IP Library › Granted Patent US 12,640,712
Granted Patent B2
US 12,640,712 · App. 18/770,826 · Granted May 26, 2026

Semiconductor device and method of monitoring a temperature thereof

Inventors: Szu-Lin Liu (Hsinchu, TW); Bei-Shing Lien (Taipei, TW); Yi-Wen Chen (Hsinchu, TW); Chin-Ho Chang (Hsinchu, TW); Jaw-Juinn Horng (Hsinchu, TW); Yung-Chow Peng (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H03K3/011H03F3/45475
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Quick Facts
Patent No.
US 12,640,712
App. No.
18/770,826
Granted
May 26, 2026
Kind
B2
Abstract

A semiconductor device includes a temperature-independent current generator that generates a reference current substantially independent of temperature and a mirror current that is a substantial duplicate of the reference current, a pulse signal generator that samples the mirror current so as to generate a pulse signal, and a counter that obtains a number of pulse signals generated by the pulse signal generator, that permits the pulse signal generator to generate a pulse signal when it is determined thereby that the number of pulse signals obtained thereby is less than a predetermined threshold value, and that inhibits the pulse signal generator from generating a pulse signal when it is determined thereby that the number of pulse signals obtained thereby is equal to the predetermined threshold value. A method for monitoring a temperature of the semiconductor device is also disclosed.

Claims (73)

1 . A semiconductor device comprising:

a temperature-independent current generator configured to generate a reference current substantially independent of temperature and a first current, a second current, and a third current that are substantial duplicates of the reference current;

a temperature-dependent current generator configured to generate a temperature-dependent current based on the second current and the third current received thereby; and

a first counter responsive to the first current and configured to generate a first chop signal, wherein the temperature-dependent current generator is configured to reduce a current mismatch between the second current and the third current responsive to the first chop signal.

2 . The semiconductor device of claim 1 , further comprising a first pulse signal generator, including:

a first switch coupled between the temperature-independent current generator and a node;

a second switch coupled to the node;

a capacitor coupled in parallel with the second switch; and

a comparator having a first comparator input coupled to the node, a second comparator input configured to receive a reference voltage, and a comparator output coupled to the first counter.

3 . The semiconductor device of claim 1 , wherein the temperature-independent current generator is further configured:

to generate a proportional to absolute temperature (PTAT) current and a complementary to absolute temperature (CTAT) current; and

to combine the PTAT current and the CTAT so as to generate the reference current.

4 . The semiconductor device of claim 1 , further comprising:

a first pulse signal generator coupled to the temperature-independent current generator and configured to sample the first current so as to generate a pulse signal, wherein the first counter is coupled to the first pulse signal generator and configured to obtain a number of pulse signals generated by the first pulse signal generator;

a second pulse signal generator coupled to the temperature-dependent current generator and configured to sample the temperature-dependent current so as to generate a second pulse signal; and

a second counter coupled to the second pulse signal generator and configured to count a number of second pulse signals generated by the second pulse signal generator.

5 . The semiconductor device of claim 4 , wherein the second pulse signal generator includes:

a first switch coupled between the temperature-dependent current generator and a node;

a second switch coupled to the node;

a capacitor coupled in parallel with the second switch; and

a comparator having a first comparator input coupled to the node, a second comparator input configured to receive a reference voltage, and a comparator output coupled to the second counter.

6 . The semiconductor device of claim 1 , wherein the temperature-dependent current generator is further configured:

to generate one of a PTAT voltage and a CTAT voltage based on the second current;

to convert the one of the PTAT voltage and the CTAT voltage into the one of a PTAT current and a CTAT current; and

to subtract the one of the PTAT current and the CTAT current from the third current so as to extract the temperature-dependent current.

7 . The semiconductor device of claim 1 , wherein the temperature-dependent current generator further includes a current mismatch correction circuit configured to reduce a current mismatch and the first counter is configured to generate the first chop signal for reception by and for periodically reversing a polarity of the current mismatch correction circuit.

8 . The semiconductor device of claim 1 , wherein the temperature-dependent current generator further includes a voltage offset correction circuit configured to reduce a voltage offset and the first counter is further configured to generate a second chop signal for reception by and for periodically reversing a polarity of the voltage offset correction circuit.

9 . The semiconductor device of claim 1 , wherein the temperature-dependent current generator includes:

an operational amplifier coupled between first and second nodes;

a first element coupled to the first node; and

a second element coupled to the second node, wherein the first element has a negative temperature coefficient.

10 . The semiconductor device of claim 1 , wherein the temperature-dependent current generator includes:

an operational amplifier coupled between first and second nodes;

a first element coupled to the first node; and

a second element coupled to the second node, wherein the first element has a positive temperature coefficient.

11 . The semiconductor device of claim 1 , wherein the temperature-dependent current generator includes:

an operational amplifier having a first input configured to receive the second current;

a first resistor coupled between the first input of the operational amplifier and an electrical ground;

a second resistor coupled between a second input of the operational amplifier and the electrical ground; and

a transistor configured to receive the third current and coupled between the second input and an output of the operational amplifier.

12 . The semiconductor device of claim 1 , wherein the temperature-dependent current generator includes:

an operational amplifier having a first input configured to receive the second current;

a first transistor or a diode coupled between the first input of the operational amplifier and an electrical ground;

a resistor coupled between a second input of the operational amplifier and the electrical ground; and

a second transistor configured to receive the third current and coupled between the second input and an output of the operational amplifier.

13 . A semiconductor device comprising:

a temperature-dependent current generator configured to:

receive a first current, a second current, and a third current which are generated by a temperature-independent current generator and substantially independent of temperature; and

generate a temperature-dependent current dependent of temperature based on the second current and the third current; and

a first counter responsive to the first current and configured to generate a first chop signal, wherein the temperature-dependent current generator is configured to reduce a current mismatch between the second current and the third current responsive to the first chop signal.

14 . The semiconductor device of claim 13 , further comprising:

a second pulse signal generator coupled to the temperature-dependent current generator and configured to sample the temperature-dependent current so as to generate a pulse signal; and

a second counter coupled to the second pulse signal generator and configured to obtain a number of pulse signals generated by the second pulse signal generator.

15 . The semiconductor device of claim 13 , wherein the temperature-dependent current generator further includes a current mismatch correction circuit configured to reduce a current mismatch and the first counter is configured to generate the first chop signal for reception by and for periodically reversing a polarity of the current mismatch correction circuit.

16 . The semiconductor device of claim 13 , wherein the temperature-dependent current generator further includes a voltage offset correction circuit configured to reduce a voltage offset and the first counter is further configured to generate a second chop signal for reception by and for periodically reversing a polarity of the voltage offset correction circuit.

17 . A method of monitoring a temperature of a semiconductor device, comprising:

generating, by a temperature-independent current generator, a reference current substantially independent of temperature, and first, second, and third currents that are substantial duplicates of the reference current; and

generating, by a temperature-dependent current generator, a temperature-dependent current dependent of temperature based on the second and third currents received thereby;

generating, by a first counter, a chop signal responsive to the first current; and

reducing, by the temperature-dependent current generator, a current mismatch between the second and third currents responsive to the chop signal.

18 . The method of claim 17 , further comprising:

sampling the first current to generate first pulse signals;

counting a number of the first pulse signals to generate a first digital code;

sampling the temperature-dependent current to generate second pulse signals; and

counting a number of the second pulse signals to generate a second digital code, whereby a temperature of the semiconductor device is monitored using the first and second digital codes.

19 . The method of claim 17 , further comprising:

generating a CTAT voltage based on the second current;

converting the CTAT voltage to a CTAT current; and

subtracting the CTAT current from the third current to extract the temperature-dependent current.

20 . The method of claim 17 , further comprising:

generating a PTAT voltage based on the second current;

converting the PTAT voltage to a PTAT current; and

subtracting the PTAT current from the third current to extract the temperature-dependent current.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 12, 2024
From: LIU, SZU-LIN; LIEN, BEI-SHING; CHEN, YI-WEN; CHANG, CHIN-HO; HORNG, JAW-JUINN; PENG, YUNG-CHOW
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 067972/0678 →
Continuity (3)
Continuation 17718456 · Apr 12, 2022
Provisional Application 63232239 · Aug 12, 2021
Related Publication 20240364315A1 · Oct 31, 2024
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