Bulk acoustic wave resonator with integrated capacitor
An integrated bulk acoustic wave resonator-capacitor comprises a membrane including a piezoelectric film, an upper electrode disposed on a top surface of the piezoelectric film, and a lower electrode disposed on a lower surface of the piezoelectric film, a resonator region of the membrane defining a main active domain in which a main acoustic wave is generated during operation, and a capacitor region of the membrane surrounding the resonator region, the capacitor region including a layer of conductive material disposed on the upper electrode, an inner capacitor raised frame defined on an inner peripheral region of the layer of conductive material, and an outer capacitor raised frame defined on an outer peripheral region of the layer of conductive material.
1 . An integrated bulk acoustic wave resonator-capacitor comprising:
a membrane including a piezoelectric film, an upper electrode disposed on a top surface of the piezoelectric film, and a lower electrode disposed on a lower surface of the piezoelectric film;
a resonator region of the membrane defining a main active domain in which a main acoustic wave is generated during operation;
a capacitor region of the membrane surrounding the resonator region, the capacitor region including a layer of conductive material disposed on the upper electrode, an inner capacitor raised frame defined on an inner peripheral region of the layer of conductive material, and an outer capacitor raised frame defined on an outer peripheral region of the layer of conductive material;
a support substrate upon which a periphery of the membrane is disposed and that defines a cavity beneath the resonator region; and
a support in a form of one or more posts extending upward from a surface of the support substrate defining a lower wall of the cavity to a lower surface of the membrane, the support contacting the lower surface of the membrane at a border between the capacitor region and the resonator region.
2 . The integrated bulk acoustic wave resonator-capacitor of claim 1 further comprising a resonator raised frame disposed on the upper electrode about a perimeter of the resonator region.
3 . The integrated bulk acoustic wave resonator-capacitor of claim 2 wherein the resonator raised frame abuts the inner capacitor raised frame.
4 . The integrated bulk acoustic wave resonator-capacitor of claim 2 wherein the resonator raised frame is formed of a different material than the inner capacitor raised frame.
5 . The integrated bulk acoustic wave resonator-capacitor of claim 4 wherein one of the resonator raised frame or the inner capacitor raised frame is formed of a dielectric material and an other of the resonator raised frame or the inner capacitor raised frame is formed of a metal.
6 . The integrated bulk acoustic wave resonator-capacitor of claim 2 wherein the resonator raised frame is formed of a same material as the inner capacitor raised frame.
7 . The integrated bulk acoustic wave resonator-capacitor of claim 6 wherein the layer of conductive material is formed of the same material.
8 . The integrated bulk acoustic wave resonator-capacitor of claim 7 wherein the upper electrode is formed of the same material.
9 . The integrated bulk acoustic wave resonator-capacitor of claim 8 wherein the outer capacitor raised frame is formed of the same material.
10 . The integrated bulk acoustic wave resonator-capacitor of claim 6 wherein the same material is a dielectric material.
11 . The integrated bulk acoustic wave resonator-capacitor of claim 10 wherein the outer capacitor raised frame is formed of the same material.
12 . The integrated bulk acoustic wave resonator-capacitor of claim 1 wherein the support substrate further defines a cavity beneath the capacitor region.
13 . The integrated bulk acoustic wave resonator-capacitor of claim 1 wherein no cavity is defined in the support substrate below the capacitor region.
14 . The integrated bulk acoustic wave resonator-capacitor of claim 1 wherein the layer of conductive material is formed of a same material as the upper electrode.
15 . The integrated bulk acoustic wave resonator-capacitor of claim 1 having a mesa structure.
16 . The integrated bulk acoustic wave resonator-capacitor of claim 1 included in a radio frequency filter.
17 . The integrated bulk acoustic wave resonator-capacitor of claim 16 included in an electronic device module.
18 . The integrated bulk acoustic wave resonator-capacitor of claim 17 included in an electronic device.