Method of manufacturing circuit device
Wire bonding is performed efficiently by pressing circumference end of a block of a conductive foil by a clamper, and by performing wire bonding of a circuit element of a mounting portion in the block and the conductive pattern in a lump. At a time of wire bonding, oxidation of the conductive foil is prevented by blowing nitrogen gas to the conductive foil from paths and provided at the clamper.
1. A method of manufacturing a circuit device comprising the steps of:
providing a sheet member including a plurality of blocks which are aligned with each other, each block including mounting portions arranged in a matrix, each mounting portion having a conductive pattern for mounting circuit elements;
fixing the circuit elements onto a mounting portion having a conductive pattern;
providing one of the blocks on a supporting member;
pressing a periphery of the one of the blocks with a clamper;
wire-bonding each of the circuit elements to a desired conductive pattern;
common-molding with an insulation resin such that the circuit elements on the mounting portion are covered in a lump; and
dicing the insulating resin to separate each of the mounting portions.
2. The method of manufacturing a circuit device as claimed in claim 1 , wherein said insulating resin is transfer molded.
3. The method of manufacturing a circuit device as claimed in claim 1 , wherein dicing is performed using an adjusting mark formed with said conductive pattern.
4. The method of manufacturing a circuit device as claimed in claim 1 , wherein dicing is performed using pairs of adjusting marks facing each other formed with said conductive pattern.
5. The method of manufacturing a circuit device as claimed in claim 1 , wherein said sheet member includes any one of copper, aluminum, and Fe—Ni.
6. The method of manufacturing a circuit device as claimed in claim 1 , wherein said circuit elements include at least one of a semiconductor bare chip and a chip circuit part.
7. The method of manufacturing a circuit device according to claim 1 :
wherein the sheet member is provided with an isolation trench having a depth that is shallower than a thickness of the sheet member, the isolation trench being formed at an area of the sheet member other than an area associated with the conductive pattern; and
wherein the method comprises the steps of:
filling the insulating resin into the isolation trench; and
removing a whole rear face of the sheet member until the insulating resin is exposed.
8. The method of manufacturing a circuit device as claimed in claim 1 , wherein said supporting member is in contact with said conductive pattern continuously until wire bonding each of the circuit elements to a desired conductive pattern is substantially completed.
9. The method of manufacturing a circuit device as claimed in claim 1 , wherein an upper portion of an opening portion of said clamper is covered by a metal plate, and said clamper and said metal plate form a space filled with nitrogen gas over said block.
10. The method of manufacturing a circuit device as claimed in claim 1 , wherein said plurality of block are arranged at said sheet member.
11. The method of manufacturing a circuit device as claimed in claim 1 , wherein at least a part of the surface of said sheet member is covered by a conductive film.
12. The method of manufacturing a circuit device as claimed in claim 8 , wherein the wire bonding each circuit element to a desired conductive pattern is performed by pressing a surrounding end of said block at an uneven portion provided at said clamper.
13. The method of manufacturing a circuit device as claimed in claim 12 , wherein the wire-bonding is performed by feeding nitrogen gas to a whole area of said block through said uneven portion.
14. The method of manufacturing a circuit device according to claim 13 , wherein a path for flowing said nitrogen gas is provided at an inside of said clamper.
15. The method of manufacturing a circuit device as claimed in claim 9 , wherein an operating hole is provided at said metal plate, and wire bonding is performed through said operating hole.
16. The method of manufacturing a circuit device as claimed in claim 10 , wherein said insulating resin is transfer molded at every block.
17. The method of manufacturing a circuit device according to claim 11 , wherein said conductive film is formed with any one of nickel plating, gold plating, and silver plating.