Flat chip semiconductor device and manufacturing method thereof
View Patent ↗A flip chip semiconductor device having an improved structure and a method of manufacturing the flip chip semiconductor device, in which a semiconductor chip can be more securely joined to a lead frame while preventing contact defects between the two. The flip chip semiconductor device includes: a semiconductor chip having electrode pads formed on one side; conductive bumps formed on the electrode pads of the semiconductor chip; and a lead frame including a plurality of leads, the ends of which are electrically connected to the conductive bumps, wherein each of the leads has at least one groove formed thereon, and a solder plating layer is provided on the leads in and about the groove and melted to secure the connection with the conductive bumps.
1. A flip chip semiconductor device comprising:
a semiconductor element having a plurality of electrodes arranged on one side;
a plurality of conductive bumps disposed on the corresponding electrodes of the semiconductor element;
a lead frame including a plurality of leads, at least some of the leads each having at least one groove formed thereon; and
a solder material disposed in and around the groove of the leads to a predetermined height over an upper surface of the leads, the solder material fused with the corresponding conductive bumps with the height of the solder material disposed around the groove risen to a risen height by the fusion due to a surface tension such that the risen height of the solder material provides a sufficient electrical connection with the corresponding conductive bumps while the solder material around the groove is restricted from being displaced out of position during the fusion due to the groove.
2. The semiconductor device of claim 1 , wherein the groove is formed on a central area at the end of the lead.
3. The semiconductor device of claim 1 , wherein the at least some of the leads each has one groove formed thereon.
4. The semiconductor device of claim 1 , wherein the at least some of the leads each has plural grooves formed thereon.
5. The semiconductor device of claim 1 , wherein all of the plurality of leads each has at least one groove formed thereon.
6. The semiconductor device of claim 1 , wherein the solder material contains a metal selected from the group consisting of pure Sn, an alloy of Sn and Cu, an alloy of Sn and Ag, and an alloy of Sn and Bi.
7. The semiconductor device of claim 1 , wherein the electrodes and the corresponding conductive bumps of the semiconductor element are connected to one another via an intermediate metallic member.