Granted Patent B2

US 12,696,616 · App. 18/276,604 · Granted Jul 28, 2026

Inventors: Shunpei Yamazaki (Tokyo, JP); Kenichi Okazaki (Atsugi, JP); Yasumasa Yamane (Atsugi, JP); Ryota Hodo (Atsugi, JP)

Assignee: Semiconductor Energy Laboratory Co., Ltd.

H10K50/19H10K59/352H10K59/353H10K71/233H10K71/60H10K59/131

Abstract

Claims (71)

1 . A display apparatus comprising:

a first light-emitting element;

a second light-emitting element;

a first sidewall;

a second sidewall;

a third sidewall; and

a fourth sidewall,

wherein the first light-emitting element comprises:

a first pixel electrode;

a first light-emitting layer over the first pixel electrode;

a first intermediate layer over the first light-emitting layer;

a second light-emitting layer over the first intermediate layer; and

a common electrode over the second light-emitting layer,

wherein the second light-emitting element comprises:

a second pixel electrode;

a third light-emitting layer over the second pixel electrode;

a second intermediate layer over the third light-emitting layer;

a fourth light-emitting layer over the second intermediate layer; and

the common electrode over the fourth light-emitting layer,

wherein the first light-emitting element and the second light-emitting element are adjacent to each other,

wherein the first sidewall covers at least part of a side surface of the first pixel electrode, part of a side surface of the first light-emitting layer and part of a side surface of the second light-emitting layer, and part of a side surface of the first intermediate layer,

wherein the second sidewall covers at least part of a side surface of the first sidewall,

wherein the third sidewall covers at least part of a side surface of the second pixel electrode, part of a side surface of the third light-emitting layer and part of a side surface of the fourth light-emitting layer, and part of a side surface of the second intermediate layer,

wherein the fourth sidewall covers at least part of a side surface of the third sidewall,

wherein the second sidewall covers at least part of a top surface of the first sidewall, and

wherein the fourth sidewall covers at least part of a top surface of the third sidewall.

2 . The display apparatus according to claim 1 , further comprising a gap between the second sidewall and the fourth sidewall.

3 . A fabrication method of a display apparatus, comprising the steps of:

forming an insulating layer;

forming a conductive film, a first light-emitting film, an intermediate film, a second light-emitting film, and a sacrificial film in this order over the insulating layer;

etching the sacrificial film, the second light-emitting film, the intermediate film, the first light-emitting film, and the conductive film to form a first pixel electrode and a second pixel electrode over the insulating layer, a first light-emitting layer over the first pixel electrode, a second light-emitting layer over the second pixel electrode, a first intermediate layer over the first light-emitting layer, a second intermediate layer over the second light-emitting layer, a third light-emitting layer over the first intermediate layer, a fourth light-emitting layer over the second intermediate layer, a first sacrificial layer over the third light-emitting layer, and a second sacrificial layer over the fourth light-emitting layer;

forming an insulating film covering at least part of a side surface of the first pixel electrode and part of a side surface of the second pixel electrode, part of a side surface of the first light-emitting layer, part of a side surface of the second light-emitting layer, part of a side surface of the third light-emitting layer, and part of a side surface of the fourth light-emitting layer, part of a side surface of the first intermediate layer and part of a side surface of the second intermediate layer, and part of a side surface and a top surface of the first sacrificial layer and part of a side surface and a top surface of the second sacrificial layer;

etching the insulating film to form a first sidewall covering at least part of the side surface of the first pixel electrode and a second sidewall covering at least part of the side surface of the second pixel electrode;

removing the first sacrificial layer and the second sacrificial layer; and

forming a common electrode over the third light-emitting layer and over the fourth light-emitting layer.

4 . A fabrication method of a display apparatus, comprising the steps of:

forming an insulating layer;

forming a conductive film, a first light-emitting film, an intermediate film, a second light-emitting film, and a sacrificial film in this order over the insulating layer;

etching the sacrificial film, the second light-emitting film, the intermediate film, the first light-emitting film, and the conductive film to form a first pixel electrode and a second pixel electrode over the insulating layer, a first light-emitting layer over the first pixel electrode, a second light-emitting layer over the second pixel electrode, a first intermediate layer over the first light-emitting layer, a second intermediate layer over the second light-emitting layer, a third light-emitting layer over the first intermediate layer, a fourth light-emitting layer over the second intermediate layer, a first sacrificial layer over the third light-emitting layer, and a second sacrificial layer over the fourth light-emitting layer;

forming a first insulating film covering at least part of a side surface of the first pixel electrode and part of a side surface of the second pixel electrode, part of a side surface of the first light-emitting layer, part of a side surface of the second light-emitting layer, part of a side surface of the third light-emitting layer, and part of a side surface of the fourth light-emitting layer, part of a side surface of the first intermediate layer and part of a side surface of the second intermediate layer, and part of a side surface and a top surface of the first sacrificial layer and part of a side surface and a top surface of the second sacrificial layer;

forming a second insulating film over the first insulating film;

etching the first insulating film and the second insulating film to form a first sidewall covering at least part of the side surface of the first pixel electrode, a second sidewall covering at least part of the side surface of the second pixel electrode, a third sidewall covering at least part of a side surface of the first sidewall, and a fourth sidewall covering at least part of a side surface of the second sidewall;

removing the first sacrificial layer and the second sacrificial layer; and

forming a common electrode over the third light-emitting layer and over the fourth light-emitting layer.

5 . The fabrication method of a display apparatus, according to claim 3 ,

wherein the conductive film is etched using the first sacrificial layer and the second sacrificial layer as a mask.

6 . The fabrication method of a display apparatus, according to claim 3 , further comprising the steps of:

forming a protective layer over the common electrode; and

forming a first coloring layer comprising a region overlapping with the first light-emitting layer and the third light-emitting layer and a second coloring layer comprising a region overlapping with the second light-emitting layer and the fourth light-emitting layer over the protective layer,

wherein the first coloring layer and the second coloring layer are configured to transmit light of different colors.

7 . The fabrication method of a display apparatus, according to claim 3 ,

wherein after the first sacrificial layer and the second sacrificial layer are removed, a common layer configured to function as one of an electron-injection layer and a hole-injection layer is formed over the third light-emitting layer and over the fourth light-emitting layer, and

wherein the common electrode is formed over the common layer.

8 . The fabrication method of a display apparatus, according to claim 3 ,

wherein a depression is formed in the insulating layer in the etching of the conductive film.

9 . The display apparatus according to claim 1 , further comprising:

a protective layer over the common electrode;

a first coloring layer over the protective layer so as to comprise a region overlapping with the first light-emitting layer and the second light-emitting layer; and

a second coloring layer over the protective layer so as to comprise a region overlapping with the third light-emitting layer and the fourth light-emitting layer,

wherein the first coloring layer and the second coloring layer are configured to transmit light of different colors,

wherein the first light-emitting layer and the third light-emitting layer are configured to emit light of the same color, and

wherein the second light-emitting layer and the fourth light-emitting layer are configured to emit light of the same color.

10 . The display apparatus according to claim 1 , further comprising a common layer between the common electrode and each of the second light-emitting layer and the fourth light-emitting layer,

wherein the common layer is configured to function as one of an electron-injection layer and a hole-injection layer in the first light-emitting element and the second light-emitting element.

11 . The display apparatus according to claim 1 ,

wherein the first pixel electrode and the second pixel electrode are provided over an insulating layer,

wherein the insulating layer comprises a first projection in a region overlapping with the first pixel electrode, and

wherein the insulating layer comprises a second projection in a region overlapping with the second pixel electrode.

12 . A display module comprising:

the display apparatus according to claim 1 ; and

at least one of a connector and an integrated circuit.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (87)