Low voltage metal gate antifuse with depletion mode MOSFET
View Patent ↗An antifuse according to an embodiment of the invention herein can include a depletion mode metal oxide semiconductor field effect transistor (“MOSFET”) having a conduction channel and a metal gate overlying the conduction channel. A cathode and an anode of the antifuse can be electrically coupled to the gate and spaced apart from one another in a direction the gate extends, such that the antifuse is programmable by driving a programming current between the cathode and the anode to cause material of the metal gate to migrate away. The gate may be configured such that, under appropriate biasing conditions, when the antifuse is unprogrammed, the conduction channel is turned on unless a voltage above a first threshold voltage is applied to the gate to turn off the conduction channel. The gate can be configured such that when the antifuse has been programmed, the conduction channel remains turned on even if a voltage above the first threshold voltage is applied between the gate and a source region of the MOSFET.
1. An antifuse, comprising:
a depletion mode metal oxide semiconductor field effect transistor (“MOSFET”) having a conduction channel and a metal gate overlying the conduction channel; and
a cathode and an anode, each being electrically coupled to the gate and spaced apart from one another in a direction the gate extends, such that the antifuse is programmable by driving a programming current between the cathode and the anode to cause material of the metal gate to migrate away,
wherein under appropriate biasing conditions, the gate is configured such that when the antifuse is unprogrammed, the conduction channel is turned on unless a voltage above a first threshold voltage is applied to the gate to turn off the conduction channel, and the gate being configured such that when the antifuse has been programmed, the conduction channel remains turned on even if a voltage above the first threshold voltage is applied between the gate and a source region of the MOSFET.
2. The antifuse as claimed in claim 1 , wherein the gate is configured such that the driving of the programming current generates a gap in the gate such that the conduction channel no longer can be turned off when the voltage greater than the threshold voltage is applied between the gate and the source region.
3. The antifuse as claimed in claim 1 , wherein the source region and a drain region of the MOSFET are separated from one another by the conduction channel, wherein a resistance between the source region and the drain region has a first value when the antifuse is unprogrammed and the voltage greater than the threshold voltage is applied to the gate, and the resistance between the source region and the drain region has a second value when the antifuse has been programmed and the voltage greater than the threshold voltage is applied to the gate, the second value being one or more orders of magnitude lower than the first value.
4. An integrated circuit including an antifuse as claimed in claim 3 , and a detection circuit coupled to the antifuse, the detection circuit configured to detect whether the antifuse has been programmed based on the value of the resistance between the source region and the drain region when the voltage greater than the threshold voltage is applied to the gate.
5. The antifuse as claimed in claim 1 , wherein the cathode and the anode are spaced apart from one another in a direction of a width of the conduction channel.
6. The antifuse as claimed in claim 1 , wherein the depletion mode MOSFET is a p type channel depletion mode MOSFET.
7. The antifuse as claimed in claim 6 , wherein the conduction channel when unprogrammed is turned on unless the gate is coupled to a voltage greater than ground.
8. The antifuse as claimed in claim 1 , wherein the depletion mode MOSFET is an n type channel depletion mode MOSFET.
9. The antifuse as claimed in claim 8 , wherein under appropriate biasing conditions the conduction channel of the antifuse when unprogrammed is turned on unless the gate is coupled to a voltage that is lower than ground.
10. An antifuse, comprising:
a depletion mode metal oxide semiconductor field effect transistor (“MOSFET”) having a conduction channel and a metal gate overlying the conduction channel; and
a cathode and an anode, each being electrically coupled to the gate and spaced apart from one another in a direction the gate extends, such that the antifuse is programmable by driving a programming current between the cathode and the anode to cause material of the metal gate to migrate away,
wherein under appropriate biasing conditions, the gate is configured such that when the antifuse is unprogrammed, the conduction channel is turned on unless a voltage above a first threshold voltage is applied to the gate to turn off the conduction channel, and the gate being configured such that when the antifuse has been programmed, the conduction channel remains turned on even if a voltage above the first threshold voltage is applied between the gate and a source region of the MOSFET, and
wherein the gate is configured to conduct the programming current when a programming voltage of less than one volt is applied between the cathode and the anode which is the same as a power supply voltage that can be used to operate field effect transistors on a semiconductor chip which embodies the antifuse.
11. The antifuse as claimed in claim 10 , wherein the gate is configured such that the driving of the programming current generates a gap in the gate such that the conduction channel no longer can be turned off when the voltage greater than the threshold voltage is applied between the gate and the source region.
12. The antifuse as claimed in claim 10 , wherein the source region and a drain region of the MOSFET are separated from one another by the conduction channel, wherein a resistance between the source region and the drain region has a first value when the antifuse is unprogrammed and the voltage greater than the threshold voltage is applied to the gate, and the resistance between the source region and the drain region has a second value when the antifuse has been programmed and the voltage greater than the threshold voltage is applied to the gate, the second value being one or more orders of magnitude lower than the first value.
13. The antifuse as claimed in claim 10 , wherein the cathode and the anode are spaced apart from one another in a direction of a width of the conduction channel.
14. The antifuse as claimed in claim 10 , wherein the depletion mode MOSFET is a p type channel depletion mode MOSFET.
15. The antifuse as claimed in claim 10 , wherein the depletion mode MOSFET is an n type channel depletion mode MOSFET.
16. An antifuse, comprising:
a depletion mode metal oxide semiconductor field effect transistor (“MOSFET”) having a conduction channel and a metal gate overlying the conduction channel; and
a cathode and an anode, each being electrically coupled to the gate and spaced apart from one another in a direction the gate extends, such that the antifuse is programmable by driving a programming current between the cathode and the anode to cause material of the metal gate to migrate away,
wherein under appropriate biasing conditions, the gate is configured such that when the antifuse is unprogrammed, the conduction channel is turned on unless a voltage above a first threshold voltage is applied to the gate to turn off the conduction channel, and the gate being configured such that when the antifuse has been programmed, the conduction channel remains turned on even if a voltage above the first threshold voltage is applied between the gate and a source region of the MOSFET, and
wherein the gate includes a metal layer adjacent a gate dielectric of the antifuse, and the antifuse is programmable by the current between the cathode and the anode causing material of the metal layer to migrate away from the area therebetween.
17. The antifuse as claimed in claim 16 , wherein the gate is configured such that the driving of the programming current generates a gap in the gate such that the conduction channel no longer can be turned off when the voltage greater than the threshold voltage is applied between the gate and the source region.
18. The antifuse as claimed in claim 16 , wherein the source region and a drain region of the MOSFET are separated from one another by the conduction channel, wherein a resistance between the source region and the drain region has a first value when the antifuse is unprogrammed and the voltage greater than the threshold voltage is applied to the gate, and the resistance between the source region and the drain region has a second value when the antifuse has been programmed and the voltage greater than the threshold voltage is applied to the gate, the second value being one or more orders of magnitude lower than the first value.
19. The antifuse as claimed in claim 16 , wherein the depletion mode MOSFET is a p type channel depletion mode MOSFET.
20. The antifuse as claimed in claim 16 , wherein the depletion mode MOSFET is an n type channel depletion mode MOSFET.