Electrode of energy storage element and manufacturing method thereof
A manufacturing method of an electrode of an energy storage element includes: providing a substrate into microwave plasma equipment; introducing a carrier gas and a carbon precursor gas into the microwave plasma equipment; forming multi-layer graphene walls on the substrate through microwave plasma chemical vapor deposition; and immersing the substrate containing the multi-layer graphene walls in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls. A volume ratio of the carrier gas to the carbon precursor gas is 1:10 to 10:1. An electrode of an energy storage element is also provided.
1 . A manufacturing method of an electrode of an energy storage element, comprising:
providing a substrate into microwave plasma equipment;
introducing a carrier gas and a carbon precursor gas into the microwave plasma equipment;
forming multi-layer graphene walls on the substrate through microwave plasma chemical vapor deposition; and
immersing the substrate containing the multi-layer graphene walls in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls,
wherein a volume ratio of the carrier gas to the carbon precursor gas is 1:10 to 10:1.
2 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the number of cycles of performing the electrochemical activation treatment is one or more.
3 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the carbon precursor gas comprises a hydrocarbon gas.
4 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the microwave plasma chemical vapor deposition comprises electron cyclotron resonance chemical vapor deposition (ECR-CVD), multi electron cyclotron resonance chemical vapor deposition (MECR-CVD), microwave plasma torch chemical vapor deposition (MPT-CVD), focused plasma chemical vapor deposition (FMP-CVD), or a combination thereof.
5 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein a microwave frequency used in the microwave plasma chemical vapor deposition is greater than or equal to 300 MHz and less than or equal to 300 GHz.
6 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein microwave output power used in the microwave plasma chemical vapor deposition is greater than 400 W and less than 75 KW.
7 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the volume ratio of the carrier gas to the carbon precursor gas is 1:2 to 2:1.
8 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the number of layers of the multi-layer graphene walls is greater than or equal to 2 and less than or equal to 10.
9 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the number of layers of the multi-layer graphene walls is greater than 10 and less than or equal to 20.
10 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein a material of the substrate comprises a metal material, wherein the metal material is selected from copper, gold, silver, titanium, nickel, tin, platinum, palladium, aluminum, or a combination of the foregoing.
11 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein a material of the substrate comprises a conductive polymer material, wherein the conductive polymer material is selected from polyaniline, polyacetylene, polyparastyrene, polyparaphenylene, polypyrrole, polythiophene, or a combination of the foregoing.
12 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the electrolyte solution comprises LiPF 6 , LiBF 4 , TEABF 4 , LiFSI, LiTFSI, or a combination of the foregoing.
13 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the performing the electrochemical activation treatment comprises performing a constant current method, cyclic voltammetry, or a combination of the foregoing.
14 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein an operating potential range in the electrochemical activation treatment is greater than or equal to 0V and less than or equal to 6V, or greater than or equal to −6V and less than or equal to 0V.
15 . The manufacturing method of the electrode of the energy storage element according to claim 1 , wherein the carrier gas comprises argon or nitrogen.
16 . An electrode of an energy storage element formed by using the manufacturing method of the electrode of the energy storage element according to claim 1 , the electrode of the energy storage element comprising:
the substrate; and
the graphene arranged on the substrate and comprising the multi-layer graphene walls.
17 . The electrode of the energy storage element according to claim 16 , wherein the number of layers of the multi-layer graphene walls is greater than or equal to 2 and less than or equal to 10.
18 . The electrode of the energy storage element according to claim 16 , wherein the number of layers of the multi-layer graphene walls is greater than 10 and less than or equal to 20.
19 . The electrode of the energy storage element according to claim 16 , wherein a material of the substrate comprises a metal material, wherein the metal material is selected from copper, gold, silver, titanium, nickel, tin, platinum, palladium, aluminum, or a combination of the foregoing.
20 . The electrode of the energy storage element according to claim 16 , wherein a material of the substrate comprises a conductive polymer material, wherein the conductive polymer material is selected from polyaniline, polyacetylene, polyparastyrene, polyparaphenylene, polypyrrole, polythiophene, or a combination of the foregoing.
21 . The electrode of the energy storage element according to claim 16 , wherein the graphene is doped with nitrogen, silicon, or sulfur.