Method for forming vertical structures in a semiconductor device
A method is provided for making a semiconductor device, comprising (a) providing a semiconductor stack comprising a first semiconductor layer ( 407 ) having a <110> crystallographic orientation and a second semiconductor layer ( 405 ) having a <100> crystallographic orientation; (b) defining an oxide mask ( 415 ) in the first semiconductor layer; and (c) utilizing the oxide mask to pattern the second semiconductor layer.
1. A method for making a semiconductor device, comprising:
forming a mask over a semiconductor stack, wherein the stack includes a first semiconductor layer comprising a first semiconductor material and having a (100) surface orientation and a channel direction selected from the group consisting of <110> and <100>channel directions, and a second semiconductor layer comprising a second semiconductor material and having a (110) surface orientation and a <211> direction parallel to the channel direction of the first semiconductor layer;
patterning the second semiconductor layer to form a plurality of mesas therein capped by the mask;
oxidizing the exposed surfaces of the patterned second semiconductor layer;
removing the mask, thereby exposing a portion of the second semiconductor material;
etching the exposed portion of the second semiconductor material; and
patterning the first semiconductor layer with the oxidized surfaces of the second semiconductor layer.
2. The method of claim 1 , wherein the step of etching the exposed portion of the second semiconductor material exposes a portion of the first semiconductor layer.
3. The method of claim 1 , wherein the semiconductor device is a FinFET.
4. The method of claim 1 , wherein patterning the first semiconductor layer comprises:
forming a nitride mask on the first semiconductor layer; and
etching the first semiconductor layer through the nitride mask.
5. The method of claim 4 , wherein forming a nitride mask comprises:
depositing a layer of nitride over the first semiconductor layer; and
patterning the layer of nitride.
6. The method of claim 1 , wherein the second semiconductor layer is essentially planar, and wherein each of the plurality of mesas have sidewalls that are essentially perpendicular to the plane of the second semiconductor layer.
7. The method of claim 1 , wherein each of the plurality of mesas comprises a core of the first semiconductor material having an outer layer of oxide thereon.
8. The method of claim 1 , wherein the step of removing the mask exposes the core of each of the plurality of mesas, and further comprising removing the core by etching.
9. The method of claim 1 , wherein the second semiconductor layer is a semiconductor-on-insulator (SOI) layer.
10. The method of claim 1 , wherein the semiconductor device is a FinFET.
11. A method for making a semiconductor device, comprising:
providing a semiconductor stack having first and second semiconductor layers which have first and second distinct crystallographic orientations, respectively, wherein said first semiconductor layer has a mesa defined therein which is capped with a hard mask;
forming an oxide layer on a side of the mesa;
removing the hard mask;
etching the portion of the first semiconductor layer disposed within the mesa; and
patterning the second semiconductor layer with the oxide layer.
12. The method of claim 11 , wherein the oxide layer is formed by oxidizing a side of the mesa.
13. The method of claim 11 , wherein the mesa is formed by etching the first semiconductor layer through at least one opening in the hard mask.
14. The method of claim 11 , wherein forming an oxide layer on a side of the mesa includes forming first and second oxide layers on first and second sides of the mesa, respectively.
15. The method of claim 11 , wherein the hard mask is a nitride mask, and wherein patterning the first semiconductor layer comprises etching the first semiconductor layer through the nitride mask.
16. The method of claim 15 , wherein the hard mask is formed by:
depositing a layer of nitride over the first semiconductor layer; and
patterning the layer of nitride.
17. The method of claim 11 , wherein the second semiconductor layer is essentially planar, and wherein the mesa has sidewalls that are essentially perpendicular to the plane of the second semiconductor layer.
18. The method of claim 11 , wherein the mesa comprises a core of the first semiconductor material having an outer layer of oxide thereon.
19. The method of claim 11 , wherein the step of removing the hard mask exposes the core of each of the mesa, and further comprising removing the core by etching.
20. The method of claim 11 , wherein the second semiconductor layer is a semiconductor-on-insulator (SOI) layer.
21. The method of claim 11 , wherein the mask is of essentially uniform thickness.
22. The method of claim 11 , wherein the semiconductor device is a FinFET.