Carrier for end effector, transportation apparatus including the same and the substrate processing apparatus
The transporting apparatus of the present invention comprises an end effector including a hand and a plurality of vacuum holes installed in the hand; and a carrier located on the hand and for supporting a consumable part, wherein the carrier comprises one side for supporting a consumable part, the other surface facing the hand of the end effector, and a plurality of support blocks installed on the other surface and corresponding to the plurality of vacuum holes, wherein an inner space communicating with the vacuum hole is installed in the plurality of support blocks, and the inner space is evacuated by negative pressure provided from the plurality of vacuum holes.
1 . A transporting apparatus comprising:
an end effector that comprises a hand, the hand comprising a plurality of vacuum holes; and
a carrier located on the hand and for supporting a consumable part that is being transported by the transporting apparatus using the carrier, wherein the carrier comprises:
a first surface for supporting a consumable part,
a second surface opposite to the first surface, wherein the second surface faces the hand of the end effector and faces away from the consumable part, and
a plurality of support blocks installed on the second surface and at positions that correspond to the plurality of vacuum holes, wherein the plurality of support blocks are separated from the consumable part by the carrier,
wherein each of the plurality of support blocks comprises an inner space that communicates with at least one of the plurality of vacuum holes, and the inner space of each of the plurality of support blocks is evacuated by negative pressure provided from the at least one of the plurality of vacuum holes.
2 . The transporting apparatus of claim 1 , wherein a contact pad is further installed on a surface of each of the plurality of support blocks.
3 . The transporting apparatus of claim 2 , wherein the contact pad is made of an elastic material or a soft material so that the inner space is sealed by evacuating the inner space, and the contact pad forms a ring shape having a diameter that is a same diameter as or a larger diameter than an inner diameter of the inner space.
4 . The transporting apparatus of claim 1 ,
wherein the consumable part forms a ring shape,
wherein the carrier has a circular shape having a same diameter as the consumable part, has a polygon shape, in which a corner is formed along a perimeter of the consumable part, or has a shape including an arc identical to an arc of the consumable part so as not to protrude from a perimeter of the consumable part.
5 . The transporting apparatus of claim 1 , wherein the consumable part is a ring-shaped member of a chuck.
6 . The transporting apparatus of claim 5 , wherein the transporting apparatus further comprises:
a plurality of protrusion units that:
are provided on the first surface of the carrier,
are spaced apart from one another, and
protrude upward in contact with an inner circumferential surface of the consumable part to prevent horizontal movement of the consumable part.
7 . The transporting apparatus of claim 6 , wherein each of the plurality of protrusion units comprises a same height or a lower height than a height of the consumable part.
8 . The transporting apparatus of claim 6 , wherein each of the plurality of protrusion units is formed with an inclined surface or an inclined corner upward in a direction from a first side of each of the plurality of protrusion units that faces the inner circumferential surface of the consumable part to a second side of each of plurality of protrusion units that faces away from the inner circumferential surface to guide the consumable part.
9 . The transporting apparatus of claim 6 , wherein each of the plurality of protrusion units has a curved upper portion.
10 . The transporting apparatus of claim 1 , wherein one of the inner space of the plurality of support blocks has a diameter greater than a diameter of one of the plurality of vacuum holes.
11 . An apparatus for processing a substrate comprising:
a chuck for supporting a substrate; and
a transporting apparatus, wherein the transport apparatus comprises:
an end effector that comprises a hand, the hand comprising a plurality of vacuum holes; and
a carrier located on the hand and for supporting a consumable part, wherein the carrier comprises:
a first surface for supporting a consumable part that is being transported by the transporting apparatus using the carrier,
a second surface opposite to the first surface, wherein the second surface faces the hand of the end effector and faces away from the consumable part, and
a plurality of support blocks installed on the second surface and at positions that correspond to the plurality of vacuum holes, wherein the plurality of support blocks are separated from the consumable part by the carrier,
wherein each of the plurality of support blocks comprises an inner space that communicates with at least one of the plurality of vacuum holes, and the inner space of each of the plurality of support blocks is evacuated by negative pressure provided from the at least one of the plurality of vacuum holes,
wherein the consumable part comprises a ring shape and is a ring-shaped member of a chuck,
wherein the carrier has a circular shape having a same diameter as the consumable part, has a polygon shape, in which a corner is formed along a perimeter of the consumable part, or has a shape including an arc identical to an arc of the consumable part so as not to protrude from a perimeter of the consumable part,
wherein a plurality of protrusion units are provided on the first surface of the carrier and spaced apart from one another, each of the plurality of protrusion units protrudes upward in contact with an inner circumferential surface of the consumable part to prevent horizontal movement of the consumable part, and the plurality of protrusion units comprise a same height or a lower height than a height of the consumable part,
wherein the transporting apparatus transports the ring-shaped member to the chuck.
12 . A carrier for an end effector comprising:
a base unit comprising a first surface that supports a consumable part that is being transported by a transporting apparatus using the carrier and a second surface opposite to the first surface, wherein the second surface faces a hand of the end effector and faces away from the consumable part, and wherein the hand comprises a plurality of vacuum holes; and
a plurality of support blocks installed on the second surface and at positions that correspond to the plurality of vacuum holes, wherein the plurality of support blocks are separated from the consumable part by the carrier,
wherein each of the plurality of support blocks comprises an inner space that communicates with at least one of the plurality of vacuum holes, and the inner space of each of the plurality of support blocks is evacuated by negative pressure provided from the at least one of the plurality of vacuum holes.
13 . The carrier of claim 12 ,
wherein a contact pad is further installed on a surface of each of the plurality of support blocks, and
wherein the contact pad is made of an elastic material or a soft material so that the inner space is sealed by evacuating the inner space, and the contact pad forms a ring shape having a diameter that is a same diameter as or a larger diameter than an inner diameter of the inner space.
14 . The carrier of claim 12 ,
wherein the consumable part forms a ring shape,
wherein the base unit has a circular shape having a same diameter as the consumable part, has a polygon shape, in which a corner is formed along a perimeter of the consumable part, or has a shape including an arc identical to an arc of the consumable part so as not to protrude from a perimeter of the consumable part.
15 . The carrier of claim 12 , wherein the carrier further comprises:
a plurality of protrusion units that:
are provided on the first surface of the carrier,
are spaced apart from one another, and
protrude upward in contact with an inner circumferential surface of the consumable part to prevent horizontal movement of the consumable part.
16 . The carrier of claim 15 , wherein each of the plurality of protrusion units comprises a same height or a lower height than a height of the consumable part.
17 . The carrier of claim 15 , wherein each of the plurality of protrusion units is formed with an inclined surface or an inclined corner upward in a direction from a first side of each of the plurality of protrusion units that faces the inner circumferential surface of the consumable part to a second side of each of plurality of protrusion units that faces away from the inner circumferential surface to guide the consumable part.
18 . The carrier of claim 15 , wherein each of the plurality of protrusion units has a curved upper portion.
19 . The carrier of claim 12 , wherein one of the inner space of the plurality of support blocks has a diameter greater than a diameter of one of the plurality of vacuum holes.
20 . The carrier of claim 12 , wherein the consumable part is a ring-shaped member of a chuck.