IP Library › Granted Patent US 6,548,416
Granted Patent Utility
US 6,548,416 · Confirmation No. 3959

PLASMA ASHING PROCESS

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2013-03-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-03-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-02-08 PA.. Power of Attorney 1 View
2013-02-08 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2013-02-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-07-24 TRNA Transmittal of New Application 5 View
2001-07-24 SPEC Specification 11 View
2001-07-24 CLM Claims 4 View
2001-07-24 ABST Abstract 1 View
2001-07-24 DRW Drawings-only black and white line drawings 5 View
2001-07-24 OATH Oath or Declaration filed 2 View
2001-07-24 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,548,416
App. No.
09/911,682
Filed
2001-07-24
Granted
2003-04-15
Pub. No.
US20030022511A1
Art Unit
2812
PTA
-193 days