Self-aligning bonding by hydrophilic contrast
A manufacturing method of a structure intended for assembly with another structure by self-aligning bonding by hydrophilic contrast, including the following successive steps: a) definition of pads on the side of the first face of a first substrate; b) transfer of a second substrate on the side of the first face of the first substrate; c) formation on the sides and/or on a peripheral part of the upper face of the pads, of a material more hydrophobic than a material of the upper face of the pads; and d) removal of the second substrate.
1 . A manufacturing method for a structure intended to be assembled with another structure by self-aligning bonding by hydrophilic contrast, comprised of the following successive steps:
a) definition of pads on the side of a first face of a first substrate;
b) transfer of a second substrate on the side of the first face of the first substrate;
c) deposition, on the sides and/or on a surrounding part of the upper face of the pads of a material more hydrophobic than a material of the upper face of the pads;
d) removal of the second substrate; and
in which the material of the upper face of the pads and the material coating the side of the pads have a difference in water droplet contact angle greater than 20°.
2 . The manufacturing method according to claim 1 in which the first substrate comprises a semiconductor material.
3 . The manufacturing method according to claim 2 , in which the first substrate is a substrate of a semiconductor on insulator type.
4 . The manufacturing method according to claim 1 , in which the first face of the first substrate is coated with a layer of oxide.
5 . The manufacturing method according to claim 4 , in which the oxide layer on the first substrate comprises pads for metallic connections.
6 . The manufacturing method according to claim 1 , in which, at step b), the second substrate is fixed to the first substrate by molecular bonding.
7 . The manufacturing method according to claim 1 , in which step c) is carried out by treatment with HF vapor.
8 . The manufacturing method according to claim 1 , in which step c) is carried out by immersing the structure in a bath based on a fluorinated compound.
9 . The manufacturing method according to claim 1 , which comprises, before step c), a step of cutting the first substrate to form chips, each chip comprising a pad.
10 . The manufacturing method according to claim 1 , which comprises, after step a), a step of cleaning the first face of the first substrate.
11 . The manufacturing method according to claim 1 , in which the second substrate is structured so as to have a pad of non-zero thickness in line with each pad of the first substrate.
12 . The manufacturing method according to claim 1 , in which the pads of the first substrate have a non-zero thickness.
13 . A method for bonding a first structure and a second structure made by the process described according to claim 1 , comprising a step in which a droplet of water on the first face of the first substrate of the first structure and a step in which the second structure is transferred to the first structure, the first faces of the first substrates facing opposite other.