Attaching apparatus

1. An attaching apparatus for attaching a substrate and a support through an adhesive layer by applying a pressure force to a laminate formed by laminating the substrate, the adhesive layer, and the support for supporting the substrate in this order, comprising:

a pair of plate members for sandwiching the laminate and applying a pressure force to the laminate; and

a strut member for supporting the plate member,

wherein a portion of the plate member being in contact with the laminate is formed of ceramics,

wherein the plate member is configured such that the portion thereof being in contact with the laminate has a flatness of 1.0 μm or less when the portion is not pressed,

wherein the strut member is formed of a center supporting member for supporting at least the center portion of the plate member and a plurality of peripheral supporting members for supporting portions other than the center portion of the plate member,

wherein the plurality of peripheral supporting members are each extendable and contractible, and correct bending or distortion of a surface of the plate member so that the portion of the plate member being in contact with the laminate maintains the flatness of 1.0 μm or less when the portion is not pressed,

wherein a carrying pin for lifting the laminate when carrying the laminate is installed movably inside the plate member,

the attaching apparatus further comprising:

a prevention member for preventing the laminate from attaching to the plate member, the prevention member being provided at the portion of the plate member being in contact with the laminate,

wherein the prevention member is given a biasing force so that the prevention member protrudes from the portion of the plate member being in contact with the laminate,

wherein the biasing force is adjusted such that when pressing the laminate, the prevention member is pushed into the plate member, and when the pressing of the laminate is released, the prevention member protrudes from the portion of the plate member being in contact with the laminate.

2. The attaching apparatus according to claim 1 ,

wherein the center supporting member is configured so as to support at least one of the pair of plate members in a freely movable manner to apply a pressure force to the laminate.

3. The attaching apparatus according to claim 1 ,

wherein the number of the peripheral supporting members with respect to one plate member is in a range of 3 to 10.

4. The attaching apparatus according to claim 1 ,

wherein the pair of plate members are vertically arranged, and the upper side plate member is supported in a freely movable manner by a strut member.

5. The attaching apparatus according to claim 1 ,

wherein the ceramics is alumina.

6. The attaching apparatus according to claim 1 ,

wherein a portion being in contact with the strut member in the plate member is formed of a metal.

7. The attaching apparatus according to claim 1 ,

wherein the plate member has a heating device.

8. The attaching apparatus according to claim 1 , further comprising: a detecting portion for detecting an amount of deflection of the plate member caused when a pressure force is applied to the laminate; and a control portion for expanding and contracting the plurality of peripheral supporting members,

wherein the control portion controls expansion and contraction of the plurality of peripheral support members on a basis of a result of detection by the detecting portion when the pressure force is applied to the laminate, so that an amount of deflection of a peripheral portion of the plate member is 1.0 μm or less based on the center portion of the plate member as a reference.