Liquid chemical and method for producing liquid chemical
An object of the present invention is to provide a liquid chemical exhibiting excellent defect inhibitive performance even in a case of being applied to a resist process by EUV exposure. Another object thereof is to provide a method for producing a liquid chemical. The liquid chemical of the present invention includes an organic solvent; Fe nanoparticles containing a Fe atom and having a particle size of 0.5 to 17 nm; and Pb nanoparticles containing a Pb atom and having a particle size of 0.5 to 17 nm, in which a ratio of the number of the Fe nanoparticles contained to the number of the Pb nanoparticles contained is 1.0 to 1.0×10 4 , based on the number of the particles per unit volume of the liquid chemical.
1 . A liquid chemical comprising:
an organic solvent;
Fe nanoparticles containing a Fe atom and having a particle size of 0.5 to 17 nm; and
Pb nanoparticles containing a Pb atom and having a particle size of 0.5 to 17 nm,
wherein a ratio of the number of the Fe nanoparticles contained to the number of the Pb nanoparticles contained is 1.0 to 1.0×10 4 , based on the number of the particles per unit volume of the liquid chemical and
the organic solvent is at least one selected from the group consisting of propylene glycol monoethyl ether (PGME), propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate (PGMEA), methyl methoxypropionate, diisoamyl ether, isoamyl acetate, cycloheptanone and 2-heptanone.
2 . The liquid chemical according to claim 1 , further comprising:
Cr nanoparticles containing a Cr atom and having a particle size of 0.5 to 17 nm,
wherein a ratio of the number of the Fe nanoparticles contained to the number of the Cr nanoparticles contained is 1.0 to 1.0×10 4 , based on the number of the particles per unit volume of the liquid chemical.
3 . The liquid chemical according to claim 2 , further comprising:
Ti nanoparticles containing a Ti atom and having a particle size of 0.5 to 17 nm,
wherein a ratio of the number of the Fe nanoparticles contained to the number of the Ti nanoparticles contained is 1.0 to 1.0×10 3 , based on the number of the particles per unit volume of the liquid chemical.
4 . The liquid chemical according to claim 2 , which is for manufacturing a semiconductor device.
5 . The liquid chemical according to claim 2 ,
wherein the Fe nanoparticles consist of at least one selected from the group consisting of particles A consisting of a simple substance of Fe, particles B consisting of an oxide of a Fe atom, and particles C consisting of a simple substance of Fe and an oxide of a Fe atom.
6 . The liquid chemical according to claim 5 ,
wherein a ratio of the number of the particles A contained to a total of the number of the particles B contained and the number of the particles C contained is 1.0×10 −3 or more and less than 1.0, based on the number of the particles per unit volume of the liquid chemical.
7 . The liquid chemical according to claim 6 ,
wherein the ratio of the number of the particles contained is 1.0×10 −3 or more and 1.0×10 −1 or less.
8 . The liquid chemical according to claim 2 , further comprising:
an organic compound having a boiling point of 300° C. or higher.
9 . The liquid chemical according to claim 1 , further comprising:
Ti nanoparticles containing a Ti atom and having a particle size of 0.5 to 17 nm,
wherein a ratio of the number of the Fe nanoparticles contained to the number of the Ti nanoparticles contained is 1.0 to 1.0×10 3 , based on the number of the particles per unit volume of the liquid chemical.
10 . The liquid chemical according to claim 1 , which is for manufacturing a semiconductor device.
11 . The liquid chemical according to claim 1 ,
wherein the Fe nanoparticles consist of at least one selected from the group consisting of particles A consisting of a simple substance of Fe, particles B consisting of an oxide of a Fe atom, and particles C consisting of a simple substance of Fe and an oxide of a Fe atom.
12 . The liquid chemical according to claim 11 ,
wherein a ratio of the number of the particles A contained to a total of the number of the particles B contained and the number of the particles C contained is 1.0×10 3 or more and less than 1.0, based on the number of the particles per unit volume of the liquid chemical.
13 . The liquid chemical according to claim 12 ,
wherein the ratio of the number of the particles contained is 1.0×10 3 or more and 1.0×10 −1 or less.
14 . The liquid chemical according to claim 1 , further comprising:
an organic compound having a boiling point of 300° C. or higher.
15 . The liquid chemical according to claim 14 ,
wherein at least some of the Fe nanoparticles are particles U containing the organic compound.
16 . The liquid chemical according to claim 14 ,
wherein at least some of the Fe nanoparticles are the particles U containing the organic compound and particles V not containing the organic compound, and
a ratio of the number of the particles U contained to the number of the particles V contained is 1.0×10 1 or more, based on the number of the particles per unit volume of the liquid chemical.
17 . The liquid chemical according to claim 1 ,
wherein the organic solvent is at least one selected from the group consisting of propylene glycol monoethyl ether (PGME), propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate (PGMEA), methyl methoxypropionate, diisoamyl ether, and isoamyl acetate.
18 . The liquid chemical according to claim 1 ,
wherein the organic solvent is at least one selected from the group consisting of propylene glycol monoethyl ether (PGME) and propylene glycol monomethyl ether acetate (PGMEA).
19 . The liquid chemical according to claim 1 ,
wherein the organic solvent is at least one selected from the group consisting of isoamyl acetate, cycloheptanone and 2-heptanone.
20 . The liquid chemical according to claim 1 ,
wherein the organic solvent is at least one selected from the group consisting of propylene glycol monopropyl ether, methyl methoxypropionate, and diisoamyl ether.