisting of F, Cl, Br, and I.
9 . The process according to claim 8 , wherein the halogen includes Cl or Br.
10 . The process according to claim 1 , wherein a dilution additive is added to a gaseous mixture with said etchant gas.
11 . The process according to claim 10 , wherein the dilution additive includes N 2 , Ar, He, or Ne.
12 . The process according to claim 11 , further comprising heating said reactor chamber to a temperature of at least 100° C.
13 . The process according to claim 1 , further comprising providing said reactor chamber with a pressure of between 0.1 mBar and 1500 mBar.
14 . The process according to claim 1 , wherein the additive is CO 2 .