Granted Patent B2

US 12,724,091 · App. 18/444,685 · Granted Sep 1, 2026

Inventors: David Glenn (Cambridge, MA); Cole Meisenhelder (Washington, DC); Stephen DeVience (Ellicott City, MD); Connor Hart (Columbia, MD); Aakash Ravi (Laurel, MD)

Assignee: EuQlid, Inc.

G01R33/032G01N24/006G01R33/26

Abstract

Claims (81)

1 . A system for measuring a physical characteristic of a sample comprising:

an optical microscope, wherein an optical axis and a focal plane are associated with the optical microscope;

a sensor head;

a coupling mechanism comprising an ortho-planar spring, the coupling mechanism configured for compliant attachment of the sensor head to the optical microscope, wherein the coupling mechanism mediates translational compliance of the sensor head along the optical axis and rotational compliance of the sensor head about a rotation axis perpendicular to the optical axis;

a solid-state substrate attached to the sensor head;

a color center ensemble embedded in the solid-state substrate;

an actuator configured to effect a first controlled linear displacement of the sensor head substantially along the optical axis, and a controlled rotation of the sensor head substantially about the rotation axis;

an optical driving system configured to induce optical transitions in the color center ensemble; and

a magnetic field generator configured to produce a bias magnetic field within the solid-state substrate.

2 . The system of claim 1 further comprising

a microwave driving system, wherein the microwave driving system is configured to induce microwave spin transitions in the color center ensemble, and wherein the microwave driving system comprises a trace attached to the sensor head.

3 . The system of claim 1 , wherein

the bias magnetic field has a predetermined strength and orientation at the focal plane configured to resolve magnetic resonances of the color center ensemble with respect to a plurality of color center axes.

4 . The system of claim 1 , wherein

the first controlled linear displacement and the controlled rotation bring the color center ensemble into coincidence with the focal plane.

5 . The system of claim 4 , wherein

the sensor head maintains contact with the sample throughout the first controlled linear displacement and the controlled rotation.

6 . The system of claim 5 , wherein

the actuator is configured to effect the first controlled linear displacement and the controlled rotation by moving the sample relative to the optical microscope.

7 . The system of claim 6 , wherein

the actuator is further configured to effect a second controlled linear displacement of the sensor head along a direction substantially perpendicular to the optical axis.

8 . The system of claim 1 further comprising

a force sensor configured to measure a compressive force between the microscope and the sensor head.

9 . The system of claim 8 further comprising

a control system configured to receive force data from the force sensor indicative of the compressive force, wherein the control system is further configured to generate controls signals derived from the force data to regulate the actuator.

10 . The system of claim 1 , wherein

the solid-state substrate is a single crystal diamond, and wherein the color center ensemble is an ensemble of nitrogen vacancies.

11 . The system of claim 1 further comprising:

a camera configured to capture image data relating to the color center ensemble from the optical microscope; and

a control system configured to receive the image data, wherein:

the control system is configured to generate control signals derived from the image data, and

the control signals regulate the actuator.

12 . The system of claim 1 further comprising:

a plurality of fiducial markers substantially coplanar with the color center ensemble;

a camera configured to capture fiducial image data relating to the plurality of fiducial markers from the optical microscope; and

a control system configured to receive the fiducial image data, wherein:

the control system is configured to generate control signals derived from the fiducial image data, and

the control signals regulate the actuator.

13 . The system of claim 1 further comprising:

a force sensor configured to measure a compressive force between the microscope and the sensor head, wherein the force sensor generates force data indicative of the compressive force;

a camera configured to capture image data relating to the color center ensemble from the optical microscope; and

a control system configured to receive the image data and the force data, wherein:

the control system is configured to generate control signals derived from the image data and the force data, and

the control signals regulate the actuator.

14 . A method for measuring a magnetic field comprising:

placing a solid-state substrate in a first pose that is within view of an optical microscope, the optical microscope coupled to a sensor head with an ortho-planar spring, and wherein the solid-state substrate comprises an embedded ensemble of color centers;

applying a bias magnetic field to the ensemble of color centers;

applying an optical driving field to induce an optical transition in the ensemble of color centers;

collecting first image data indicating fluorescence of the ensemble of color centers when the solid-state substrate is in the first pose;

determining a pose adjustment derived from the first image data;

controlling an actuator to move the solid-state substrate from the first pose to a second pose in accordance with the pose adjustment;

collecting second image data when the solid-state substrate is in the second pose, wherein the second image data comprises fluorescence data relating to the fluorescence of the ensemble of color centers when the solid-state substrate is in the second pose; and

generating a spatially resolved map of a magnetic field coincident with the ensemble of color centers based on the fluorescence data.

15 . A method for measuring a magnetic field at a surface of a sample comprising:

placing the sample in a first pose such that the sample is in contact with a sensor head, wherein the sensor head comprises a solid-state substrate with an embedded ensemble of color centers and is coupled to an optical microscope with an ortho-planar spring;

applying a bias magnetic field to the ensemble of color centers;

applying an optical driving field to induce an optical transition in the ensemble of color centers;

collecting first image data from the optical microscope when the sample is in the first pose;

determining a first pose adjustment derived from the first image data;

controlling an actuator in accordance with the first pose adjustment to move the sample from the first pose to a second pose while maintaining contact between the sample and the sensor head;

collecting second image data from the optical microscope, the second image data comprising first fluorescence data relating to the fluorescence of the ensemble of color centers when the sample is in the second pose, wherein the first fluorescence data is indicative of a first spatial distribution of a physical property associated with a first region of the sample; and

generating a first spatially resolved map of a first magnetic field based on the first fluorescence data.

16 . The method of claim 15 further comprising:

generating force data indicative of a compressive force between the sensor head and the optical microscope while moving the sensor head from the first pose to the second pose; and

altering the first pose adjustment based on the force data.

17 . The method of claim 15 further comprising extracting fiducial data from the first image data, wherein:

the optical microscope defines a focal plane,

the fiducial data is indicative of an alignment of a plurality of fiducial markers relative to the focal plane, and

the pose adjustment is derived from the fiducial data.

18 . The method of claim 15 further comprising:

controlling the actuator to move the sample from the second pose to a third pose such that the sample is in contact with the sensor head, wherein:

the sample is in a first position relative to the sensor head when the sample is in the first pose,

the sample is in a second position relative to the sensor head when the sample is in the third pose, and

the first position is distinct from the second position;

collecting third image data from the optical microscope when the sample is in the third pose;

determining a second pose adjustment derived from the third image data;

controlling an actuator in accordance with the second pose adjustment to move the sample from the third pose to a fourth pose while maintaining contact between the sample and the sensor head;

collecting fourth image data from the optical microscope, the fourth image data comprising second fluorescence data relating to the fluorescence of the ensemble of color centers when the sample is in the fourth pose, wherein the second fluorescence data is indicative of a second magnetic field associated with a second region of the sample; and

generating a second spatially resolved map of a second magnetic field associated with the second region based on the second fluorescence data.

19 . The method of claim 18 further comprising

stitching the first spatially resolved map together with the second spatially resolved map to create a third spatially resolved map of a third magnetic field associated with a union of the first region and the second region.

Assignments (3)

Continuity (2)

References Cited (45)