Granted Patent B2

US 12,650,591 · App. 18/372,306 · Granted Jun 9, 2026

Inventors: Simon Raab (Santa Barbara, CA); Mark S. Longmuir (Tamworth, NH)

Assignee: Thorlabs Measurement Systems Inc.

G02B26/101G02B26/105H02K3/46H02K41/0356H02K2203/12

Abstract

Claims (47)

1 . A beam steering mechanism comprising:

a mirror comprising a first surface and a second surface opposite to the first surface, the first surface being a mirrored surface;

a frame;

a pivot anchor having a first end fixed to the frame and a second end connected to a pivot point of the second surface; and

a first actuator comprising a first output end, the first output end of the first actuator being connected to a first point on the second surface of the mirror,

wherein the first actuator comprises:

a first motor comprising a first magnet and a first coil;

a first stator structured to support the first magnet;

a first stationary pole arranged coaxially with the first stator and provided to a radially inner side of the first magnet;

a first bobbin structured to support a first winding of the first coil;

a first non-contact position detector subsystem that is mounted along a first path over which the first bobbin moves; and

a first flexible circuit connected between the first coil that is supported by the first bobbin and a first energy source, the first flexible circuit providing energy to the first coil and constraining rotation of the first bobbin relative to the first stator,

wherein the first stationary pole is ground with a precision such that residual rotation of the first bobbin resulting from a yield of the first flexible circuit does not affect an accuracy of the first non-contact position detector subsystem.

2 . The beam steering mechanism of claim 1 , wherein the first bobbin is arranged coaxially with the first stator and the first stationary pole and positioned to a radially inner side of the first magnet and a radially outer side of the first stationary pole, and

wherein a first inner diameter of the first bobbin is larger than a first outer diameter of the first stationary pole so that a first gap is provided between a first inner surface of the first bobbin and a first outer surface of the first stationary pole.

3 . The beam steering mechanism of claim 2 , wherein a positive air pressure is supplied to the first gap to provide an air cushion in the first gap so that the first bobbin is structured to move in a first axial direction of the first actuator without contacting the first stationary pole.

4 . The beam steering mechanism of claim 2 , further comprising a first actuator rod connected to an end of the first bobbin, the first actuator rod extending in a first axial direction of the first actuator away from the first bobbin;

wherein the first output end of the first actuator is a tip end of the first actuator rod.

5 . The beam steering mechanism of claim 1 , further comprising a second actuator having a second output end, the second output end of the second actuator is connected to a second point on the second surface of the mirror.

6 . The beam steering mechanism of claim 5 , wherein a first line connecting the pivot point of the second surface and the first point on the second surface is non-parallel to a second line connecting the pivot point of the second surface and the second point on the second surface.

7 . The beam steering mechanism of claim 6 , wherein the first line and the second line are orthogonal.

8 . The beam steering mechanism of claim 1 , wherein the first non-contact position detector subsystem comprises a plurality of first emitters and first photodetectors arranged around a circumference of the first path, with the plurality of first emitters shining light on the first bobbin and the plurality of first photodetectors detecting light reflected from the first bobbin to determine a relative position of the first bobbin.

9 . A beam steering mechanism comprising:

a mirror comprising a first surface and a second surface opposite to the first surface, the first surface being a mirrored surface;

a flexure having a first surface and a second surface, the first surface of the flexure being fixed to the second surface of the mirror;

a frame;

a plurality of supports, each of the plurality of the supports having a first end fixed to the frame and a second end fixed to the flexure;

a pivot anchor having a first end fixed to the frame, and a second end connected to a pivot point of the second surface of the mirror through a hole in the flexure or connected to a pivot point of the second surface of the flexure; and

a first actuator comprising a first output end, the first output end of the first actuator being connected to the flexure at a first point,

wherein the first actuator comprises

a first motor comprising a first magnet and a first coil;

a first stator structured to support the first magnet;

a first stationary pole arranged coaxially with the first stator and provided to a radially inner side of the first magnet;

a first bobbin structured to support a first winding of the first coil,

a first non-contact position detector subsystem that is mounted along a first path over which the first bobbin moves; and

a first flexible circuit connected between the first coil that is supported by the first bobbin and a first energy source, the first flexible circuit providing energy to the first coil and constraining rotation of the first bobbin relative to the first stator,

wherein the first stationary pole is ground with a precision such that residual rotation of the first bobbin resulting from a yield of the first flexible circuit does not affect an accuracy of the first non-contact position detector subsystem.

10 . The beam steering mechanism of claim 9 , wherein the first bobbin is arranged coaxially with the first stator and the first stationary pole and positioned to a radially inner side of the first magnet and a radially outer side of the first stationary pole, and

wherein a first inner diameter of the first bobbin is larger than a first outer diameter of the first stationary pole so that a first gap is provided between a first inner surface of the first bobbin and a first outer surface of the first stationary pole.

11 . The beam steering mechanism of claim 10 , wherein a positive air pressure is supplied to the first gap to provide an air cushion in the first gap so that the first bobbin is structured to move in a first axial direction of the first actuator without contacting the first stationary pole.

12 . The beam steering mechanism of claim 10 , further comprising a first actuator rod connected to an end of the first bobbin, the first actuator rod extending in a first axial direction of the first actuator away from the first bobbin,

wherein the first output end of the first actuator is a tip end of the first actuator rod.

13 . The beam steering mechanism of claim 9 , further comprising a second actuator comprising a second output end, the second output end being connected to the flexure at a second point.

14 . The beam steering mechanism of claim 13 , wherein a first line connecting the pivot point of the second surface of the mirror and the first point, or connecting the pivot point of the second surface of the flexure and the first point, is non-parallel to a second line connecting the pivot point of the second surface of the mirror and the second point, or connecting the pivot point of the second surface of the flexure and the second point.

15 . The beam steering mechanism of claim 14 , wherein the first line and the second line are orthogonal.

16 . The beam steering mechanism of claim 9 , wherein the first position detector subsystem comprises a plurality of first emitters and first photodetectors arranged around a circumference of the first path, with the plurality of first emitters shining light on the first bobbin and the plurality of first photodetectors detecting light reflected from the first bobbin to determine a relative position of the first bobbin.

17 . The beam steering mechanism of claim 9 , wherein the flexure is a flat spiral flexure.

Continuity (3)

References Cited (24)