Giga interposer integration through chip-on-wafer-on-substrate
A semiconductor structure includes a first interposer; a second interposer laterally adjacent to the first interposer, where the second interposer is spaced apart from the first interposer; and a first die attached to a first side of the first interposer and attached to a first side of the second interposer, where the first side of the first interposer and the first side of the second interposer face the first die.
1 . A semiconductor structure comprising:
a redistribution structure;
a first interposer on the redistribution structure;
a second interposer on the redistribution structure and laterally adjacent to the first interposer, wherein a conductive line of the redistribution structure extends continuously from the first interposer to the second interposer;
a first molding material on the redistribution structure around the first interposer and around the second interposer;
a first die attached to a first side of the first interposer and attached to a first side of the second interposer;
an underfill material between the first interposer and the first die and between the second interposer and the first die, wherein the first molding material surrounds the underfill material, wherein the first molding material and the underfill material have a coplanar surface; and
a second molding material around the first die, wherein the second molding material contacts the coplanar surface.
2 . The semiconductor structure of claim 1 , wherein the first molding material contacts and extends along a sidewall of the underfill material.
3 . The semiconductor structure of claim 2 , further comprising a second die attached to the first side of the second interposer, wherein the second die is disposed within lateral extents of the second interposer and is surrounded by the second molding material.
4 . The semiconductor structure of claim 1 , wherein a width of the underfill material, measured between opposing sidewalls of the underfill material, increases as the underfill material extends away from the redistribution structure.
5 . The semiconductor structure of claim 1 , wherein the first molding material and the second molding material have a same width such that sidewalls of the first molding material are aligned with respective sidewalls of the second molding material.
6 . The semiconductor structure of claim 5 , wherein the first molding material and the redistribution structure have a same width such that the sidewalls of the first molding material are aligned with respective sidewalls of the redistribution structure.
7 . The semiconductor structure of claim 1 , further comprising:
conductive bumps at a first side of the redistribution structure facing away from the first interposer; and
a substrate attached to the conductive bumps.
8 . The semiconductor structure of claim 7 , further comprising another underfill material between the redistribution structure and the substrate.
9 . The semiconductor structure of claim 8 , wherein the another underfill material extends from the substrate, along a first sidewall of the first molding material, to a second sidewall of the second molding material.
10 . A semiconductor structure comprising:
a first interposer and a second interposer laterally adjacent to the first interposer, wherein the first interposer and the second interposer are physically separated;
a first molding material around the first interposer and the second interposer;
a first die bonded to the first interposer and bonded to the second interposer;
an underfill material between the first die and the first interposer, wherein the first molding material surrounds the underfill material, wherein the first molding material and the underfill material have a coplanar upper surface facing the first die; and
a second molding material over the first molding material and over the underfill material, wherein the second molding material surrounds the first die, wherein a thickness of the underfill material, measured between opposing sidewalls of the underfill material, increases as the underfill material extends from the first interposer toward the first die.
11 . The semiconductor structure of claim 10 , wherein the second molding material contacts and extends along the coplanar upper surface.
12 . The semiconductor structure of claim 10 , wherein the first molding material contacts and extends along the opposing sidewalls of the underfill material.
13 . The semiconductor structure of claim 10 , further comprising a redistribution structure at a first side of the first interposer and at a first side of the second interposer, wherein the first side of the first interposer faces away from the first die, wherein the redistribution structure extends continuously from the first interposer to the second interposer.
14 . The semiconductor structure of claim 13 , wherein the first molding material and the redistribution structure have a same width such that sidewalls of the first molding material are aligned with respective sidewalls of the redistribution structure.
15 . The semiconductor structure of claim 13 , further comprising:
conductive bumps at a first side of the redistribution structure facing away from the first interposer; and
a substrate attached to the conductive bumps.
16 . A semiconductor structure comprising:
a substrate;
a redistribution structure, wherein a first side of the redistribution structure is attached to the substrate;
a first interposer and a second interposer attached to an opposing second side of the redistribution structure, wherein the first interposer is spaced apart from the second interposer;
a first die bonded to the first interposer and the second interposer;
a first underfill material between the first interposer and the first die and between the second interposer and the first die, wherein a first width of the first underfill material, measured between opposing sidewalls of the first underfill material, increases as the first underfill material extends away from the substrate;
a first molding material on the redistribution structure, wherein the first molding material surrounds the first interposer, the second interposer, and the first underfill material; and
a second molding material on the first molding material and around the first die, wherein the first molding material and the first underfill material have a coplanar surface facing the second molding material.
17 . The semiconductor structure of claim 16 , further comprising a second underfill material between the redistribution structure and the substrate, wherein the second underfill material extends along the opposing sidewalls of the first molding material and along sidewalls of the second molding material, wherein a second width of the second underfill material, measured between opposing sidewalls of the second underfill material, decreases as the second underfill material extends away from the substrate.
18 . The semiconductor structure of claim 16 , wherein the first underfill material comprises a polymer.
19 . The semiconductor structure of claim 18 , wherein the second molding material extends along the coplanar surface.
20 . The semiconductor structure of claim 16 , wherein the first underfill material fills a first portion of a gap between the first interposer and the second interposer, and the first molding material fills a second portion of the gap between the first interposer and the second interposer.