Torque sensor and robot
A torque sensor is provided that achieves miniaturization and that has a high degree of freedom in design of resolution. The torque sensor includes: a first plate-like member including a spacer that is plate-like; and a second plate-like member fastened to the first plate-like member. In an outer circumferential region of the second plate-like member outside the spacer, a film-shaped strain gauge disposed in a recess that is provided on an outer edge of the spacer, and a film-shaped wire connected to the film-shaped strain gauge are provided.
1 . A torque sensor comprising:
a first plate-like member;
a second plate-like member that is opposed to the first plate-like member; and
a spacer that is integrated with the first plate-like member and that is fastened to the second plate-like member, the spacer being plate-like, wherein
a recess is provided on an outer edge of the spacer, and
at least one film-shaped strain gauge disposed in the recess and a film-shaped wire connected to the at least one film-shaped strain gauge are provided in an outer circumferential region of a main surface of the second plate-like member, the main surface being opposed to the first plate-like member, the outer circumferential region protruding from the spacer.
2 . The torque sensor as set forth in claim 1 , wherein
the recess is filled with a sealing material for sealing the at least one film-shaped strain gauge.
3 . The torque sensor as set forth in claim 1 , wherein
the torque sensor includes a communication part that causes the recess to communicate with an outside on a lateral side of the torque sensor,
the communication part includes a contact part that is open on a side surface of the torque sensor, and
the film-shaped wire is disposed in the communication part.
4 . The torque sensor as set forth in claim 1 , wherein
the at least one film-shaped strain gauge and a fastening tool for fastening the spacer to the second plate-like member are each disposed on a circumference having a specific center.
5 . The torque sensor as set forth in claim 4 , wherein
the at least one film-shaped strain gauge comprises a plurality of film-shaped strain gauges, and the plurality of film-shaped strain gauges are disposed at regular intervals on the circumference.
6 . A robot comprising:
a robot arm;
a torque sensor recited in claim 1 , the torque sensor being fixed to the robot arm; and
a robot hand fixed to the torque sensor.