IP Library › Granted Patent US 12,740,427
Granted Patent B2
US 12,740,427 · App. 18/483,159 · Granted Sep 15, 2026

RF amplifiers with improved stability by source inductance adjustment

Inventor: Gerard Bouisse (Saint Lys, FR)
Assignee: MACOM Technology Solutions Holdings, Inc.
H10W44/20H03F1/565H03F3/195H10W70/611H10W70/635H10W90/00H03F2200/222H10W44/234H10W72/248H10W72/252H10W90/724
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Quick Facts
Patent No.
US 12,740,427
App. No.
18/483,159
Granted
Sep 15, 2026
Kind
B2
Abstract

A radio frequency transistor amplifier package includes a package substrate with input, output, and ground terminals, and a transistor die on the package substrate. The transistor die includes a semiconductor structure having a plurality of transistors and gate, drain, and source contacts electrically coupled thereto. An inductance adjustment element is electrically coupled between the source contacts and the ground terminal, and is configured to provide a stability factor K of greater than or equal to 1 for a first operating frequency range of the transistor die. Related devices and methods are also discussed.

Claims (50)

1 . A radio frequency (RF) transistor amplifier package, comprising:

a transistor die comprising a semiconductor structure including a plurality of transistors and gate, drain, and source contacts electrically coupled thereto; and

an inductance adjustment element that is electrically coupled between the source contacts and an electrical ground member, and is configured to provide a stability factor K of greater than or equal to 1 for a first operating frequency range of the transistor die, wherein the first operating frequency range comprises at least about 4 GHz to about 6 GHz.

2 . The RF transistor amplifier package of claim 1 , further comprising:

a package substrate comprising input, output, and ground terminals,

wherein the transistor die is on the package substrate and the ground terminal is electrically coupled to the electrical ground member.

3 . The RF transistor amplifier package of claim 2 , wherein the transistor die is mounted on a surface of the package substrate in a flip chip configuration with the source contacts adjacent the surface of the package substrate.

4 . The RF transistor amplifier package of claim 2 , wherein the inductance adjustment element is configured to provide a predetermined inductance and is external to the transistor die.

5 . The RF transistor amplifier package of claim 4 , wherein the inductance adjustment element comprises at least one of:

a plurality of conductive bumps or pillars;

a dimension that is configured to separate the source contacts and the ground terminal;

one or more conductive connection patterns in the package substrate; or

a patterning of the electrical ground member.

6 . The RF transistor amplifier package of claim 4 , wherein the predetermined inductance is free of inductance contributions from conductive vias that extend in the semiconductor structure of the transistor die.

7 . The RF transistor amplifier package of claim 4 , wherein the transistor die comprises a plurality of source fingers on the semiconductor structure, and is free of conductive vias that are electrically coupled to the source fingers.

8 . The RF transistor amplifier package of claim 7 , wherein the inductance adjustment element is configured to provide an entirety of the predetermined inductance.

9 . The RF transistor amplifier package of claim 4 , further comprising:

a first impedance matching circuit that is electrically coupled between the input terminal and the gate contact, and is configured to provide the stability factor K of greater than or equal to 1 for a second operating frequency range that is higher than the first operating frequency range.

10 . The RF transistor amplifier package of claim 4 , further comprising:

a second impedance matching circuit that is electrically coupled between the input terminal and the gate contact, and is configured to provide the stability factor K of greater than or equal to 1 for a third operating frequency range that is lower than the first operating frequency range.

11 . The RF transistor amplifier package of claim 1 , wherein the transistor die comprises a plurality of gate fingers on the semiconductor structure, and wherein a respective gate finger of the plurality of gate fingers has a unit gate width (UGW), and wherein the UGW is configured based on the first operating frequency range.

12 . The RF transistor amplifier package of claim 1 , wherein the semiconductor structure comprises gallium nitride and/or silicon carbide.

13 . A method of fabricating a radio frequency (RF) transistor amplifier package, the method comprising:

providing a transistor die comprising a semiconductor structure including a plurality of transistors and gate, drain, and source contacts electrically coupled thereto; and

providing an inductance adjustment element that is electrically coupled between the source contacts and an electrical ground member, and is configured to provide a stability factor K of greater than or equal to 1 for a first operating frequency range of the transistor die,

wherein the first operating frequency range comprises at least about 4 GHz to about 6 GHz.

14 . The method of claim 13 , further comprising:

providing the transistor die on a package substrate comprising input, output, and ground terminals, wherein the ground terminal is electrically coupled to the electrical ground member.

15 . The method of claim 14 , further comprising:

mounting the transistor die on a surface of the package substrate in a flip chip configuration with the source contacts adjacent the surface of the package substrate.

16 . The method of claim 14 , wherein the inductance adjustment element is configured to provide a predetermined inductance and is external to the transistor die.

17 . The method of claim 16 , wherein providing the inductance adjustment element comprises at least one of:

providing a plurality of conductive bumps or pillars;

providing a dimension that is configured to separate the source contacts and the ground terminal;

providing one or more conductive connection patterns in the package substrate; or

providing a patterning of the electrical ground member.

18 . The method of claim 16 , wherein the predetermined inductance is free of inductance contributions from conductive vias that extend in the semiconductor structure of the transistor die.

19 . The method of claim 16 , wherein the transistor die comprises a plurality of source fingers on the semiconductor structure, and is free of conductive vias that are electrically coupled to the source fingers.

20 . The method of claim 16 , wherein the inductance adjustment element is configured to provide an entirety of the predetermined inductance.

21 . The method of claim 16 , further comprising:

providing a first impedance matching circuit that is electrically coupled between the input terminal and the gate contact, and is configured to provide the stability factor K of greater than or equal to 1 for a second operating frequency range that is higher than the first operating frequency range.

22 . The method of claim 16 , further comprising:

providing a second impedance matching circuit that is electrically coupled between the input terminal and the gate contact, and is configured to provide the stability factor K of greater than or equal to 1 for a third operating frequency range that is lower than the first operating frequency range.

23 . The method of claim 13 , wherein providing the transistor die comprises:

forming a plurality of gate fingers on the semiconductor structure, wherein a respective gate finger of the plurality of gate fingers has a unit gate width (UGW), and wherein the UGW is configured that is based on the first operating frequency range.

24 . The method of claim 13 , wherein the semiconductor structure comprises gallium nitride and/or silicon carbide.

25 . A radio frequency (RF) transistor amplifier package, comprising:

a transistor die comprising a semiconductor structure including a plurality of transistors and gate, drain, and source contacts electrically coupled thereto, wherein the transistor die is configured to provide a stability factor K of less than 1 for a first operating frequency range; and

an inductance adjustment element that is external to the transistor die and is electrically coupled between the source contacts and an electrical ground member,

wherein the inductance adjustment element provides a predetermined inductance that is configured to increase the stability factor K to be greater than or equal to 1 for the first operating frequency range, and the predetermined inductance is free of inductance contributions from conductive vias that extend in the semiconductor structure of the transistor die.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2023
From: WOLFSPEED, INC.
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 066236/0086 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 9, 2023
From: BOUISSE, GERARD
To: WOLFSPEED, INC.
Reel/Frame 065160/0892 →
Priority Claims (1)
EP 22306636 · Oct 28, 2022 · regional
Continuity (1)
Related Publication 20240145414A1 · May 2, 2024
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