IP Library Granted Patent US 9,761,565
Granted Patent B2
US 9,761,565 · App. 15/418,845 · Granted Sep 12, 2017

Microelectronic packages having embedded sidewall substrates and methods for the producing thereof

Inventors: Michael B. Vincent (Phoenix, AZ); Scott M. Hayes (Chandler, AZ)
Assignee: NXP USA, INC.
H01L25/0657H01L21/78H01L23/3114H01L23/528H01L24/09H01L24/94H01L2224/0231H01L2224/0237H01L2225/06541H01L2225/06548H01L2225/06551
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Quick Facts
Patent No.
US 9,761,565
App. No.
15/418,845
Granted
Sep 12, 2017
Kind
B2
Abstract

Methods for fabricating microelectronic packages and microelectronic packages are provided. In one embodiment, the microelectronic package fabrication method includes producing a molded panel containing a sidewall substrate. The molded panel is singulated to produce a Fan-Out Wafer Level Package core including a molded body having a fan-out region in which the sidewall substrate is embedded. A side connect trace is printed or otherwise formed on a sidewall of the Fan-Out Wafer Level Package core and extends at least partially across the embedded sidewall substrate.

Claims (44)

1. A microelectronic package, comprising:

a first Fan-Out Wafer Level Package (FO-WLP) core, comprising:

a first molded body having a fan-out region and a sidewall;

a sidewall substrate embedded in the fan-out region of the first molded body; and

a first sidewall pad exposed through the sidewall of the first molded body;

a second FO-WLP core in a stacked relationship with the first FO-WLP core, the second FO-WLP core comprising:

a second molded body having a sidewall; and

a second sidewall pad exposed through the sidewall of the second molded body; and

a first side connect trace extending from the first sidewall pad, over the sidewall substrate, and to the second sidewall pad to electrically interconnect the first and second FO-WLP cores;

wherein the sidewall substrate comprises a substrate body, wherein the first FO-WLP core further comprises a dielectric layer between the first sidewall pad and the substrate body, and wherein the first sidewall pad is at least partially composed of a metal plated over the dielectric layer.

2. The microelectronic package of claim 1 , wherein the substrate body is composed at least partially of a resin, a ceramic, silicon, gallium nitride, or gallium arsenide.

3. The microelectronic package of claim 1 , further comprising multiple side connect traces in which the first side connect trace is included, the multiple side connect traces arranged in a laterally-spaced row contacting the sidewall substrate.

4. The microelectronic package of claim 1 , wherein the first side connect trace has a substantially straight geometry and extends substantially parallel to a centerline of the microelectronic package.

5. The microelectronic package of claim 1 , wherein the first FO-WLP core further comprises one or more Redistribution Layers (RDLs) formed over the first molded body, the one or more RDLs containing an interconnect line electrically coupled to the first sidewall pad.

6. The microelectronic package of claim 5 , wherein the first sidewall pad has a surface area exposed through the sidewall of the first molded body, and wherein the surface area of the first sidewall pad is greater than a cross-sectional area of the interconnect line, as taken along a cut plane orthogonal to an upper principal surface of the one or more RDLs.

7. The microelectronic package of claim 1 , wherein the first molded body and the sidewall substrate each comprise a singulated surface, and wherein the singulated surface of the sidewall substrate has a surface roughness less than the singulated surface of the first molded body.

8. A microelectronic package, comprising:

a first Fan-Out Wafer Level Package (FO-WLP) core, comprising:

a first molded body having a fan-out region and a sidewall;

a sidewall substrate embedded in the fan-out region of the first molded body; and

a first sidewall pad exposed through the sidewall of the first molded body;

a second FO-WLP core in a stacked relationship with the first FO-WLP core, the second FO-WLP core comprising:

a second molded body having a sidewall; and

a second sidewall pad exposed through the sidewall of the second molded body; and

a first side connect trace extending from the first sidewall pad, over the sidewall substrate, and to the second sidewall pad to electrically interconnect the first and second FO-WLP cores;

wherein the sidewall substrate contains a substrate body comprised of a singulated piece of a bulk silicon wafer.

9. The microelectronic package of claim 8 , further comprising multiple side connect traces in which the first side connect trace is included, the multiple side connect traces arranged in a laterally-spaced row contacting the sidewall substrate.

10. The microelectronic package of claim 8 , wherein the first side connect trace has a substantially straight geometry and extends substantially parallel to a centerline of the microelectronic package.

11. The microelectronic package of claim 8 , further comprising one or more Redistribution Layers (RDLs) formed over the first molded body, the one or more RDLs containing an interconnect line electrically coupled to the first sidewall pad.

12. The microelectronic package of claim 11 , wherein the first sidewall pad has a surface area exposed through the sidewall of the first molded body, and wherein the surface area of the first sidewall pad is greater than a cross-sectional area of the interconnect line, as taken along a cut plane orthogonal to an upper principal surface of the one or more RDLs.

13. The microelectronic package of claim 8 , wherein, the first molded body and the sidewall substrate each comprise a singulated surface, and wherein the singulated surface of the sidewall substrate has a surface roughness less than the singulated surface of the first molded body.

14. A microelectronic package, comprising:

a first Fan-Out Wafer Level Package (FO-WLP) core, comprising:

a molded body having a fan-out region;

a microelectronic component embedded in the molded body adjacent the fan-out region;

an embedded sidewall substrate located in the fan-out region of the molded body, the embedded sidewall substrate comprising a substrate body; a dielectric layer formed over the substrate body; and a first sidewall pad exposed through a sidewall of the molded boy and at least partially composed of a metal plated over the dielectric layer; and

a side connect trace electrically coupled to the microelectronic component and formed at least partially on the embedded sidewall substrate.

15. The microelectronic package of claim 14 , further comprising a second FO-WLP core bonded to the first FO-WLP core in a stacked relationship, the first FO-WLP core and the second FO-WLP core electrically interconnected by the side connect trace.

16. The microelectronic package of claim 15 , wherein the first FO-WLP core has a frontside and an opposing backside, wherein the opposing backside of the first FO-WLP core is bonded to the second FO-WLP core, and wherein the embedded sidewall substrate extends from the frontside to the opposing backside of the first FO-WLP core.

17. The microelectronic package of claim 14 , further comprising a second FO-WLP core bonded to the first FO-WLP core in a stacked configuration;

wherein the second FO-WLP core comprises second sidewall pad; and

wherein the side connect trace extends from the first sidewall pad to the second sidewall pad to electrically interconnect the first and second FO-WLP cores.

18. The microelectronic package of claim 14 , wherein the embedded sidewall substrate comprises a sidewall pad, and wherein the side connect trace is electrically coupled to the microelectronic component through the sidewall pad.

19. The microelectronic package of claim 18 , further comprising one or more Redistribution Layers (RDLs) formed over the molded body and containing an interconnect line, the interconnect line electrically coupling the microelectronic component to the sidewall pad.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 27, 2017
From: VINCENT, MICHAEL B.; HAYES, SCOTT M.
To: NXP USA, INC.
Reel/Frame 042154/0546 →
MERGER AND CHANGE OF NAME Recorded Mar 23, 2017
From: NXP SEMICONDUCTORS USA INC.; FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 041800/0283 →
Continuity (2)
Division 14316580 · Jun 26, 2014
Related Publication 20170141084A1 · May 18, 2017