Structure for monitoring hybrid bonds in a semiconductor chip package
A first semiconductor build has a first back end of the line having a dielectric stack, metal wiring lines, vias and joining pads that are constructed into a first electrical connected path, having a first and second end, and passing through a portion of the first back end of the line dielectric stack. A second semiconductor build has a similar first electrical connected path. The first and second builds are bonded to a third semiconductor build, with the second end of the first electrical connected path of the first semiconductor build and the first end of the first electrical connected path of the second semiconductor build electrically coupled together in series via a first electrical connected path of the third semiconductor build, such that the resistance/conductivity measured from the first end of the first semiconductor build to the second end of the second semiconductor build verifies conductivity of the paths.
1 . A semiconductor structure comprising:
a first semiconductor build having a first back end of the line having a dielectric stack, metal wiring lines, vias and joining pads that are constructed into a first electrical connected path having a first and second end, said first electrical connected path passing through a portion of said first back end of the line dielectric stack;
a second semiconductor build having a first back end of the line having a dielectric stack, metal wiring lines, vias and joining pads that are constructed into a first electrical connected path having a first and second end, said first electrical connected path passing through a portion of said first back end of the line dielectric stack; and
a third semiconductor build;
wherein said first and second semiconductor builds are bonded to said third semiconductor build, said second end of said first electrical connected path of said first semiconductor build and said first end of said first electrical connected path of said second semiconductor build are electrically coupled together in series via a first electrical connected path of said third semiconductor build;
whereby the resistance/conductivity measured from the first end of the first semiconductor build to the second end of the second semiconductor build verifies the first electrically connected paths of the first, second and third semiconductor builds are conductive.
2 . The semiconductor structure of claim 1 , wherein said third semiconductor build comprises an interposer.
3 . The semiconductor structure of claim 1 , wherein said first electrical path of each of said first and second semiconductor builds jogs vertically through a portion of each respective back end of the line dielectric stack of said first and second semiconductor builds.
4 . The semiconductor structure of claim 1 where said bonds include hybrid bonds between said third semiconductor build and said first semiconductor build.
5 . The semiconductor structure of claim 1 wherein said third semiconductor build has a first back end of the line having a dielectric stack, metal wiring lines, vias and joining pads that are constructed into said first electrical connected path of said third semiconductor build.
6 . The semiconductor structure of claim 1 wherein said first and second semiconductor builds are bonded with bonds including hybrid bonds to said third semiconductor build.
7 . The semiconductor structure of claim 1 wherein said first electrical connected path of said third semiconductor build includes passing through hybrid bonds into and back from said first semiconductor build.
8 . The semiconductor structure of claim 1 wherein said first electrical connected path of said third semiconductor build includes passing through hybrid bonds into and back from said second semiconductor build.
9 . The semiconductor structure of claim 1 further including a sensor for measuring the resistance/conductance from said first end of said first semiconductor build to said second end of said second semiconductor build and generating a signal in response to said resistance/conductance.
10 . The semiconductor structure of claim 9 further including a semiconductor build replacement control and switches unit for electrically removing a failed semiconductor build in response to the resistance/conductance of said electrical connected paths.
11 . The semiconductor structure of claim 9 further including a semiconductor structure replacement control and switches unit for electrically removing a failed semiconductor build and replacing the failed semiconductor build with a standby semiconductor build.
12 . The semiconductor structure of claim 1 further including a second, third and fourth semiconductor structure as claimed in claim 1 positioned on a fourth semiconductor build and wherein electrical connected paths of said second, third and fourth semiconductor structures and the semiconductor structure of claim 1 are coupled in series and to a sensor for monitoring the resistance/conductance of said electrical connected paths.
13 . The semiconductor structure of claim 12 further including a semiconductor build replacement control and switches unit for electrically removing a failed semiconductor structure in response to the resistance/conductance of said electrical connected paths.
14 . The semiconductor structure of claim 12 further including a semiconductor structure replacement control and switches unit for electrically removing a failed semiconductor structure and replacing it with a standby semiconductor structure.
15 . A semiconductor structure comprising:
first, second, and third semiconductor builds;
wherein the first semiconductor build has a back end of the line having a dielectric stack, metal wiring lines, vias, joining pads and has hybrid bonds to the third semiconductor build for making electrical interconnections,
wherein the second semiconductor build has a back end of the line having a dielectric stack, metal wiring lines, vias, joining pads and has hybrid bonds to the third semiconductor build for making electrical interconnections,
a first conductive path passing through certain hybrid bonds of said first semiconductor build to said third semiconductor build and back to said first semiconductor build, and
a second conductive path passing through certain hybrid bonds of said second semiconductor build to said third semiconductor build and back to said second semiconductor build,
wherein said first and second conductive paths coupled in series between a first and second terminal, and
a sensor for measuring the resistance/conductance from said first terminal to said second terminal and generating a signal in response to said resistance/conductance.
16 . A method for fabricating a semiconductor structure comprising the steps of:
selecting first and second semiconductor builds each having a semiconductor substrate and a BEOL built up to a last layer,
selecting a third semiconductor build having a semiconductor substrate and a BEOL built up to a last layer and contains a plurality of through silicon vias,
applying a hybrid bond joining/layer interface on the BEOLs of the first, second and third semiconductor builds,
positioning and aligning the hybrid bond joining/layers of the first and second semiconductor builds above the hybrid bond joining/layer of the third semiconductor build,
applying a thermal treatment and anneal to the hybrid bond joining/layers of the first, second and third semiconductor builds thereby bonding the first and second semiconductor builds to the third semiconductor build,
applying an over-mold over and in between the first, second and third semiconductor builds,
flipping over and selectively etching the exposed semiconductor substrate backside of the third semiconductor build to remove a portion of the semiconductor substrate to expose the ends of the plurality of through silicon vias,
forming an insulation layer, solder bump pads and solder bumps above the plurality of through silicon vias, and
separating respective dies from the wafer.
17 . The method of claim 16 wherein said step of selecting first and second semiconductor builds include selecting a semiconductor build having a first back end of the line having a dielectric stack, metal wiring lines, vias and joining pads that are constructed into a first electrical connected path having a first and second end, said first electrical connected path passing through a portion of said first back end of the line dielectric stack.
18 . The method of claim 16 wherein said step of selecting a third semiconductor build includes selecting a semiconductor build having a first electrical connected path passing through a portion of said third semiconductor build.