Granted Patent B2

US 12,750,036 · App. 18/061,185 · Granted Sep 29, 2026

Inventor: Siarhei Dmitrievich Barsukou (Takarazuka, JP)

Assignee: Skyworks Solutions, Inc.

H03H9/40H03H9/02228H03H9/02574H03H9/133H03H9/17H03H9/36H04B1/0053H10N30/871

Abstract

Claims (28)

1 . A dispersive delay line comprising:

a piezoelectric substrate including a first region, a second region, and a third region;

a first interdigital transducer electrode on the first region of the piezoelectric substrate; and

a second interdigital transducer electrode on the second region of the piezoelectric substrate, the dispersive delay line arranged such that a Lamb wave is configured to propagate from the first interdigital transducer electrode to the second interdigital transducer electrode though the third region of the piezoelectric substrate with a group delay that depends on frequency, the Lamb wave having a reduced group delay velocity in at least part of the third region relative to in the first region.

2 . The dispersive delay line of claim 1 wherein the Lamb wave has a wavelength of λ, and the third region of the piezoelectric substrate has a thickness that is less than 0.5λ.

3 . The dispersive delay line of claim 1 wherein the at least part of the third region of the piezoelectric substrate has a thickness that is greater than a thickness of the first region.

4 . The dispersive delay line of claim 1 wherein the group delay has a linear relationship with frequency.

5 . The dispersive delay line of claim 1 wherein the group delay has a non-linear relationship with frequency.

6 . The dispersive delay line of claim 1 wherein the piezoelectric substrate has stepped heights in the third region.

7 . The dispersive delay line of claim 1 further comprising additional material on the third region of the piezoelectric substrate, the additional material configured to adjust acoustic wave propagation in the third region.

8 . The dispersive delay line of claim 1 wherein the dispersive delay line has a passband bandwidth in a range from 0.5 gigahertz to 2 gigahertz.

9 . The dispersive delay line of claim 1 wherein the dispersive delay line has a passband bandwidth of more than 1 gigahertz.

10 . The dispersive delay line of claim 1 wherein the group delay is in a range from 20 nanoseconds to 100 nanoseconds.

11 . The dispersive delay line of claim 1 wherein the group delay is in a range from 25 nanoseconds to 50 nanoseconds.

12 . The dispersive delay line of claim 1 wherein the dispersive delay line has an operating frequency in range from 5 gigahertz to 10 gigahertz.

13 . The dispersive delay line of claim 1 wherein the dispersive delay line has an operating frequency of more than 10 gigahertz.

14 . The dispersive delay line of claim 1 wherein the dispersive delay line has an operating frequency in Frequency Range 2 defined by a 3rd Generation Partnership Project fifth generation New Radio standard.

15 . The dispersive delay line of claim 1 wherein the piezoelectric substrate includes aluminum nitride.

16 . The dispersive delay line of claim 15 wherein the Lamb wave is a lowest order symmetric mode Lamb wave.

17 . The dispersive delay line of claim 1 wherein the Lamb wave is a lowest order symmetric mode Lamb wave.

18 . A radio frequency module comprising:

a dispersive delay line including a piezoelectric substrate; a first interdigital transducer electrode on a first region of the piezoelectric substrate; and a second interdigital transducer electrode on a second region of the piezoelectric substrate, the dispersive delay line arranged such that a Lamb wave is configured to propagate from the first interdigital transducer electrode to the second interdigital transducer electrode though a third region of the piezoelectric substrate with a group delay that depends on frequency, the Lamb wave having a reduced group delay velocity in at least part of the third region relative to in the first region;

radio frequency circuitry coupled to the dispersive delay line; and

a packaging structure enclosing the dispersive delay line and the radio frequency circuitry.

19 . The radio frequency module of claim 18 wherein the radio frequency circuitry includes a filter.

20 . A method of radio frequency signal demodulation, the method comprising:

receiving a radio frequency signal at a first interdigital transducer electrode of a dispersive delay line, the dispersive delay line arranged such that a Lamb wave propagates from the first interdigital transducer electrode to a second interdigital transducer electrode though a region of a piezoelectric substrate with a group delay that depends on frequency, the Lamb wave having a reduced group delay velocity in at least part of the region relative to in another region of the piezoelectric substrate under the first interdigital transducer electrode; and

frequency demodulating the radio frequency signal with the dispersive delay line.

Assignments (1)

Continuity (5)

References Cited (25)