IP Library › Granted Patent US 6,630,406
Granted Patent Utility
US 6,630,406 · Confirmation No. 8902

PLASMA ASHING PROCESS

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2013-03-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-03-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-02-08 PA.. Power of Attorney 1 View
2013-02-08 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2013-02-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-01-07 RXOGNOTC Notice of Reexam Published in Official Gazette 1 View
2003-07-23 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-23 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-05-09 LET. Miscellaneous Incoming Letter 1 View
2003-05-09 DRW Drawings-only black and white line drawings 3 View
2003-04-22 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2003-04-22 1449 List of References cited by applicant and considered by examiner 1 View
2003-04-21 SRNT Examiner's search strategy and results 2 View
2003-04-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-04-15 DRW Drawings-only black and white line drawings 2 View
2003-04-09 LET. Miscellaneous Incoming Letter 2 View
2003-04-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-04-09 CLM Claims 9 View
2003-04-09 DRW Drawings-only black and white line drawings 1 View
2003-04-09 REM Applicant Arguments/Remarks Made in an Amendment 17 View
2003-03-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-02-28 CTNF Non-Final Rejection 7 View
2003-02-28 1449 List of References cited by applicant and considered by examiner 2 View
2003-02-28 892 List of references cited by examiner 2 View
2003-02-28 FOR Foreign Reference 21 View
2002-04-29 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-04-23 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-04-23 C.AD Change of Address 1 View
2001-07-05 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-05-14 TRNA Transmittal of New Application 5 View
2001-05-14 SPEC Specification 15 View
2001-05-14 CLM Claims 9 View
2001-05-14 ABST Abstract 1 View
2001-05-14 DRW Drawings-only black and white line drawings 3 View
2001-05-14 OATH Oath or Declaration filed 3 View
2001-05-14 SRFW Search information including classification, databases and other search related notes 1 View
2001-05-14 FWCLM Index of Claims 1 View
2001-05-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-05-14 TRNA Transmittal of New Application 5 View
2001-05-14 SPEC Specification 15 View
2001-05-14 CLM Claims 9 View
2001-05-14 ABST Abstract 1 View
2001-05-14 DRW Drawings-only black and white line drawings 3 View
2001-05-14 OATH Oath or Declaration filed 3 View
2001-05-14 BIB Bibliographic Data Sheet 2 View
2001-05-14 WFEE Fee Worksheet (SB06) 1 View
2001-05-14 WFEE Fee Worksheet (SB06) 2 View
2001-05-14 WCLM Claims Worksheet (PTO-2022) 1 View
2001-05-14 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
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Quick Facts
Patent No.
US 6,630,406
App. No.
09/855,177
Filed
2001-05-14
Granted
2003-10-07
Pub. No.
US20030032300A1
Art Unit
2822
PTA
-120 days