Granted Patent B2

US 9,259,821 · App. 14/314,327 · Granted Feb 16, 2016

Abstract

Claims (49)

1. A chemical mechanical polishing pad, comprising:

a polyurethane polishing layer having a composition and a polishing surface; wherein the composition is the reaction product of ingredients, comprising:

(a) a polyfunctional isocyanate;

(b) a curative system, comprising:

(i) a carboxylic acid containing polyfunctional curative having an average of at least two active hydrogens and at least one carboxylic acid functional group per molecule, wherein the at least one carboxylic acid functional group survives the reaction to form the composition; and,

(c) optionally, a plurality of microelements;

wherein the composition exhibits an acid number of ≧0.5 mg (KOH)/g; wherein the polishing surface is adapted for polishing a substrate; and, wherein the polishing surface exhibits a conditioning tolerance of ≧80%.

2. The chemical mechanical polishing pad of claim 1 , wherein the substrate is selected from the group consisting of at least one of a magnetic substrate, an optical substrate and a semiconductor substrate.

3. The chemical mechanical polishing pad of claim 1 , wherein the polyurethane polishing layer exhibits a specific gravity of greater than 0.6; a Shore D hardness of 5 to 80; an elongation to break of 100 to 450%.

4. The chemical mechanical polishing pad of claim 1 , wherein the curative system further comprises at least one of:

a diamine;

a diol;

an amine initiated polyol curative; and,

a high molecular weight polyol curative having a number average molecular weight, M N , of 2,000 to 100,000 and an average of 3 to 10 hydroxyl groups per molecule.

5. The chemical mechanical polishing pad of claim 1 , further comprising: an endpoint detection window.

6. The chemical mechanical polishing pad of claim 5 , wherein the endpoint detection window is selected from the group consisting of an integral window and a plug in place window.

7. A chemical mechanical polishing pad, comprising:

a polyurethane polishing layer having a composition and a polishing surface, wherein the composition is the reaction product of ingredients, comprising:

(a) an isocyanate terminated urethane prepolymer, wherein the isocyanate terminated urethane prepolymer is the reaction product of ingredients, comprising:

(i) a polyfunctional isocyanate; and,

(ii) a carboxylic acid containing polyfunctional material having an average of at least two active hydrogens and at least one carboxylic acid functional group per molecule, wherein the at least one carboxylic acid functional group survives the reaction to form the isocyanate terminated urethane prepolymer; and,

(iii) a prepolymer polyol; and,

(b) a curative system, comprising at least one polyfunctional curative; and,

(c) optionally, a plurality of microelements

wherein the polyurethane polishing layer composition exhibits an acid number of ≧0.5 mg (KOH)/g; wherein the polishing surface is adapted for polishing a substrate; and, wherein the polishing surface exhibits a conditioning tolerance of ≧80%.

8. A method of chemical mechanical polishing a substrate, comprising:

providing a substrate;

selecting a chemical mechanical polishing pad comprising a polyurethane polishing layer having a composition and a polishing surface; wherein the composition is the reaction product of ingredients, comprising:

(a) a polyfunctional isocyanate;

(b) a curative system, comprising:

(i) a carboxylic acid containing polyfunctional curative having an average of at least two active hydrogens and at least one carboxylic acid functional group per molecule, wherein the at least one carboxylic acid functional group survives the reaction to form the composition; and,

(c) optionally, a plurality of microelements;

wherein the polishing surface is adapted for polishing the substrate; wherein the composition is selected to exhibit an acid number of ≧0.5 mg (KOH)/g; and, wherein the polishing surface exhibits a conditioning tolerance of ≧80%;

creating dynamic contact between the polishing surface and the substrate to polish a surface of the substrate; and,

conditioning of the polishing surface with an abrasive conditioner.

9. The method of claim 8 , wherein the substrate is selected from the group consisting of at least one of a magnetic substrate, an optical substrate and a semiconductor substrate.

10. A method of chemical mechanical polishing a substrate, comprising:

providing a substrate;

selecting a chemical mechanical polishing pad comprising a polyurethane polishing layer having a composition and a polishing surface; wherein the composition is the reaction product of ingredients, comprising:

(a) an isocyanate terminated urethane prepolymer, wherein the isocyanate terminated urethane prepolymer is the reaction product of ingredients, comprising:

(i) a polyfunctional isocyanate; and,

(ii) a carboxylic acid containing polyfunctional material having an average of at least two active hydrogens and at least one carboxylic acid functional group per molecule, wherein the at least one carboxylic acid functional group survives the reaction to form the isocyanate terminated urethane prepolymer; and,

(iii) a prepolymer polyol; and,

(b) a curative system, comprising at least one polyfunctional curative; and,

(c) optionally, a plurality of microelements

wherein the polishing surface is adapted for polishing the substrate; wherein the composition is selected to exhibit an acid number of ≧0.5 mg (KOH)/g; and, wherein the polishing surface exhibits a conditioning tolerance of ≧80%;

creating dynamic contact between the polishing surface and the substrate to polish a surface of the substrate; and,

conditioning of the polishing surface with an abrasive conditioner.

11. The method of claim 10 , wherein the substrate is selected from the group consisting of at least one of a magnetic substrate, an optical substrate and a semiconductor substrate.

Assignments (6)