Method for semiconductor gate hardmask removal and decoupling of implants
View Patent ↗A method is provided for fabricating a semiconductor device having implanted source/drain regions and a gate region, the gate region having been masked by the gate hardmask during source/drain implantation, the gate region having a polysilicon gate layered on a metal layered on a high-K dielectric layer. The gate region and the source/drain regions may be covered with a self planarizing spin on film. The film may be blanket etched back to uncover the gate hardmask while maintaining an etched back self planarizing spin on film on the implanted source/drain regions. The gate hardmask may be etched back while the etched back film remains in place to protect the implanted source/drain regions. The gate region may be low energy implanted to lower sheet resistance of the polysilicon layer. The etched back film may be then removed.
1. A method of fabricating a semiconductor device having implanted source/drain regions and a gate region, the gate region having been masked by the gate hardmask during a source/drain implantation, the gate region having a polysilicon gate layer layered on a metal layer that is layer on a high-K dielectric layer, the method comprising:
covering the gate region and the source/drain regions with a self planarizing spin on film;
blanket etching back the self planarizing spin on film to uncover the gate hardmask while maintaining an etched back self planarizing spin on film on the implanted source/drain regions;
etching out the gate hardmask while the etched back self planarizing spin on film remains in place to protect the implanted source/drain regions; and
removing the etched back self planarizing spin on film.
2. The method of claim 1 , further comprising low energy implanting of the gate region prior to removal of the etched back self planarizing film to lower sheet resistance of the polysilicon layer.
3. The method of claim 1 , wherein the self planarizing spin on film is an organic dielectric layer.
4. The method of claim 1 , wherein the etched back self planarizing spin on film is removed by a wet or dry removal process.
5. The method of claim 1 , further comprising performing source/drain implant activation and salicidation after removing the etched back self planarizing spin on film.
6. The method of claim 1 , wherein the blanket etching back further comprises determining an end point of the etching back in real time by predicting an approaching exposure of the gate hardmask and controlling etching back time after an approaching exposure is predicted.
7. The method of claim 6 , wherein predicting an approaching exposure comprises:
bouncing a beam of light through the semiconductor device in real time as the etching back proceeds and developing an interference pattern between components of light that are reflected at a first interface between self planarizing spin on film and a plasma chamber used in the etch backing and a buried interface between the self planarizing spin on film and implanted source/drain regions underneath the first interface; and
developing a fringe pattern that allows for an awareness of an approaching exposure of the buried hardmask before an actual exposure.
8. The method of claim 7 , wherein controlling the etching back time comprises maintaining the etching back for a predetermined amount of time after achieving the awareness of the approaching exposure.
9. A method of fabricating a semiconductor device having implanted source/drain regions and a gate region, the gate region having been masked by the gate hardmask during source/drain implantation, the gate region having a polysilicon gate layer layered on a metal layer that is layered on a high-K dielectric layer, the method comprising:
covering the gate region and the source/drain regions with an organic dielectric layer;
blanket etching back the organic dielectric layer to uncover the gate hardmask while maintaining an etched back organic dielectric layer on the implanted source/drain regions;
etching out the gate hardmask while the etched back organic dielectric layer remains in place to protect the implanted source/drain regions;
low energy implanting of the gate region;
removing the etched back organic dielectric layer; and
performing source/drain implant activation and salicidation after removing the etched back organic dielectric layer.
10. The method of claim 9 , wherein the organic dielectric layer is spun on to cover the gate region and the source/drain regions.
11. The method of claim 9 , wherein sides of the gate region are covered by spacers and ends of the spacers distal from the source/drain regions protrude above the etched back organic dielectric layer after etching out the gate hardmask.
12. The method of claim 9 , wherein the low energy implanting is for lowering the sheet resistance of the polysilicon layer.
13. The method of claim 9 , wherein the etched back organic dielectric layer is removed by a wet or dry removal process.