Epitaxy everywhere based self-aligned direct backside contact
Self-aligned direct backside contacts by an epitaxy everywhere under source/drain region approach are provided. In one aspect, a semiconductor device includes: a field-effect transistor(s) on a backside interlayer dielectric; an epitaxial contact placeholder in the backside interlayer dielectric that directly contacts a first source/drain region of the field-effect transistor(s); and a self-aligned direct backside contact in the backside interlayer dielectric that directly contacts a second source/drain region of the field-effect transistor(s). The epitaxial contact placeholder extends a distance d 1 into the backside interlayer dielectric from the first source/drain region, and the self-aligned direct backside contact extends a distance d 2 into the backside interlayer dielectric from the second source/drain region, where d 2 >d 1 . The field-effect transistor(s) can include a stack of active layers surrounded by a gate, and the first/second source/drain regions on opposite sides thereof. A method of fabricating the present semiconductor device is also provided.
1 . A semiconductor device, comprising:
at least one field-effect transistor on a backside interlayer dielectric;
an epitaxial contact placeholder embedded in, and surrounded by, the backside interlayer dielectric, wherein the epitaxial contact placeholder directly contacts a first source/drain region of the at least one field-effect transistor; and
a self-aligned direct backside contact embedded in, and surrounded by, the backside interlayer dielectric, wherein the self-aligned direct backside contact directly contacts a second source/drain region of the at least one field-effect transistor,
wherein the epitaxial contact placeholder extends a distance d 1 into the backside interlayer dielectric from the first source/drain region, wherein the self-aligned direct backside contact extends a distance d 2 into the backside interlayer dielectric from the second source/drain region, and wherein d 2 >d 1 .
2 . The semiconductor device of claim 1 , further comprising:
a middle of line source/drain contact in direct contact with an end of the first source/drain region opposite the epitaxial contact placeholder.
3 . The semiconductor device of claim 1 , wherein the epitaxial contact placeholder comprises a material selected from the group consisting of: epitaxial silicon germanium (SiGe), an epitaxial III-V material, and combinations thereof.
4 . The semiconductor device of claim 1 , wherein the epitaxial contact placeholder comprises epitaxial SiGe.
5 . The semiconductor device of claim 4 , wherein the epitaxial SiGe comprises from about 15% germanium (Ge) to about 60% Ge.
6 . The semiconductor device of claim 1 , further comprising:
a backside power rail disposed on the backside interlayer dielectric, wherein the backside power rail directly contacts the self-aligned direct backside contact.
7 . The semiconductor device of claim 6 , wherein the backside interlayer dielectric separates the epitaxial contact placeholder from the backside power rail.
8 . A semiconductor device, comprising:
at least one field-effect transistor on a backside interlayer dielectric, wherein the at least one field-effect transistor comprises a stack of active layers, a gate surrounding the active layers in a gate-all-around configuration, and source/drain regions on opposite sides of the stack of active layers;
an epitaxial contact placeholder embedded in, and surrounded by, the backside interlayer dielectric, wherein the epitaxial contact placeholder directly contacts a first one of the source/drain regions; and
a self-aligned direct backside contact embedded in, and surrounded by, the backside interlayer dielectric, wherein the self-aligned direct backside contact directly contacts a second one of the source/drain regions,
wherein the epitaxial contact placeholder extends a distance d 1 into the backside interlayer dielectric from the first one of the source/drain regions, wherein the self-aligned direct backside contact extends a distance d 2 into the backside interlayer dielectric from the second one of the source/drain regions, and wherein d 2 >d 1 .
9 . The semiconductor device of claim 8 , further comprising:
a middle of line source/drain contact in direct contact with an end of the first one of the source/drain regions opposite the epitaxial contact placeholder.
10 . The semiconductor device of claim 8 , wherein the epitaxial contact placeholder comprises epitaxial SiGe.
11 . The semiconductor device of claim 10 , wherein the epitaxial SiGe comprises from about 15% Ge to about 60% Ge.
12 . The semiconductor device of claim 8 , further comprising:
a backside power rail disposed on the backside interlayer dielectric, wherein the backside power rail directly contacts the self-aligned direct backside contact.
13 . The semiconductor device of claim 12 , wherein the backside interlayer dielectric separates the epitaxial contact placeholder from the backside power rail.