Forming a contact for a tall fin transistor
A method of making a semiconductor device includes forming a recessed fin in a substrate, the recessed fin being substantially flush with a surface of the substrate; performing an epitaxial growth process over the recessed fin to form a source/drain over the recessed fin; and disposing a conductive metal around the source/drain.
1. A semiconductor device, comprising:
a substrate;
isolation regions arranged in the substrate;
a recessed fin patterned in the substrate between the isolation regions, a top surface of the recessed fin being flush with a top surface of the isolation regions, and the recessed fin having a uniform height along a length of the recessed fin;
a discrete epitaxial growth arranged over the recessed fin to form a discrete source/drain, the discrete epitaxial growth having a width that is wider than a width of the recessed fin;
a metal silicide layer arranged on the epitaxial growth; and
a conductive metal surrounding the metal silicide layer and the epitaxial growth, the conductive metal directly contacting the isolation regions and extending from the isolation regions and over the metal silicide layer.
2. The semiconductor device of claim 1 , wherein the recessed fin has a width in a range from about 4 to about 12 nm.
3. The semiconductor device of claim 1 , wherein the epitaxial growth has a width in a range from about 10 to about 50 nm.
4. The semiconductor device of claim 1 , further comprising another epitaxial growth over another adjacent recessed fin.
5. The semiconductor device of claim 4 , wherein the epitaxial growths are discrete and each surrounded by the conductive metal along three sidewalls.
6. The semiconductor device of claim 1 , further comprising a metal silicide layer between the conductive metal and the epitaxial growth.