Self-aligned bipolar junction transistors
View Patent ↗Device structures, fabrication methods, and design structures for a bipolar junction transistor. An intrinsic base is formed on the substrate, a terminal is formed on the intrinsic base, and an extrinsic base is formed that is arranged in juxtaposition with the intrinsic base on the substrate. The intrinsic base and terminal are respectively comprised of first and second semiconductor materials.
1. A method of fabricating a bipolar junction transistor, the method comprising:
forming a first layer on a substrate and comprised of a first semiconductor material;
forming a second layer on the first layer and comprised of a second semiconductor material;
forming a first trench that penetrates through the second layer to define a sidewall of a first terminal for the bipolar junction transistor; and
introducing an impurity species into a first section of the first layer at a base of the first trench while a second section of the first layer is masked by the first terminal,
wherein the second section of the first layer comprises an intrinsic base of the bipolar junction transistor.
2. The method of claim 1 further comprising:
after the impurity species is introduced, forming a spacer on the sidewall of the first terminal to cover a portion of the first section of the first layer; and
after the spacer is formed, extending the first trench through the first layer to the substrate.
3. The method of claim 2 wherein the covered portion of the first section of the first layer comprises an extrinsic base of the bipolar junction transistor.
4. The method of claim 2 further comprising:
after the first trench is extended through the first layer to the substrate, forming a second trench in the substrate that is aligned with the first trench in the first layer.
5. The method of claim 4 wherein forming the second trench in the substrate further comprises:
partially removing the substrate beneath the covered portion of the first section of the first layer to define an undercut beneath the covered portion of the second section of the first layer.
6. The method of claim 5 further comprising:
depositing an electrical insulator that at least partially fills the second trench to define an isolation structure in the substrate; and
forming a second terminal of the bipolar junction transistor beneath a top surface of the substrate,
wherein the second terminal is coextensive with the covered portion of the second section of the first layer, and the isolation structure laterally bounds the second terminal.
7. The method of claim 1 further comprising:
before the first layer and the second layer are formed, forming a second terminal of the bipolar junction transistor in the substrate.
8. The method of claim 1 wherein the first terminal is an emitter of the bipolar junction transistor.
9. The method of claim 1 wherein the first terminal is a collector of the bipolar junction transistor.