IP Library › Granted Patent US 12,633,336
Granted Patent B2
US 12,633,336 · App. 17/711,906 · Granted May 19, 2026

SRAM cells for low temperature integrated circuit operation

Inventors: Abhishek Anil Sharma (Portland, OR); Wilfred Gomes (Portland, OR); Rajabali Koduri (Saratoga, CA); Pushkar Ranade (San Jose, CA); Sagar Suthram (Portland, OR)
Assignee: Intel Corporation
G11C11/412H10B10/125H10B10/18
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Quick Facts
Patent No.
US 12,633,336
App. No.
17/711,906
Granted
May 19, 2026
Kind
B2
Abstract

Integrated circuits including static random-access memory (SRAM) bit-cells that are actively cooled to a low temperature (e.g., in the cryogenic range) where transistor drive currents become significantly increased and transistor leakage currents significantly reduced. With the drive current improvement, bit-cell capacitance may be reduced by defining narrower transistor fin structures and/or four transistor (4T) bit-cells may be implemented, for example with two parallel transistor fins and colinear gate electrodes.

Claims (21)

1 . A computer system, comprising:

an integrated circuit (IC) die, comprising:

arithmetic logic unit (ALU) circuitry comprising a plurality of first transistors, each of the first transistors comprising a stack of first channel regions of first fins having a first width of at least 3 nm; and

a static random-access memory (SRAM), wherein:

a bit-cell of the SRAM consists of four NMOS transistors;

the NMOS transistors are second transistors, each of the second transistors comprising a stack of second channel regions of second fins having a second width no more than 2 nm;

the bit-cell has no more than two second fins;

individual ones of the second fins comprise the stack of second channel regions for one access transistor and for one pull-down transistor; and

the second fins have a fin spacing: fin width ratio that is 2-3 times the fin spacing: fin width ratio of the first fins; and

an integrated cooling structure comprising a plurality of microchannels within the IC die, the microchannels to convey a heat transfer liquid that maintains at least the SRAM at a temperature below −50° C. during steady state operation of the SRAM.

2 . The system of claim 1 , wherein:

the second fins have first longitudinal lengths in a first direction;

the four NMOS transistors comprise gate electrodes having second longitudinal lengths in a second direction, orthogonal to the first direction;

a centerline passing through a thickness of the gate electrode of a first access transistor is substantially colinear with a centerline passing through a thickness of the gate electrode of a first pull-down transistor; and

a centerline passing through a thickness of the gate electrode of a second access transistor is substantially colinear with a centerline passing through a thickness of the gate electrode of a second pull-down transistor.

3 . The system of claim 2 , wherein:

the four NMOS transistors comprise source/drain contact metallization having third longitudinal lengths in the second direction;

a first source/drain contact metallization of the first pull-down transistor and a first source/drain contact metallization of the second pull-down transistor comprise a single contiguous stripe of metallization spanning the second fins and a space therebetween;

a centerline passing through a thickness of a second source/drain contact metallization of the first pull-down transistor is substantially colinear with a centerline passing through a thickness of a second source/drain contact metallization of the first access transistor; and

a centerline passing through a thickness of a second source/drain contact metallization of the second pull-down transistor is substantially colinear with a centerline passing through a thickness of a second source/drain contact metallization of the second access transistor.

4 . The system of claim 1 , further comprising a power supply coupled with the IC die to power the IC die during operation.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 19, 2022
From: SHARMA, ABHISHEK ANIL; GOMES, WILFRED; KODURI, RAJABALI; RANADE, PUSHKAR; SUTHRAM, SAGAR
To: INTEL CORPORATION
Reel/Frame 059959/0109 →
Continuity (1)
Related Publication 20230317146A1 · Oct 5, 2023
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