Patent Application
Utility
App. No. 10/023,516
· Confirmation No. 4747
WAFER PEDESTAL TILT MECHANISM
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-12-17 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-12-17 | SPEC |
Specification | 10 | View | |
| 2001-12-17 | CLM |
Claims | 3 | View | |
| 2001-12-17 | ABST |
Abstract | 1 | View | |
| 2001-12-17 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-12-17 | OATH |
Oath or Declaration filed | 1 | View | |
| 2001-12-17 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Michel Pharand
Chelmsford, MA
Allan D. Weed
Marblehead, MA
Attorneys & Agents of Record
Classification
USPC
250/492.21
H10P95/00
H10P72/7618
H10P72/50
H10P30/20
G21K5/08
H01J37/20
H01J37/3171
H01J2237/31701
Prosecution
- Examiner
- GILL, ERIN-MICHAEL
- Art Unit
- 2881
- Docket No.
- 00-SM6-226
- Confirmation No.
- 4747
Publication
- Pub. No.
- US20030111617A1
- Pub. Date
- 2003-06-19
Patent Term Adjustment
-118days
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Quick Facts
- App. No.
- 10/023,516
- Filed
- 2001-12-17
- Granted
- 2004-04-27
- Pub. No.
- US20030111617A1
- Examiner
- GILL, ERIN-MICHAEL
- Art Unit
- 2881
- PTA
- -118 days
External Links