Vertical probe card
Proposed is a vertical probe card capable of effectively testing the electrical characteristics of a test object without a body thereof being elastically bent or curved in a convex shape in the horizontal direction by pressure applied to opposite ends thereof.
1 . A vertical probe card that is used in a test process of testing a chip manufactured on a wafer during a semiconductor manufacturing process and is capable of coping with a narrower pitch, the vertical probe card comprising:
a space transformer having a connection pad;
a guide plate provided under the space transformer so as to be spaced apart from the space transformer; and
a probe pin inserted and installed into a hole of the guide plate,
wherein the probe pin comprises:
a first plunger located at an upper portion thereof and configured to be connected to the connection pad of the space transformer;
a second plunger located at a lower portion thereof and configured to be connected to the chip; and
an elastic portion configured to elastically displace the first plunger and the second plunger in a length direction of the probe pin,
wherein the elastic portion has a uniform cross-sectional shape in a thickness direction of the probe pin, and
the elastic portion has a uniform thickness in a width direction and the length direction of the probe pin,
wherein the elastic portion is formed by repeatedly bending a plate, and an actual width of the plate and a thickness of the plate have a ratio in a range of 1:5 to 1:30.
2 . The vertical probe card of claim 1 , wherein a support portion configured to guide the elastic portion to be compressed and extended in the length direction of the probe pin and configured to prevent the elastic portion from being buckled when compressed is provided outside the elastic portion along the length direction of the probe pin.
3 . The vertical probe card of claim 2 , wherein the second plunger moves vertically upward inside the support portion and performs a wiping operation at a second contact point.
4 . The vertical probe card of claim 2 , wherein during an overdrive process in which the probe pin tests the chip, the support portion maintains a vertical state, and the second plunger performs a wiping operation on the chip as the second plunger is tilted while maintaining a contact pressure with the chip.
5 . The vertical probe card of claim 2 , wherein as the first plunger is vertically moved downward inside the support portion, an additional contact point is formed between the first plunger and the support portion.
6 . The vertical probe card of claim 2 , wherein the elastic portion comprises:
a first elastic portion connected to the first plunger;
a second elastic portion connected to the second plunger; and
an intermediate fixing portion provided between the first elastic portion and the second elastic portion and provided integrally with the support portion.
7 . The vertical probe card of claim 6 , wherein before the probe pin tests the chip, the first plunger is in a state in contact with the connection pad so that the first elastic portion is compressively deformed in the length direction of the probe pin, and the second plunger is in a state not in contact with the chip, and
when the probe pin tests the chip, the second plunger is brought into contact with the chip so that the second elastic portion is compressively deformed.
8 . The vertical probe card of claim 1 , wherein the vertical probe card tests a non-memory semiconductor chip.
9 . The vertical probe card of claim 1 , wherein a pitch between adjacent probe pins is in a range of 50 μm to 160 μm.
10 . The vertical probe card of claim 1 , wherein a lateral width of the probe pin is in a range of 40 μm to 200 μm, and
a thickness of the probe pin is in a range of 40 μm to 200 μm.
11 . A vertical probe card that is used in a test process of testing a chip manufactured on a wafer during a semiconductor manufacturing process and is capable of coping with a narrower pitch, the vertical probe card comprising:
a space transformer having a connection pad;
a guide plate provided under the space transformer so as to be spaced apart from the space transformer; and
a probe pin inserted and installed into a hole of the guide plate,
wherein the probe pin comprises:
a first plunger located at an upper portion thereof and configured to be connected to the connection pad of the space transformer;
a second plunger located at a lower portion thereof and configured to be connected to the chip; and
an elastic portion configured to elastically displace the first plunger and the second plunger in a length direction of the probe pin,
wherein the elastic portion has a uniform cross-sectional shape in a thickness direction of the probe pin, and
the elastic portion has a uniform thickness in a width direction and the length direction of the probe pin,
wherein a plurality of fine trenches are formed in a side surface of the probe pin in a corrugated shape in which peaks and valleys with a depth in a range of 20 nm to 1 μm are repeated along the side surface of the probe pin in a direction orthogonal to the thickness direction of the probe pin.