Manufacturing method of semiconductor device
View Patent ↗To manufacture a semiconductor device by a method including the steps of: forming an oxide over a substrate, a first conductor over the oxide, and a second conductor over the first conductor; forming a first insulator to cover the oxide, the first conductor, and the second conductor; forming an opening in the first insulator to divide the second conductor into a third conductor and a fourth conductor; forming a second insulator and a third insulator to cover the oxide and the first insulator; processing the second insulator and the third insulator into a fourth insulator and a fifth insulator; processing the first conductor using the fourth insulator and the fifth insulator as a mask to divide the first conductor into a fifth conductor and a sixth conductor; and removing the fifth insulator.
1 . A method of manufacturing a semiconductor device, comprising the steps of:
forming an oxide over a substrate, a first conductor over the oxide, and a second conductor over the first conductor;
forming a first insulator to cover the oxide, the first conductor, and the second conductor;
forming an opening in the first insulator and the second conductor to divide the second conductor into a third conductor and a fourth conductor;
forming a second insulator to cover the opening and the first insulator;
forming a third insulator over the second insulator;
processing the second insulator and the third insulator by a dry etching method into a fourth insulator in contact with a side surface of the first insulator, a side surface of the third conductor, and a side surface of the fourth conductor and a fifth insulator in contact with a side surface and a top surface of the fourth insulator;
processing the first conductor by the dry etching method using the fourth insulator and the fifth insulator as a mask to divide the first conductor into a fifth conductor and a sixth conductor;
removing the fifth insulator by isotropic etching;
performing heat treatment on the oxide in an atmosphere containing oxygen;
forming a sixth insulator to cover the oxide, the first insulator, and the fourth insulator;
forming a seventh conductor over the sixth insulator; and
processing the sixth insulator and the seventh conductor by CMP treatment to form a seventh insulator and an eighth conductor in the opening,
wherein a nitride insulator is formed as the second insulator, and
wherein an oxide insulator is formed as the third insulator.
2 . The method of manufacturing a semiconductor device, according to claim 1 ,
wherein silicon nitride is formed by a PEALD method as the second insulator.
3 . The method of manufacturing a semiconductor device, according to claim 1 ,
wherein silicon oxide is formed by a PEALD method as the third insulator.
4 . The method of manufacturing a semiconductor device, according to claim 1 ,
wherein a tantalum nitride is formed by a sputtering method as the first conductor.
5 . The method of manufacturing a semiconductor device, according to claim 1 ,
wherein tungsten is formed by a sputtering method as the second conductor.
6 . The method of manufacturing a semiconductor device, according to claim 1 ,
wherein an oxide containing indium, gallium, and zinc is formed by a sputtering method as the oxide.
7 . A method of manufacturing a semiconductor device, comprising the steps of:
forming an oxide over a substrate, a first conductor over the oxide, and a second conductor over the first conductor;
forming a first insulator to cover the oxide, the first conductor, and the second conductor;
forming an opening in the first insulator and the second conductor to expose the first conductor and divide the second conductor into a third conductor and a fourth conductor;
forming a second insulator to cover the opening and the first insulator;
forming a third insulator over the second insulator;
removing part of the second insulator and part of the third insulator to form a fourth insulator in contact with a sidewall of the opening and a fifth insulator in contact with a side surface and a top surface of the fourth insulator;
removing part of the first conductor overlapped with the opening to divide the first conductor into a fifth conductor and a sixth conductor;
removing the fifth insulator; and
forming a sixth insulator and a seventh conductor in the opening.
8 . The method of manufacturing a semiconductor device, according to claim 7 ,
wherein silicon nitride is formed by a PEALD method as the second insulator.
9 . The method of manufacturing a semiconductor device, according to claim 7 ,
wherein silicon oxide is formed by a PEALD method as the third insulator.
10 . The method of manufacturing a semiconductor device, according to claim 7 ,
wherein a tantalum nitride is formed by a sputtering method as the first conductor.
11 . The method of manufacturing a semiconductor device, according to claim 7 ,
wherein tungsten is formed by a sputtering method as the second conductor.
12 . The method of manufacturing a semiconductor device, according to claim 7 ,
wherein an oxide containing indium, gallium, and zinc is formed by a sputtering method as the oxide.