Granted Patent
Utility
US 6,800,494
· Confirmation No. 1867
METHOD AND APPARATUS FOR CONTROLLING COPPER BARRIER/SEED DEPOSITION PROCESSES
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-03-18 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2004-11-05 | COCIN |
Request for Certificate of Correction | 3 | View | |
| 2004-04-21 | ABN |
Abandonment | 1 | View | |
| 2004-04-21 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-03-16 | PET. |
Petition Entered | 6 | View | |
| 2004-03-03 | ABN |
Abandonment | 3 | View | |
| 2003-10-22 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-10-22 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2003-10-22 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-10-22 | FWCLM |
Index of Claims | 1 | View | |
| 2003-09-26 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-09-26 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-09-02 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-09-02 | CLM |
Claims | 16 | View | |
| 2003-09-02 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-06-25 | CTNF |
Non-Final Rejection | 10 | View | |
| 2003-06-25 | 892 |
List of references cited by examiner | 2 | View | |
| 2002-11-18 | C.AD |
Change of Address | 1 | View | |
| 2002-05-17 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-05-17 | SPEC |
Specification | 21 | View | |
| 2002-05-17 | CLM |
Claims | 8 | View | |
| 2002-05-17 | ABST |
Abstract | 1 | View | |
| 2002-05-17 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-05-17 | OATH |
Oath or Declaration filed | 6 | View | |
| 2002-05-17 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-05-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-05-17 | FWCLM |
Index of Claims | 1 | View | |
| 2002-05-17 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-05-17 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-05-17 | SPEC |
Specification | 21 | View | |
| 2002-05-17 | CLM |
Claims | 8 | View | |
| 2002-05-17 | ABST |
Abstract | 1 | View | |
| 2002-05-17 | OATH |
Oath or Declaration filed | 6 | View | |
| 2002-05-17 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-05-17 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-05-17 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Howard Ernest Castle
Austin, TX
William S. Brennan
Austin, TX
Attorneys & Agents of Record
Classification
USPC
438/14
H10W20/033
H10W20/425
H10W20/043
H10P74/23
H10W20/081
Prosecution
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- Customer No.
- 23720
- Docket No.
- 2000.091000
- Confirmation No.
- 1867
Patent Term Adjustment
-90days
No related applications found.
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
RELEASE OF SECURITY INTEREST
Recorded 2020-11-20
from
GLOBALFOUNDRIES INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-11-02
from
GLOBALFOUNDRIES INC.
SECURITY AGREEMENT
Recorded 2018-11-29
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-05-17
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Quick Facts
- Patent No.
- US 6,800,494
- App. No.
- 10/150,320
- Filed
- 2002-05-17
- Granted
- 2004-10-05
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- PTA
- -90 days
External Links