Devices and methods of forming bulk FinFETS with lateral seg for source and drain on dielectrics
Devices and methods for forming semiconductor devices with FinFETs are provided. One intermediate semiconductor device includes, for instance: a substrate with at least one fin with at least one channel; at least one gate over the channel; at least one hard-mask over the gate; and at least one spacer disposed over the gate and hard-mask. One method includes, for instance: obtaining an intermediate semiconductor device; forming at least one recess into the substrate, the recess including a bottom and at least one sidewall exposing a portion of the at least one fin; depositing a dielectric layer into the at least one recess; removing at least a portion of the dielectric layer to form a barrier dielectric layer; and performing selective epitaxial growth in the at least one recess over the barrier dielectric layer.
1. A method comprising:
obtaining an intermediate semiconductor device, comprising:
a substrate with at least one fin comprising at least one channel;
at least one gate over the at least one channel;
at least one hard-mask over the at least one gate; and
at least one spacer disposed over the at least one gate and at least one hard-mask;
forming at least one recess into the substrate, wherein the recess comprises a bottom and at least one sidewall exposing a portion of the at least one fin;
depositing a first dielectric layer into the at least one recess;
performing chemical mechanical planarization on the first dielectric layer;
applying a first hard mask layer over the first dielectric layer;
performing a first dry etch over the first hard mask layer to create a first barrier dielectric layer and expose at least a portion of the at least one sidewalls of the at least one fin;
depositing a second dielectric layer over the intermediate semiconductor device;
applying a second hard mask layer over the second dielectric layer;
performing a second dry etch over the second hard mask layer to create a second barrier dielectric layer and expose at least a portion of the at least one sidewalls of the at least one fin; and
performing selective epitaxial growth in the at least one recess over the barrier dielectric layer.
2. The method of claim 1 , wherein the first dielectric layer is a thick dielectric layer.
3. A method comprising:
obtaining an intermediate semiconductor device, comprising:
a substrate with at least one fin comprising at least one channel;
at least one gate over the at least one channel;
at least one hard-mask over the at least one gate;
and at least one spacer disposed over the at least one gate and at least one hard-mask;
forming at least one recess into the substrate, wherein the recess comprises a bottom and at least one sidewall exposing a portion of the at least one fin;
depositing a first dielectric layer into the at least one recess, wherein the first dielectric layer is a thick dielectric layer;
removing at least a portion of the first dielectric layer to form a barrier dielectric layer, comprising:
performing chemical mechanical planarization on the first dielectric layer; and
etching the first dielectric layer to expose at least a portion of the at least one sidewalls of the at least one fin, comprising:
applying a first hard mask layer over the first dielectric layer;
performing a dry etch over the first hard mask layer to create a first barrier dielectric layer;
depositing a second dielectric layer over the intermediate semiconductor device;
applying a second hard mask layer over the first dielectric layer; and
performing a dry etch over the second hard mask layer to create a second barrier dielectric layer;
performing selective epitaxial growth in the at least one recess over the barrier dielectric layer.
4. The method of claim 1 , wherein the first dielectric layer is a thin dielectric layer.
5. The method of claim 4 , further comprising:
performing sputtering on the thin dielectric layer.
6. The method of claim 4 , wherein the thin dielectric layer is approximately 1 nm.