Reducing silicide resistance in silicon/germanium-containing drain/source regions of transistors
In sophisticated P-channel transistors, a high germanium concentration may be used in a silicon/germanium alloy, wherein an additional semiconductor cap layer may provide enhanced process conditions during the formation of a metal silicide. For example, a silicon layer may be formed on the silicon/germanium alloy, possibly including a further strain-inducing atomic species other than germanium, in order to provide a high strain component while also providing superior conditions during the silicidation process.
1. A method, comprising:
forming a cavity in a semiconductor region laterally adjacent to a gate electrode structure of a transistor;
forming a strain-inducing silicon/germanium alloy in said cavity, said silicon/germanium alloy having a first silicon concentration;
forming a silicon-containing semiconductor material on said strain-inducing silicon/germanium alloy, said silicon-containing semiconductor material having a second silicon concentration that is greater than said first silicon concentration and a germanium concentration that is less than approximately 5 atomic percent;
forming drain and source regions at least partially in said silicon/germanium alloy and said silicon-containing semiconductor material; and
forming a metal silicide in said silicon-containing semiconductor material.
2. The method of claim 1 , wherein said silicon-containing semiconductor material comprises germanium.
3. The method of claim 2 , wherein said germanium concentration is less than approximately 1 atomic percent.
4. The method of claim 1 , wherein said silicon-containing semiconductor material is formed so as to contain an atomic species having a covalent radius that is greater than a covalent radius of germanium.
5. The method of claim 4 , wherein said atomic species comprises tin.
6. The method of claim 4 , wherein forming said silicon-containing semiconductor material comprises performing a selective epitaxial growth process.
7. The method of claim 1 , wherein said silicon-containing semiconductor material and said silicon/germanium alloy are formed in situ.
8. The method of claim 1 , wherein forming said silicon-containing semiconductor material comprises forming a silicon layer on said silicon/germanium alloy and introducing said atomic species into said silicon layer by performing an ion implantation process.
9. The method of claim 1 , wherein forming said metal silicide comprises adapting a thickness of said silicon-containing semiconductor material so as to create said metal silicide within said silicon-containing semiconductor material.
10. The method of claim 1 , wherein a germanium concentration of said silicon/germanium alloy is approximately 25 atomic percent or higher.
11. The method of claim 1 , wherein forming said metal silicide comprises depositing at least one of nickel and platinum and performing a heat treatment to initiate a chemical reaction of said at least one of nickel and platinum and the silicon of said silicon-containing semiconductor material.
12. A method, comprising:
forming a cavity in a semiconductor region laterally adjacent to a gate electrode structure of a transistor;
forming a strain-inducing silicon/germanium alloy in said cavity, said silicon/germanium alloy having a first silicon concentration;
forming a silicon-containing semiconductor material on said strain-inducing silicon/germanium alloy, said silicon-containing semiconductor material comprising germanium and having a second silicon concentration that is greater than said first silicon concentration, wherein a germanium concentration of said silicon-containing semiconductor material is less than approximately 1 atomic percent;
forming drain and source regions at least partially in said silicon/germanium alloy and said silicon-containing semiconductor material; and
forming a metal silicide in said silicon-containing semiconductor material.
13. A method, comprising:
forming a silicon-containing semiconductor material on a silicon/germanium alloy formed in an active region of a P-type transistor, wherein forming said silicon-containing semiconductor material comprises incorporating an atomic species having a greater covalent radius than germanium into a silicon base material, said silicon-containing semiconductor material having a germanium concentration that is less than a germanium concentration of said silicon/germanium alloy; and
forming a metal silicide locally restricted to said silicon-containing semiconductor material.
14. The method of claim 13 , wherein said silicon/germanium alloy and said silicon-containing semiconductor material are formed in situ by performing a selective epitaxial growth process.
15. The method of claim 13 , further comprising forming drain and source regions in said active region after forming said silicon/germanium alloy and prior to forming said silicon-containing semiconductor material.
16. The method of claim 13 , wherein said atomic species is incorporated by performing a selective epitaxial growth process using a precursor containing silicon and said atomic species.
17. The method of claim 13 , wherein said atomic species is incorporated by performing an ion implantation process.
18. The method of claim 13 , wherein said atomic species comprises tin.