Acoustic wave device
An acoustic wave device includes a piezoelectric layer made of lithium niobate or lithium tantalate, and at least one pair of electrodes opposed to each other in a direction intersecting a thickness direction of the piezoelectric layer. When d is a thickness of the piezoelectric layer and p is a distance between centers of electrodes adjacent to each other in the at least one pair of electrodes, d/p is about 0.5 or less. The at least one pair of electrodes extend in a longitudinal direction and includes a first electrode and a second electrode with sectional shapes different from each other in any cross section in a direction orthogonal or substantially orthogonal to the longitudinal direction of the at least one pair of electrodes.
1 . An acoustic wave device comprising:
a piezoelectric layer made of lithium niobate or lithium tantalate; and
at least one pair of electrodes opposed to each other in a direction intersecting a thickness direction of the piezoelectric layer; wherein
bulk waves in a thickness shear primary mode are used;
the at least one pair of electrodes extends a longitudinal direction;
the at least one pair of electrodes includes a first electrode and a second electrode having sectional shapes different from each other in any cross section in a direction orthogonal or substantially orthogonal to the longitudinal direction of the at least one pair of electrodes; and
an inclination angle of at least a portion of an electrode side surface of the first electrode relative to the piezoelectric layer is different from an inclination angle of at least a portion of an electrode side surface of the second electrode in any cross section in the direction orthogonal or substantially orthogonal to the longitudinal direction of the at least one pair of electrodes.
2 . An acoustic wave device comprising:
a piezoelectric layer made of lithium niobate or lithium tantalate; and
at least one pair of electrodes opposed to each other in a direction intersecting a thickness direction of the piezoelectric layer; wherein
d/p is about 0.5 or less, where d is a thickness of the piezoelectric layer and p is a distance between centers of electrodes adjacent to each other in the at least one pair of electrodes;
the at least one pair of electrodes extends in a longitudinal direction;
the at least one pair of electrodes includes a first electrode and a second electrode having sectional shapes different from each other in any cross section in a direction orthogonal or substantially orthogonal to the longitudinal direction of the at least one pair of electrodes; and
an inclination angle of at least a portion of an electrode side surface of the first electrode relative to the piezoelectric layer is different from an inclination angle of at least a portion of an electrode side surface of the second electrode in any cross section in the direction orthogonal or substantially orthogonal to the longitudinal direction of the at least one pair of electrodes.
3 . The acoustic wave device according to claim 2 , wherein the d/p is about 0.24 or less.
4 . The acoustic wave device according to claim 1 , wherein a thickness of the first electrode is different from a thickness of the second electrode in any cross section in the direction orthogonal or substantially orthogonal to the longitudinal direction of the at least one pair of electrodes.
5 . The acoustic wave device according to claim 1 , wherein a width of the first electrode is different from a width of the second electrode.
6 . The acoustic wave device according to claim 1 , wherein a metallization ratio MR satisfies MR≤1.75 (d/p)+0.075, the metallization ratio MR being a ratio of an area of the at least one pair of electrodes in an excitation region relative to the excitation region, the excitation region being a region where the at least one pair of electrodes overlaps each other as viewed in a direction where the at least one pair of electrodes are opposed to each other.
7 . The acoustic wave device according to claim 1 , further comprising:
a first busbar and a second busbar connected to the at least one pair of electrodes; wherein
the at least one pair of electrodes includes an electrode connected to the first busbar and an electrode connected to the second busbar.
8 . The acoustic wave device according to claim 1 , wherein
Euler angles (Φ, θ, ψ) of the lithium niobate or lithium tantalate is in a range of Expression (1), Expression (2), or Expression (3) below:
(0°±10°, 0° to 20°, any ψ) Expression (1);
(0°±10°, 20° to 80°, 0° to 60°(1−(θ−50) 2 /900) 1/2 ) or (0°±10°, 20° to 80°, [180°−60°(1−(θ−50) 2 /900) 1/2 ] to 180°) Expression (2); or
(0°±10°, [180°−30°(1−(ψ−90) 2 /8100) 1/2 ] to 180°, any ψ) Expression (3).
9 . The acoustic wave device according to claim 1 , wherein Euler angles (φ, θ, ψ) of the lithium niobate or lithium tantalate is within a hatched region in FIG. 10 .
10 . The acoustic wave device according to claim 1 , further comprising a support on an opposite side from a side of the piezoelectric layer on which the at least one pair of electrodes are provided.
11 . The acoustic wave device according to claim 10 , further comprising an air gap on an opposite side from a side of the piezoelectric layer on which the at least one pair of electrodes are provided, in a region overlapping in plan view with at least a portion of a region including the at least one pair of electrodes.
12 . The acoustic wave device according to claim 1 , further comprising:
an acoustic multilayer film laminated on an opposite side from a side of the piezoelectric layer on which the at least one pair of electrodes are provided; wherein
the acoustic multilayer film has a layered structure including a low-acoustic impedance layer having relatively low acoustic impedance, and a high-acoustic impedance layer having relatively high acoustic impedance.
13 . The acoustic wave device according to claim 1 , wherein the at least one pair of electrodes are opposed to each other on a same plane of the piezoelectric layer.
14 . The acoustic wave device according to claim 2 , wherein a thickness of the first electrode is different from a thickness of the second electrode in any cross section in the direction orthogonal or substantially orthogonal to the longitudinal direction of the at least one pair of electrodes.
15 . The acoustic wave device according to claim 2 , wherein a width of the first electrode is different from a width of the second electrode.
16 . The acoustic wave device according to claim 2 , wherein a metallization ratio MR satisfies MR≤1.75 (d/p)+0.075, the metallization ratio MR being a ratio of an area of the at least one pair of electrodes in an excitation region relative to the excitation region, the excitation region being a region where the at least one pair of electrodes overlaps each other as viewed in a direction where the at least one pair of electrodes are opposed to each other.
17 . The acoustic wave device according to claim 2 , further comprising:
a first busbar and a second busbar connected to the at least one pair of electrodes; wherein
the at least one pair of electrodes includes an electrode connected to the first busbar and an electrode connected to the second busbar.
18 . The acoustic wave device according to claim 2 , wherein
Euler angles (φ, θ, ψ) of the lithium niobate or lithium tantalate is in a range of Expression (1), Expression (2), or Expression (3) below:
(0°±10°, 0° to 20°, any ψ) Expression (1);
(0°±10°, 20° to 80°, 0° to 60°(1−(θ−50) 2 /900) 1/2 ) or (0°±10°, 20° to 80°, [180°−60°(1−(θ−50) 2 /900) 1/2 ] to 180°) Expression (2); or
(0°±10°, [180°−30°(1−(ψ−90) 2 /8100) 1/2 ] to 180°, any ψ) Expression (3).