Photoelectric conversion apparatus having capacitance addition transistor, photoelectric conversion system, and movable body
A photoelectric conversion apparatus includes first and second photoelectric conversion circuits, an FD configured to hold signal charges, a first transfer transistor configured to control transfer of the signal charge from the first photoelectric conversion circuit to the FD, a second transfer transistor configured to control transfer of the signal charge from the second photoelectric conversion circuit to the FD, a first capacitor circuit configured to hold a signal charge overflowing from the first photoelectric conversion circuit, and a second capacitor circuit configured to hold a signal charge overflowing from the second photoelectric conversion circuit. The first capacitor circuit is connected to a capacitance addition transistor via a first capacitor-connected transistor. The second capacitor circuit is connected to the capacitance addition transistor via a second capacitor-connected transistor. The first and second capacitor-connected transistors are connected to the FD via the capacitance addition transistor.
1 . A photoelectric conversion apparatus comprising:
a first photoelectric conversion circuit and a second photoelectric conversion circuit;
a floating diffusion node configured to hold signal charges transferred from the first and second photoelectric conversion circuits;
a first transfer transistor configured to control transfer of a signal charge from the first photoelectric conversion circuit to the floating diffusion node;
a second transfer transistor configured to control transfer of a signal charge from the second photoelectric conversion circuit to the floating diffusion node;
an amplification transistor connected to the floating diffusion node;
a first capacitor circuit configured to hold a signal charge overflowing from the first photoelectric conversion circuit; and
a second capacitor circuit configured to hold a signal charge overflowing from the second photoelectric conversion circuit,
wherein the first capacitor circuit is connected to a capacitance addition transistor via a first capacitor-connected transistor,
wherein the second capacitor circuit is connected to the capacitance addition transistor via a second capacitor-connected transistor,
wherein the first and second capacitor-connected transistors are connected to the floating diffusion node via the capacitance addition transistor,
wherein the first photoelectric conversion circuit includes a first semiconductor region of a first conductivity type where carriers of the same conductivity type as a signal charge are majority carriers,
wherein the first capacitor circuit includes a second semiconductor region of the first conductivity type,
wherein a part of the first semiconductor region overlaps the second semiconductor region in a planar view,
wherein the second photoelectric conversion circuit includes a third semiconductor region of the first conductivity type,
wherein a potential barrier between the first and second semiconductor regions is lower than a potential barrier between the first and third semiconductor regions,
wherein the first and second photoelectric conversion circuits are included in a first pixel,
wherein a third photoelectric conversion circuit and a fourth photoelectric conversion circuit are included in a second pixel, and
wherein a potential barrier between the first and second pixels is higher than the potential barrier between the first and second semiconductor regions.
2 . The photoelectric conversion apparatus according to claim 1 , wherein a path of a signal charge read via the first transfer transistor and a path of a signal charge read via the first capacitor-connected transistor are separate.
3 . The photoelectric conversion apparatus according to claim 1 , further comprising a fourth semiconductor region of the first conductivity type,
wherein the fourth semiconductor region forms a source or a drain of the first capacitor-connected transistor and a source or a drain of the second capacitor-connected transistor.
4 . The photoelectric conversion apparatus according to claim 3 , wherein the floating diffusion node is connected to a reset transistor.
5 . The photoelectric conversion apparatus according to claim 4 , wherein the floating diffusion node is connected to the reset transistor via the capacitance addition transistor.
6 . The photoelectric conversion apparatus according to claim 4 , wherein the fourth semiconductor region forms a source or a drain of the reset transistor.
7 . The photoelectric conversion apparatus according to claim 1 , wherein a microlens is placed to overlap the first and second photoelectric conversion circuits in a planar view.
8 . The photoelectric conversion apparatus according to claim 1 ,
wherein a microlens is placed to overlap the first and third photoelectric conversion circuits in a planar view.
9 . The photoelectric conversion apparatus according to claim 1 , wherein deep trench isolation is disposed between the first and second photoelectric conversion circuits.
10 . The photoelectric conversion apparatus according to claim 1 ,
wherein the first photoelectric conversion circuit is disposed on a semiconductor substrate,
wherein the semiconductor substrate includes a first surface on which a gate of the first transfer transistor is disposed, and a second surface opposed to the first surface, and
wherein light is incident on the second surface.
11 . The photoelectric conversion apparatus according to claim 1 , wherein the first transfer transistor includes a vertical transfer transistor.
12 . The photoelectric conversion apparatus according to claim 1 , wherein the first capacitor circuit includes a metal-insulator-metal capacitor.
13 . The photoelectric conversion apparatus according to claim 1 ,
wherein the third photoelectric conversion circuit shares the floating diffusion node, and
wherein an area of the first photoelectric conversion circuit and an area of the third photoelectric conversion circuit are different in a planar view.
14 . The photoelectric conversion apparatus according to claim 1 , wherein the photoelectric conversion apparatus has a first mode in which the capacitance addition transistor and the first and second capacitor-connected transistors are turned off and a signal is read, and a second mode in which the capacitance addition transistor and the first and second capacitor-connected transistors are turned on and a signal is read.
15 . The photoelectric conversion apparatus according to claim 14 , wherein the photoelectric conversion apparatus has a third mode in which the capacitance addition transistor is turned on, the first and second capacitor-connected transistors are turned off, and a signal is read.
16 . A photoelectric conversion system comprising:
the photoelectric conversion apparatus according to claim 1 ; and
a signal processing circuit configured to process a signal output from the photoelectric conversion apparatus.
17 . A movable body comprising:
the photoelectric conversion apparatus according to claim 1 ;
an information acquisition circuit configured to acquire distance information regarding a distance to a target object based on a signal from the photoelectric conversion apparatus; and
a control circuit configured to control the movable body based on the distance information.
18 . A photoelectric conversion apparatus comprising:
a first photoelectric conversion circuit and a second photoelectric conversion circuit;
a floating diffusion node configured to hold signal charges transferred from the first and second photoelectric conversion circuits;
a first transfer transistor configured to control transfer of a signal charge from the first photoelectric conversion circuit to the floating diffusion node;
a second transfer transistor configured to control transfer of a signal charge from the second photoelectric conversion circuit to the floating diffusion node;
an amplification transistor connected to the floating diffusion node;
a first capacitor circuit configured to hold a signal charge overflowing from the first photoelectric conversion circuit;
a second capacitor circuit configured to hold a signal charge overflowing from the second photoelectric conversion circuit, and
a fourth semiconductor region of a first conductivity type,
wherein the first capacitor circuit is connected to a capacitance addition transistor via a first capacitor-connected transistor,
wherein the second capacitor circuit is connected to the capacitance addition transistor via a second capacitor-connected transistor,
wherein the first and second capacitor-connected transistors are connected to the floating diffusion node via the capacitance addition transistor,
wherein the first photoelectric conversion circuit includes a first semiconductor region of the first conductivity type where carriers of the same conductivity type as a signal charge are majority carriers,
wherein the first capacitor circuit includes a second semiconductor region of the first conductivity type,
wherein a part of the first semiconductor region overlaps the second semiconductor region in a planar view,
wherein the fourth semiconductor region forms a source or a drain of the first capacitor-connected transistor and a source or a drain of the second capacitor-connected transistor,
wherein the floating diffusion node is connected to a reset transistor, and
wherein the floating diffusion node is connected to the reset transistor via the capacitance addition transistor.