Semiconductor device, method for fabricating the semiconductor device, and memory device and system including the semiconductor device
A semiconductor device according to an embodiment of the present disclosure may include: a stack structure including a plurality of first conductive patterns and a plurality of dielectric layers, which are alternately stacked, the stack structure having a stepped structure such that any one of the first conductive patterns further protrudes than the first conductive pattern positioned immediately above it; a plurality of second conductive patterns which are respectively formed over protrusions of the first conductive patterns; a plurality of contact plugs which overlap the plurality of second conductive patterns, respectively, and pass through the overlapping second conductive patterns and the stack structure; and a sealing layer pattern which is interposed between the first conductive patterns and the contact plugs and separates the first conductive patterns from the contact plugs.
1 . A semiconductor device comprising:
a stack structure comprising a plurality of first conductive patterns and a plurality of dielectric layers which are alternately stacked with the plurality of first conductive patterns, the stack structure including a contact region in which a plurality of contact plugs are arranged;
a first contact plug of the plurality of contact plugs, passing through one or more first conductive patterns of the plurality of first conductive patterns and one or more dielectric layers of the plurality of dielectric layers, which are alternately stacked with the one or more first conductive patterns;
a second conductive pattern formed over an uppermost first conductive pattern of the one or more first conductive patterns and surrounding a sidewall of a portion of the first contact plug to be in contact with the sidewall of the portion of the first contact plug;
a sealing layer interposed between the one or more first conductive patterns and the first contact plug and surrounding a sidewall of a remaining portion of the first contact plug, except for the portion of the first contact plug;
a support pillar passing through the second conductive pattern, the one or more first conductive patterns, and the one or more dielectric layers, and formed to be spaced apart from the first contact plug; and
a peripheral circuit element disposed under the stack structure and overlapping the contact region,
wherein a lower surface of the first contact plug is in direct contact with a pad or wire of the peripheral circuit element.
2 . The semiconductor device according to claim 1 , wherein a lower surface of the second conductive pattern is in direct contact with an upper surface of the sealing layer.
3 . The semiconductor device according to claim 1 , wherein a lower surface of the sealing layer is in direct contact with the pad or wire of the peripheral circuit element.
4 . The semiconductor device according to claim 1 , wherein a size of an upper surface of the support pillar is the same as a size of an upper surface of the first contact plug.
5 . The semiconductor device according to claim 1 , wherein the support pillar has substantially the same bottom level as that of the first contact plug.
6 . The semiconductor device according to claim 1 , wherein the stack structure further including a cell array region in which a plurality of memory cells are arranged.
7 . The semiconductor device according to claim 6 , further comprising:
a channel pillar passing through the stack structure of the cell array region;
and a memory layer interposed between the channel pillar and each of the first conductive patterns.