IP Library › Granted Patent US 12,591,172
Granted Patent B2
US 12,591,172 · App. 18/173,955 · Granted Mar 31, 2026

EUV transmissive membrane

Inventors: Toshikatsu Kashiwaya (Inazawa-City, JP); Atsuo Kondo (Komaki-City, JP); Hiroki Chaen (Yokohama-City, JP); Takashi Tanimura (Handa-City, JP)
Assignee: NGK INSULATORS, LTD.
G03F1/22G02B1/14
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Quick Facts
Patent No.
US 12,591,172
App. No.
18/173,955
Granted
Mar 31, 2026
Kind
B2
Abstract

Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer.

Claims (9)

1 . An EUV transmissive membrane comprising:

a main layer composed of metallic beryllium having a thickness of 10 to 70 nm; and

a protective layer composed of beryllium nitride that covers at least one side of the main layer having a thickness of 5 nm or less.

2 . The EUV transmissive membrane according to claim 1 , wherein both sides of the main layer are covered with the protective layer.

3 . The EUV transmissive membrane according to claim 1 , wherein the protective layer has a thickness of 1 nm to 5 nm.

4 . The EUV transmissive membrane according to claim 1 , wherein the protective layer has a thickness of 3 nm or less.

5 . The EUV transmissive membrane according to claim 1 , wherein the protective layer has a nitrogen concentration gradient region where nitrogen concentration decreases towards the main layer.

6 . The EUV transmissive membrane according to claim 5 , wherein the thickness of the nitrogen concentration gradient region is smaller than that of the protective layer.

7 . The EUV transmissive membrane according to claim 1 , wherein the main layer has a thickness of 15 to 50 nm.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 24, 2023
From: KASHIWAYA, TOSHIKATSU; KONDO, ATSUO; CHAEN, HIROKI; TANIMURA, TAKASHI
To: NGK INSULATORS, LTD.
Reel/Frame 062794/0101 →
Continuity (2)
Continuation PCTJP2021038811 · Oct 20, 2021
Related Publication 20230213848A1 · Jul 6, 2023
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